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Patent #:
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Issue Dt:
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06/16/1998
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Application #:
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08642010
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Filing Dt:
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05/02/1996
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Title:
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LITHOGRAPHIC DEVICE WITH A THREE-DIMENSIONALLY POSITIONABLE MASK HOLDER
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Patent #:
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Issue Dt:
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02/22/2000
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Application #:
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08684873
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Filing Dt:
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07/25/1996
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Title:
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ILLUMINATION UNIT FOR AN OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08776418
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Filing Dt:
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01/30/1997
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Title:
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POSITIONING DEVICE WITH A REFERENCE FRAME FOR A MEASURING SYSTEM, AND A LITHOGRAPHIC DEVICE PROVIDED WITH SUCH A POSITIONING DEVICE
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Patent #:
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Issue Dt:
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07/04/2000
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Application #:
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08810793
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Filing Dt:
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03/04/1997
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Title:
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LITHOGRAPHIC APPARATUS FOR STEP-AND-SCAN IMAGING OF MASK PATTERN WITH INTERFEROMETER MIRRORS ON THE MASK AND WAFER HOLDERS
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Patent #:
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Issue Dt:
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04/04/2000
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Application #:
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08812283
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Filing Dt:
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03/06/1997
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Title:
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DIFFERENTIAL INTERFEROMETER SYSTEM AND LITHOGRAPHIC STEP-AND-SCAN APPARATUS PROVIDED WITH SUCH A SYSTEM
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Patent #:
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Issue Dt:
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06/29/1999
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Application #:
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08818143
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Filing Dt:
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03/13/1997
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Title:
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ALIGNMENT DEVICE AND LITHOGRAPHIC APPARATUS PROVIDED WITH SUCH A DEVICE
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Patent #:
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Issue Dt:
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03/30/1999
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Application #:
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08824624
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Filing Dt:
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03/27/1997
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Title:
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SCANNING-SLIT EXPOSURE DEVICE
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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08824625
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Filing Dt:
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03/27/1997
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Title:
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LITHOGRAPHIC SCANNING EXPOSURE PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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05/23/2000
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Application #:
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08833873
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Filing Dt:
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04/10/1997
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Title:
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PHOTOLITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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08948471
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Filing Dt:
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10/10/1997
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Title:
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TWO-DIMENSIONALLY BALANCED POSITIONING DEVICE WITH TWO OBJECT HOLDERS, AND LITHOGRAPHIC DEVICE PROVIDED WITH SUCH A POSITIONING DEVICE
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09036488
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Filing Dt:
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03/06/1998
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS WITH AN ALIGNMENT
SYSTEM FOR ALIGNING SUBSTRATE ON MASK
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09099505
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Filing Dt:
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06/18/1998
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Title:
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ALIGNMENT DEVICE AND LITHOGRAPHIC APPARATUS COMPRISING SUCH A DEVICE
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09103733
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Filing Dt:
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06/24/1998
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Title:
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INTERFEROMETER SYSTEM WITH TWO WAVELENGHTS, AND LITHOGRAPHIC APPARATUS PROVIDED WITH SUCH A SYSTEM
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09103734
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Filing Dt:
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06/24/1998
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Title:
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POSITIONING DEVICE HAVING THREE COIL SYSTEMS MUTUALLY ENCLOSING ANGLES OF 120 DEGREE AND LITHOGRAPHIC PROJECTION APPARATUS COMPRISING SUCH A POSITIONING DEVICE
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09110612
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Filing Dt:
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07/06/1998
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Title:
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SUPPORTING DEVICE PROVIDED WITH A GAS SPRING WITH A GAS BEARING, AND LITHOGRAPHIC DEVICE PROVIDED WITH SUCH SUPPORTING DEVICES
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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09114747
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Filing Dt:
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07/13/1998
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Title:
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INTERFEROMETER SYSTEM AND LITHOGRAPH APPARATUS INCLUDING AN INTERFEROMETER SYSTEM
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09114748
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Filing Dt:
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07/13/1998
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Title:
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METHOD AND APPARATUS FOR REPETITIVELY PROJECTING A MASK PATTERN ON A SUBSTRATE, USING A TIME-SAVING HEIGHT MEASUREMENT
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09180011
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Filing Dt:
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10/29/1998
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Title:
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POSITIONING DEVICE HAVING TWO OBJECT HOLDERS
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09216881
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Filing Dt:
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12/21/1998
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Title:
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OPTICAL PICK-UP APPARATUS
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Patent #:
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Issue Dt:
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11/14/2000
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Application #:
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09271305
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Filing Dt:
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03/17/1999
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Title:
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METHOD AND APPARATUS FOR MEASURING OPTICAL DISTANCES
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09280064
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Filing Dt:
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03/29/1999
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS WITH IMPROVED SUBSTRATE HOLDER
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09287014
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Filing Dt:
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04/06/1999
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Publication #:
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Pub Dt:
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11/29/2001
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Title:
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LITHOGRAPHY APPARATUS
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09290554
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Filing Dt:
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04/12/1999
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09293000
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Filing Dt:
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04/16/1999
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Title:
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LITHOGRAPHY APPARATUS WITH FILTERS FOR OPTIMIZING UNIFORMITY OF AN IMAGE
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Patent #:
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Issue Dt:
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01/23/2001
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Application #:
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09297432
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Filing Dt:
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04/30/1999
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Title:
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CARPET CLEANING COMPOSITIONS AND METHOD FOR CLEANING CARPETS
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09302849
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Filing Dt:
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04/30/1999
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Title:
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GAS BEARING AND LITHOGRAPHIC APPARATUS INCLUDING SUCH A BEARING
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09302850
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Filing Dt:
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04/30/1999
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Title:
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LITHOGRAPHIC DEVICE
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Patent #:
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Issue Dt:
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07/09/2002
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Application #:
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09324421
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Filing Dt:
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06/01/1999
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Title:
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ALIGNMENT DEVICE AND LITHOGRAPHIC APPARATUS COMPRISING SUCH A DEVICE
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Patent #:
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|
Issue Dt:
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08/06/2002
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Application #:
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09325411
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Filing Dt:
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06/04/1999
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Title:
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LITHOGRAPHIC APPARATUS HAVING A DYNAMICALLY VARIABLE ILLUMINATION BEAM
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Patent #:
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Issue Dt:
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04/16/2002
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Application #:
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09336677
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Filing Dt:
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06/21/1999
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09340710
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Filing Dt:
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06/29/1999
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Title:
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LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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01/08/2002
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Application #:
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09353664
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Filing Dt:
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07/15/1999
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Title:
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POSITIONING DEVICE AND LITHOGRAPHIC PROJECTION APPARATUS COMPRISING SUCH A DEVICE
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09422398
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Filing Dt:
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10/21/1999
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Title:
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ILLUMINATION DEVICE FOR PROJECTION SYSTEM AND METHOD FOR FABRICATING
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09435638
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Filing Dt:
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11/08/1999
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Title:
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ACTUATOR AND TRANSDUCER
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Patent #:
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Issue Dt:
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07/16/2002
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Application #:
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09460800
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Filing Dt:
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12/15/1999
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Title:
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SERVO CONTROL METHOD AND ITS APPLICATION IN A LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09461275
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Filing Dt:
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12/14/1999
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09466217
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Filing Dt:
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12/17/1999
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Title:
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RADIATION SOURCE FOR EXTREME ULTRAVIOLET RADIATION, E.G. FOR USE IN LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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07/01/2003
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Application #:
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09478512
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Filing Dt:
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01/06/2000
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Title:
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SERVO CONTROL, AND ITS APPLICATION IN A LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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04/16/2002
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Application #:
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09484200
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Filing Dt:
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01/18/2000
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Title:
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OPTICAL CORRECTION PLATE, AND ITS APPLICATION IN A LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
|
05/07/2002
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Application #:
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09496406
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Filing Dt:
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02/02/2000
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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09505188
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Filing Dt:
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02/16/2000
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09506343
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Filing Dt:
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02/18/2000
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Title:
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Photolithographic apparatus
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09519875
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Filing Dt:
|
03/06/2000
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Title:
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OFF-AXIS LEVELLING IN LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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12/24/2002
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Application #:
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09521599
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Filing Dt:
|
03/09/2000
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Title:
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ILLUMINATION SYSTEM FOR SHAPING EXTREME ULTRAVIOLET RADIATION USED IN A LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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11/12/2002
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Application #:
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09526592
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Filing Dt:
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03/16/2000
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Title:
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APPARATUS AND METHOD FOR PHASE SHIFT PHOTOMASKING
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Patent #:
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Issue Dt:
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08/05/2003
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Application #:
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09551223
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Filing Dt:
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04/17/2000
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Title:
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GAS BEARINGS FOR USE WITH VACUUM CHAMBERS AND THEIR APPLICATION IN LITHOGRAPHIC PROJECTION APPARATUSES
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Patent #:
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Issue Dt:
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07/16/2002
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Application #:
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09551224
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Filing Dt:
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04/17/2000
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Title:
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MOVABLE SUPPORT IN A VACUUM CHAMBER AND ITS APPLICATION IN LITHOGRAPHIC PROJECTION APPARATUSES
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Patent #:
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Issue Dt:
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09/03/2002
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Application #:
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09551229
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Filing Dt:
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04/17/2000
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Title:
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MOTION FEED-THROUGH INTO A VACUUM CHAMBER AND ITS APPLICATION IN LITHOGRAPHIC PROJECTION APPARATUSES
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09551232
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Filing Dt:
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04/17/2000
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Title:
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MULTI-STAGE DRIVE ARRANGEMENTS AND THEIR APPLICATION IN LITHOGRAPHIC PROJECTION APPARATUSES
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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09551323
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Filing Dt:
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04/17/2000
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Title:
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ISOLATION MOUNTS FOR USE WITH VACUUM CHAMBERS AND THEIR APPLICATION IN LITHOGRAPHIC PROJECTION APPARATUSES
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09551916
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Filing Dt:
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04/19/2000
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Title:
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MASK HANDLING APPARATUS FOR LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09552671
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Filing Dt:
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04/19/2000
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Title:
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SUBSTRATE HANDLER FOR USE IN LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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04/13/2004
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Application #:
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09552672
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Filing Dt:
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04/19/2000
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09584722
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Filing Dt:
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06/01/2000
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Title:
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INTEGRATING WAVEGUIDE FOR USE IN LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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06/18/2002
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Application #:
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09588783
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Filing Dt:
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06/07/2000
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Title:
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LITHOGRAPHIC PROJECTION METHOD
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09590295
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Filing Dt:
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06/09/2000
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
|
09/10/2002
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Application #:
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09605651
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Filing Dt:
|
06/28/2000
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Title:
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MULTILAYER EXTREME ULTRAVIOLET MIRRORS WITH ENHANCED REFLECTIVITY
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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09605657
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Filing Dt:
|
06/28/2000
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Title:
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CAPPING LAYER FOR EUV OPTICAL ELEMENTS
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09606613
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Filing Dt:
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06/29/2000
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Title:
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APPARATUS AND METHOD OF IMAGE ENHANCEMENT THROUGH SPATIAL FILTERING
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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09671802
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Filing Dt:
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09/28/2000
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Title:
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LITHOGRAPHIC METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09684959
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Filing Dt:
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10/10/2000
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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09704581
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Filing Dt:
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11/03/2000
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Title:
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GAS FLUSHING SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09704828
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Filing Dt:
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11/03/2000
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Title:
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PURGE GAS SYSTEMS FOR USE IN LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09713721
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Filing Dt:
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11/15/2000
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Title:
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IMAGING METHOD USING PHASE BOUNDARY MASKING WITH MODIFIED ILLUMINATION
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Patent #:
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Issue Dt:
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11/12/2002
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Application #:
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09721741
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Filing Dt:
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11/27/2000
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Title:
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MASK CLAMPING APPARATUS, E.G. FOR A LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09722398
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Filing Dt:
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11/28/2000
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS WITH POSITIONING SYSTEM FOR USE WITH REFLECTORS
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09725299
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Filing Dt:
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11/29/2000
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Publication #:
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Pub Dt:
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12/13/2001
| | | | |
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Title:
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POSITIONING SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09726480
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Filing Dt:
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12/01/2000
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Publication #:
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Pub Dt:
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12/13/2001
| | | | |
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Title:
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FLUORESCENCE RADIATION FILTER
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Patent #:
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Issue Dt:
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12/30/2003
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Application #:
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09733959
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Filing Dt:
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12/12/2000
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Publication #:
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Pub Dt:
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05/17/2001
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Title:
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AN ILLUMINATOR FOR A LITHOGRAPHY APPARATUS,A LITHOGRAPHY APPARATUS COMPRISING SUCH AN ILLUMINATOR, AND A MANUFACTURING METHOD EMPLOYING SUCH A LITHOGRAPHY APPARATUS
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09735641
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Filing Dt:
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12/14/2000
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Publication #:
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Pub Dt:
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06/21/2001
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Title:
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RADIATION SOURCE FOR USE IN LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09739097
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Filing Dt:
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12/19/2000
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Publication #:
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Pub Dt:
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07/05/2001
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Title:
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BALANCED POSITIONING SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09739098
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Filing Dt:
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12/19/2000
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Publication #:
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Pub Dt:
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04/25/2002
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Title:
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BALANCED POSITIONING SYSTEM FOR USE LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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12/24/2002
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Application #:
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09739106
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Filing Dt:
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12/19/2000
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Publication #:
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Pub Dt:
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06/21/2001
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Title:
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CRASH PREVENTION IN POSITIONING APPARATUS FOR USE IN LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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09739622
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Filing Dt:
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12/20/2000
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Publication #:
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Pub Dt:
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08/09/2001
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Title:
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POSITION MEASURING SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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01/14/2003
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Application #:
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09741009
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Filing Dt:
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12/21/2000
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Publication #:
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Pub Dt:
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07/05/2001
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Title:
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INTERFEROMETRIC ALIGNMENT SYSTEM FOR USE IN VACUUM-BASED LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09752818
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Filing Dt:
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01/03/2001
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Publication #:
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Pub Dt:
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07/04/2002
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Title:
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A LITHOGRAPHIC PROJECTION APPARATUS EQUIPPED WITH EXTREME ULTRAVIOLET WINDOW SERVING SIMULTANEOUSLY AS VACUUM WINDOW
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Patent #:
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Issue Dt:
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05/04/2004
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Application #:
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09758172
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Filing Dt:
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01/12/2001
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Publication #:
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Pub Dt:
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07/19/2001
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Title:
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ABBE ARM CALIBRATION SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09761837
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Filing Dt:
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01/18/2001
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Publication #:
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Pub Dt:
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08/09/2001
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Title:
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MICROLITHOGRAPHY PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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07/08/2008
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Application #:
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09777460
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Filing Dt:
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02/08/2001
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Publication #:
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Pub Dt:
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08/16/2001
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Title:
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OBJECT POSITIONING METHOD FOR A LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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01/21/2003
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Application #:
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09777697
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Filing Dt:
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02/07/2001
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Publication #:
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Pub Dt:
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08/16/2001
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS HAVING A TEMPERATURE CONTROLLED HEAT SHIELD
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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09777701
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Filing Dt:
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02/07/2001
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Publication #:
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Pub Dt:
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08/16/2001
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Title:
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COOLING OF VOICE COIL MOTORS IN LITHOGRAPHIC PROJECTION APPARATUS
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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09788478
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Filing Dt:
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02/21/2001
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Publication #:
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Pub Dt:
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01/24/2002
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Title:
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METHOD OF MEASURING ABERRATION IN AN OPTICAL IMAGING SYSTEM
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09805179
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Filing Dt:
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03/14/2001
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Publication #:
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Pub Dt:
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09/20/2001
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Title:
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SUBSTRATE HOLDER FOR LITHOGRAPHIC APPARATUS
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09813135
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Filing Dt:
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03/21/2001
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Publication #:
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Pub Dt:
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10/04/2001
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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04/13/2004
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Application #:
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09827350
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Filing Dt:
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04/06/2001
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Publication #:
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Pub Dt:
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04/04/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09833077
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Filing Dt:
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04/12/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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09842203
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Filing Dt:
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04/26/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS, A METHOD FOR DETERMINING A POSITION OF A SUBSTRATE ALIGNMENT MARK, A DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09866875
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Filing Dt:
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05/30/2001
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Publication #:
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Pub Dt:
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02/14/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09866913
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Filing Dt:
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05/30/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS, SUPPORTING ASSEMBLY AND DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09878182
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Filing Dt:
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06/12/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Title:
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METHOD OF OPERATING AN OPTICAL IMAGING SYSTEM, LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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12/23/2003
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Application #:
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09893347
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Filing Dt:
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06/28/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Title:
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RADIATION SOURCE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09897720
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Filing Dt:
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07/03/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09899560
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Filing Dt:
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07/06/2001
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Publication #:
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Pub Dt:
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02/14/2002
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS AND DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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06/08/2004
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Application #:
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09899566
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Filing Dt:
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07/06/2001
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Publication #:
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Pub Dt:
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04/18/2002
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD, DEVICE MANUFACTURED THEREBY AND GAS COMPOSITION
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Patent #:
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Issue Dt:
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07/20/2004
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Application #:
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09902490
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Filing Dt:
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07/11/2001
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Publication #:
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Pub Dt:
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01/31/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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10/07/2003
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Application #:
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09919616
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Filing Dt:
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08/01/2001
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Publication #:
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Pub Dt:
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03/07/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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10/14/2003
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Application #:
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09925723
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Filing Dt:
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08/10/2001
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Publication #:
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Pub Dt:
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05/09/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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11/16/2004
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Application #:
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09928462
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Filing Dt:
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08/22/2001
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Publication #:
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Pub Dt:
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04/11/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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04/13/2004
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Application #:
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09934681
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Filing Dt:
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08/23/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Patent #:
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Issue Dt:
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08/24/2004
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Application #:
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09934698
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Filing Dt:
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08/23/2001
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Publication #:
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Pub Dt:
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08/15/2002
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Title:
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MASK HANDLING APPARATUS, LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY
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