Patent Assignment Details
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Reel/Frame: | 013573/0001 | |
| Pages: | 5 |
| | Recorded: | 12/06/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10314497
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Filing Dt:
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12/06/2002
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Publication #:
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Pub Dt:
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06/10/2004
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Title:
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Apparatus and method for shielding a wafer from charged particles during plasma etching
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Assignee
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NEW ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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Correspondence name and address
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WHITHAM, CURTIS & CHRISTOFFERSON, P.C.
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MICHAEL E. WHITHAM
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11491 SUNSET HILLS ROAD, SUITE 340
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RESTON, VA 20190
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