Total properties:
29
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Patent #:
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Issue Dt:
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08/22/2006
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Application #:
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10640061
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Filing Dt:
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08/14/2003
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Publication #:
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Pub Dt:
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11/11/2004
| | | | |
Title:
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PATTERN FORMATION METHOD AND EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10643929
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Filing Dt:
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08/20/2003
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Publication #:
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Pub Dt:
|
11/11/2004
| | | | |
Title:
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PATTERN FORMATION METHOD
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Patent #:
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Issue Dt:
|
11/07/2006
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Application #:
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10661542
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Filing Dt:
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09/15/2003
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Publication #:
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Pub Dt:
|
12/16/2004
| | | | |
Title:
|
PATTERN FORMATION METHOD
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Patent #:
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Issue Dt:
|
11/14/2006
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Application #:
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10713217
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Filing Dt:
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11/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
Title:
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PATTERN FORMATION METHOD
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Patent #:
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Issue Dt:
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07/01/2008
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Application #:
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10715433
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Filing Dt:
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11/19/2003
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
Title:
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PATTERN FORMATION METHOD
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Patent #:
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Issue Dt:
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03/27/2007
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Application #:
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10983655
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Filing Dt:
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11/09/2004
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Publication #:
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Pub Dt:
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05/19/2005
| | | | |
Title:
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SEMICONDUCTOR MANUFACTURING APPARATUS AND PATTERN FORMATION METHOD
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Patent #:
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Issue Dt:
|
04/20/2010
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Application #:
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11010422
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Filing Dt:
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12/14/2004
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Publication #:
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Pub Dt:
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06/23/2005
| | | | |
Title:
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EXPOSURE SYSTEM AND PATTERN FORMATION METHOD USING THE SAME
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Patent #:
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Issue Dt:
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06/23/2009
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Application #:
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11058369
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Filing Dt:
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02/16/2005
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Publication #:
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Pub Dt:
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08/25/2005
| | | | |
Title:
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BARRIER FILM MATERIAL AND PATTERN FORMATION METHOD USING THE SAME
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Patent #:
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|
Issue Dt:
|
05/11/2010
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Application #:
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11143666
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Filing Dt:
|
06/03/2005
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Publication #:
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|
Pub Dt:
|
12/15/2005
| | | | |
Title:
|
EXPOSURE SYSTEM AND PATTERN FORMATION METHOD
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Patent #:
|
|
Issue Dt:
|
08/10/2010
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Application #:
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11143667
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Filing Dt:
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06/03/2005
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Publication #:
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Pub Dt:
|
12/15/2005
| | | | |
Title:
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SEMICONDUCTOR MANUFACTURING APPARATUS AND PATTERN FORMATION METHOD
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|
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Patent #:
|
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Issue Dt:
|
03/04/2008
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Application #:
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11197296
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Filing Dt:
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08/05/2005
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Publication #:
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Pub Dt:
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03/09/2006
| | | | |
Title:
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RESIST MATERIAL AND PATTERN FORMATION METHOD
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Patent #:
|
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Issue Dt:
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12/30/2008
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Application #:
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11203161
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Filing Dt:
|
08/15/2005
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Publication #:
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Pub Dt:
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03/09/2006
| | | | |
Title:
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PATTERN FORMATION METHOD THROUGH LIQUID IMMERSION LITHOGRAPHY
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|
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Patent #:
|
|
Issue Dt:
|
06/01/2010
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Application #:
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11224980
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Filing Dt:
|
09/14/2005
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Publication #:
|
|
Pub Dt:
|
06/15/2006
| | | | |
Title:
|
BARRIER FILM MATERIAL AND PATTERN FORMATION METHOD USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
07/07/2009
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Application #:
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11253701
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Filing Dt:
|
10/20/2005
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Publication #:
|
|
Pub Dt:
|
07/06/2006
| | | | |
Title:
|
PATTERN FORMATION METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
04/28/2009
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Application #:
|
11254819
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Filing Dt:
|
10/21/2005
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Publication #:
|
|
Pub Dt:
|
02/23/2006
| | | | |
Title:
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PATTERN FORMATION METHOD
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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11376188
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Filing Dt:
|
03/16/2006
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Publication #:
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|
Pub Dt:
|
07/20/2006
| | | | |
Title:
|
Pattern formation method and exposure system
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|
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Patent #:
|
|
Issue Dt:
|
01/01/2008
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Application #:
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11409207
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Filing Dt:
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04/24/2006
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Publication #:
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|
Pub Dt:
|
12/14/2006
| | | | |
Title:
|
CHEMICALLY AMPLIFIED RESIST MATERIAL AND PATTERN FORMATION METHOD USING THE SAME
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|
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Patent #:
|
|
Issue Dt:
|
09/29/2009
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Application #:
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11430993
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Filing Dt:
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05/10/2006
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Publication #:
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|
Pub Dt:
|
12/07/2006
| | | | |
Title:
|
PATTERN FORMATION METHOD
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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11653331
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Filing Dt:
|
01/16/2007
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Publication #:
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|
Pub Dt:
|
06/07/2007
| | | | |
Title:
|
Pattern formation method and exposure system
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
11715852
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Filing Dt:
|
03/09/2007
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Publication #:
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Pub Dt:
|
07/05/2007
| | | | |
Title:
|
Semiconductor manufacturing apparatus and pattern formation method
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|
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Patent #:
|
|
Issue Dt:
|
02/02/2010
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Application #:
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11723056
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Filing Dt:
|
03/16/2007
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Publication #:
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|
Pub Dt:
|
12/13/2007
| | | | |
Title:
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PATTERN FORMATION METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2011
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Application #:
|
11949338
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Filing Dt:
|
12/03/2007
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Publication #:
|
|
Pub Dt:
|
08/14/2008
| | | | |
Title:
|
BARRIER FILM MATERIAL AND PATTERN FORMATION METHOD USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
06/02/2009
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Application #:
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11968826
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Filing Dt:
|
01/03/2008
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Publication #:
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|
Pub Dt:
|
11/20/2008
| | | | |
Title:
|
CHEMICALLY AMPLIFIED RESIST MATERIAL, TOPCOAT FILM MATERIAL AND PATTERN FORMATION METHOD USING THE SAME
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|
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Patent #:
|
|
Issue Dt:
|
05/10/2011
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Application #:
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12046996
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Filing Dt:
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03/12/2008
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Publication #:
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Pub Dt:
|
09/25/2008
| | | | |
Title:
|
BARRIER FILM MATERIAL AND PATTERN FORMATION METHOD USING THE SAME
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
12314208
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Filing Dt:
|
12/05/2008
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Publication #:
|
|
Pub Dt:
|
04/09/2009
| | | | |
Title:
|
Exposure system and pattern formation method
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/2011
|
Application #:
|
12412942
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Filing Dt:
|
03/27/2009
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Publication #:
|
|
Pub Dt:
|
07/23/2009
| | | | |
Title:
|
PATTERN FORMATION METHOD
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
12466769
|
Filing Dt:
|
05/15/2009
|
Publication #:
|
|
Pub Dt:
|
09/10/2009
| | | | |
Title:
|
BARRIER FILM MATERIAL AND PATTERN FORMATION METHOD USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
01/03/2012
|
Application #:
|
12749289
|
Filing Dt:
|
03/29/2010
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Publication #:
|
|
Pub Dt:
|
07/22/2010
| | | | |
Title:
|
EXPOSURE SYSTEM AND PATTERN FORMATION METHOD
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
12824793
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Filing Dt:
|
06/28/2010
|
Publication #:
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Pub Dt:
|
10/21/2010
| | | | |
Title:
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SEMICONDUCTOR MANUFACTURING APPARATUS CONTROLLING WAFER HOLDING SECTION TEMPERATURE TO BE LOWER THAN IMERSION LIQUID TEMPERATURE
|
|