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Patent #:
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Issue Dt:
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12/07/2021
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Application #:
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16478625
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Filing Dt:
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07/17/2019
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Publication #:
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Pub Dt:
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11/14/2019
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Title:
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HIGH RESPONSIVITY HIGH BANDWIDTH PHOTODIODE AND METHOD OF MANUFACTURE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16492919
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Filing Dt:
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09/10/2019
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Publication #:
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Pub Dt:
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01/09/2020
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Title:
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Lens System for Use with High Laser Power Density Scanning System
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16499511
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Filing Dt:
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09/30/2019
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Publication #:
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Pub Dt:
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09/09/2021
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Title:
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MULTI-AXIS MACHINE TOOL, METHODS OF CONTROLLING THE SAME AND RELATED ARRAGEMENTS
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Patent #:
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Issue Dt:
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08/29/2023
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Application #:
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16505422
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Filing Dt:
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07/08/2019
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Publication #:
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Pub Dt:
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10/31/2019
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Title:
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ACOUSTO-OPTIC DEFLECTOR APPLICATIONS IN LASER PROCESSING OF DIELECTRIC OR OTHER MATERIALS
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Patent #:
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Issue Dt:
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05/18/2021
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Application #:
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16506555
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Filing Dt:
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07/09/2019
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Publication #:
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Pub Dt:
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10/31/2019
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Title:
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PIECEWISE RF POWER SYSTEMS AND METHODS FOR SUPPLYING PRE-DISTORTED RF BIAS VOLTAGE SIGNALS TO AN ELECTRODE IN A PROCESSING CHAMBER
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Patent #:
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Issue Dt:
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06/23/2020
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Application #:
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16509088
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Filing Dt:
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07/11/2019
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Publication #:
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Pub Dt:
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10/31/2019
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Title:
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Feedback Control By RF Waveform Tailoring For Ion Energy Distribution
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Patent #:
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Issue Dt:
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12/06/2022
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Application #:
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16553033
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Filing Dt:
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08/27/2019
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Publication #:
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Pub Dt:
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03/05/2020
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Title:
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Ozonated Water Delivery System and Method of Use
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Patent #:
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Issue Dt:
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05/04/2021
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Application #:
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16553921
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Filing Dt:
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08/28/2019
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Publication #:
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Pub Dt:
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12/19/2019
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Title:
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Multi-Junction Detector Device and Method of Manufacture
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16557189
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Filing Dt:
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08/30/2019
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Publication #:
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Pub Dt:
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12/19/2019
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Title:
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LASER PROCESSING SYSTEMS AND METHODS FOR BEAM DITHERING AND SKIVING
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Patent #:
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Issue Dt:
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02/22/2022
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Application #:
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16593942
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Filing Dt:
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10/04/2019
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Publication #:
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Pub Dt:
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04/08/2021
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Title:
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MICROWAVE MAGNETRON WITH CONSTANT ANODIC IMPEDANCE AND SYSTEMS USING THE SAME
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Patent #:
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Issue Dt:
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08/11/2020
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Application #:
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16596138
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Filing Dt:
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10/08/2019
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Title:
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Extremum Seeking Control Apparatus and Method for Automatic Frequency Tuning for RF Impedance Matching
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Patent #:
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Issue Dt:
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03/22/2022
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Application #:
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16619875
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Filing Dt:
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12/05/2019
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Publication #:
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Pub Dt:
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07/02/2020
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Title:
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OPTICALLY CONTACTED ACOUSTO-OPTIC DEVICE AND METHOD OF MAKING THE SAME
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Patent #:
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Issue Dt:
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02/22/2022
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Application #:
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16621630
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Filing Dt:
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12/11/2019
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Publication #:
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Pub Dt:
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05/21/2020
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Title:
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NON-CONTACT HANDLER AND METHOD OF HANDLING WORKPIECES USING THE SAME
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Patent #:
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Issue Dt:
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08/30/2022
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Application #:
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16624498
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Filing Dt:
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12/19/2019
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Publication #:
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Pub Dt:
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04/23/2020
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Title:
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METHOD AND DEVICE FOR GENERATING A PULSED SIGNAL AT PARTICULAR POSITIONS OF A MOVING ELEMENT
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Patent #:
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Issue Dt:
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07/18/2023
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Application #:
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16636605
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Filing Dt:
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02/04/2020
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Publication #:
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Pub Dt:
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07/22/2021
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Title:
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ACOUSTO-OPTIC SYSTEM HAVING PHASE-SHIFTING REFLECTOR
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Patent #:
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Issue Dt:
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06/01/2021
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Application #:
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16679640
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Filing Dt:
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11/11/2019
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Publication #:
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Pub Dt:
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03/05/2020
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Title:
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Method and Apparatus for Deposition Cleaning in a Pumping Line
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Patent #:
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Issue Dt:
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02/02/2021
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Application #:
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16682693
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Filing Dt:
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11/13/2019
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Publication #:
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Pub Dt:
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03/26/2020
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Title:
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APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITORING HEALTH OF THE PLASMA SYSTEM
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Patent #:
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Issue Dt:
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03/16/2021
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Application #:
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16698178
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Filing Dt:
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11/27/2019
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Title:
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Gas Analyzer System with Ion Source
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Patent #:
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Issue Dt:
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02/23/2021
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Application #:
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16710412
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Filing Dt:
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12/11/2019
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Publication #:
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Pub Dt:
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05/07/2020
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Title:
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Pulsed, Bidirectional Radio Frequency Source/Load
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Patent #:
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Issue Dt:
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01/12/2021
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Application #:
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16713713
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Filing Dt:
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12/13/2019
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Publication #:
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Pub Dt:
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04/16/2020
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Title:
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Robust Ion Source
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Patent #:
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Issue Dt:
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10/25/2022
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Application #:
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16724844
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Filing Dt:
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12/23/2019
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Publication #:
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Pub Dt:
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04/23/2020
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Title:
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PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CONTROL VALVES
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Patent #:
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Issue Dt:
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11/29/2022
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Application #:
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16742172
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Filing Dt:
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01/14/2020
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Publication #:
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Pub Dt:
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07/15/2021
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Title:
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Method and Apparatus for Pulse Gas Delivery with Concentration Measurement
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Patent #:
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Issue Dt:
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11/02/2021
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Application #:
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16778567
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Filing Dt:
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01/31/2020
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Publication #:
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Pub Dt:
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08/06/2020
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Title:
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Low Repetition Rate Infrared Tunable Femtosecond Laser Source
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Patent #:
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Issue Dt:
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11/30/2021
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Application #:
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16800363
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Filing Dt:
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02/25/2020
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Publication #:
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Pub Dt:
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08/26/2021
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Title:
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Methods and Apparatus for Pressure Based Mass Flow Ratio Control
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Patent #:
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Issue Dt:
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08/22/2023
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Application #:
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16823715
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Filing Dt:
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03/19/2020
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Publication #:
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Pub Dt:
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10/01/2020
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Title:
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Low Profile Heater Apparatus and Method of Manufacture
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Patent #:
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Issue Dt:
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03/29/2022
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Application #:
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16825994
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Filing Dt:
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03/20/2020
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Publication #:
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Pub Dt:
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09/23/2021
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Title:
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Capacitance Manometer With Improved Baffle for Improved Detection Accuracy
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Patent #:
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Issue Dt:
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07/04/2023
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Application #:
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16842515
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Filing Dt:
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04/07/2020
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Publication #:
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Pub Dt:
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10/08/2020
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Title:
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Systems and Methods for Generating a Dissolved Ammonia Solution with Reduced Dissolved Carrier Gas and Oxygen Content
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Patent #:
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Issue Dt:
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12/26/2023
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Application #:
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16849871
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Filing Dt:
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04/15/2020
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Publication #:
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Pub Dt:
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10/21/2021
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Title:
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Valve Apparatuses and Related Methods for Reactive Process Gas Isolation and Facilitating Purge During Isolation
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16851644
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Filing Dt:
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04/17/2020
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Publication #:
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Pub Dt:
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10/22/2020
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Title:
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Heated Throttle Valve Apparatus and Methods of Use and Manufacture
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Patent #:
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Issue Dt:
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11/30/2021
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Application #:
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16854207
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Filing Dt:
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04/21/2020
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Publication #:
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Pub Dt:
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08/06/2020
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Title:
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MULTI-AXIS MACHINE TOOL AND METHODS OF CONTROLLING THE SAME
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Patent #:
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Issue Dt:
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10/18/2022
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Application #:
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16881390
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Filing Dt:
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05/22/2020
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Publication #:
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Pub Dt:
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12/03/2020
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Title:
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SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES
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Patent #:
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Issue Dt:
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08/08/2023
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Application #:
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16881458
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Filing Dt:
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05/22/2020
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Publication #:
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Pub Dt:
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12/03/2020
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Title:
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SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES
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Patent #:
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Issue Dt:
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12/27/2022
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Application #:
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16887346
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Filing Dt:
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05/29/2020
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Publication #:
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Pub Dt:
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12/02/2021
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Title:
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System and Method for Arc Detection Using a Bias RF Generator Signal
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Patent #:
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Issue Dt:
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11/29/2022
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Application #:
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16898016
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Filing Dt:
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06/10/2020
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Publication #:
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Pub Dt:
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09/24/2020
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Title:
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Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger
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Patent #:
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Issue Dt:
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06/21/2022
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Application #:
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16905377
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Filing Dt:
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06/18/2020
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Publication #:
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Pub Dt:
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01/14/2021
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Title:
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Adaptive Periodic Waveform Controller
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Patent #:
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Issue Dt:
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05/23/2023
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Application #:
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16953923
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Filing Dt:
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11/20/2020
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Publication #:
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Pub Dt:
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07/08/2021
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Title:
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Thermal Conductivity Gauge
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16957812
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Filing Dt:
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06/25/2020
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Publication #:
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Pub Dt:
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03/04/2021
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Title:
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Laser Oscillator System Having Optical Element For Injection Seeding and Method of Manufacture
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Patent #:
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Issue Dt:
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04/26/2022
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Application #:
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16986680
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Filing Dt:
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08/06/2020
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Publication #:
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Pub Dt:
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02/18/2021
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Title:
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Method And Apparatus To Enhance Sheath Formation, Evolution And Pulse To Pulse Stability In RF Powered Plasma Applications
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Patent #:
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Issue Dt:
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09/05/2023
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Application #:
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16990396
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Filing Dt:
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08/11/2020
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Publication #:
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Pub Dt:
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02/17/2022
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Title:
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Endpoint Detection of Deposition Cleaning in a Pumping Line and a Processing Chamber
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Patent #:
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Issue Dt:
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07/18/2023
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Application #:
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16992400
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Filing Dt:
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08/13/2020
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Publication #:
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Pub Dt:
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11/26/2020
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Title:
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Laser System Having A Multi-Stage Amplifier and Methods of Use
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Patent #:
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Issue Dt:
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01/11/2022
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Application #:
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16993775
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Filing Dt:
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08/14/2020
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Publication #:
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Pub Dt:
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01/07/2021
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Title:
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MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE
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Patent #:
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Issue Dt:
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11/28/2023
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Application #:
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17005560
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Filing Dt:
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08/28/2020
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Publication #:
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Pub Dt:
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12/17/2020
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Title:
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Systems and Methods for Generating a Conductive Liquid Comprising Deionized Water with Ammonia Gas Dissolved Therein
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17017402
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Filing Dt:
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09/10/2020
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Publication #:
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Pub Dt:
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03/10/2022
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Title:
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Multi-Axis Motion System with Decoupled Wafer Chuck Support and Methods of Use and Manufacture
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17047254
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Filing Dt:
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10/13/2020
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Publication #:
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Pub Dt:
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11/25/2021
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Title:
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LASER-PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME
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Patent #:
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Issue Dt:
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04/23/2024
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Application #:
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17058465
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Filing Dt:
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11/24/2020
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Publication #:
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Pub Dt:
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07/01/2021
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Title:
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METHOD AND APPARATUS FOR FOCUS CORRECTION OF MULTI-IMAGE LASER BEAM QUALITY MEASUREMENTS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17070039
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Filing Dt:
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10/14/2020
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Publication #:
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Pub Dt:
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04/29/2021
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Title:
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LOW WAVEFRONT DISTORTION OPTICAL MOUNT FOR THIN OPTICAL COMPONENTS
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Patent #:
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Issue Dt:
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01/25/2022
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Application #:
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17073709
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Filing Dt:
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10/19/2020
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Publication #:
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Pub Dt:
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04/22/2021
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Title:
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Intermodulation Distortion Mitigation Using Electronic Variable Capacitor
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Patent #:
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Issue Dt:
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12/13/2022
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Application #:
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17102598
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Filing Dt:
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11/24/2020
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Publication #:
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Pub Dt:
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05/26/2022
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Title:
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Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances
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Patent #:
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Issue Dt:
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06/21/2022
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Application #:
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17107146
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Filing Dt:
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11/30/2020
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Publication #:
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Pub Dt:
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03/18/2021
| | | | |
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Title:
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Method and Apparatus for Deposition Cleaning in a Pumping Line
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Patent #:
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Issue Dt:
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01/03/2023
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Application #:
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17111700
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Filing Dt:
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12/04/2020
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Publication #:
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Pub Dt:
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06/09/2022
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Title:
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Switched Capacitor Modulator
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Patent #:
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Issue Dt:
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06/21/2022
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Application #:
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17119804
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Filing Dt:
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12/11/2020
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Publication #:
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Pub Dt:
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04/01/2021
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Title:
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Polymer Composite Vacuum Components
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Patent #:
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Issue Dt:
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10/31/2023
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Application #:
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17154698
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Filing Dt:
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01/21/2021
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Publication #:
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Pub Dt:
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07/21/2022
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Title:
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Load-Lock Gauge
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17185259
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Filing Dt:
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02/25/2021
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Publication #:
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Pub Dt:
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08/25/2022
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Title:
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LASER-SEEDING FOR ELECTRO-CONDUCTIVE PLATING
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Patent #:
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Issue Dt:
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12/20/2022
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Application #:
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17232950
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Filing Dt:
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04/16/2021
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Publication #:
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Pub Dt:
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10/07/2021
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Title:
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Adaptive Control For A Power Generator
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17237913
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Filing Dt:
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04/22/2021
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Publication #:
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Pub Dt:
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08/05/2021
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Title:
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Plasma Source Having a Dielectric Plasma Chamber with Improved Plasma Resistance
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NONE
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Issue Dt:
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17272155
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Filing Dt:
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02/26/2021
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Publication #:
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Pub Dt:
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08/12/2021
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Title:
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SYSTEMS AND METHODS FOR DRILLING VIAS IN TRANSPARENT MATERIALS
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NONE
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17272611
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Filing Dt:
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03/01/2021
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Pub Dt:
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11/11/2021
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Title:
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FRAME AND EXTERIOR SHROUDING FOR LASER PROCESSING SYSTEM
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NONE
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17273695
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Filing Dt:
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03/04/2021
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Publication #:
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Pub Dt:
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10/28/2021
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Title:
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SYSTEMS AND METHODS FOR USE IN HANDLING COMPONENTS
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NONE
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Application #:
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17276736
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Filing Dt:
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03/16/2021
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Publication #:
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Pub Dt:
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02/17/2022
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Title:
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LASER-PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME
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NONE
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17290198
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Filing Dt:
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04/29/2021
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Pub Dt:
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12/02/2021
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Title:
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PHASED-ARRAY BEAM STEERING FOR MATERIALS PROCESSING
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Patent #:
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12/20/2022
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17322549
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Filing Dt:
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05/17/2021
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09/02/2021
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Title:
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Cooling And Compression Clamp For Short Lead Power Devices
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NONE
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Application #:
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17326664
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Filing Dt:
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05/21/2021
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Pub Dt:
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09/23/2021
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Title:
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PHASED ARRAY STEERING FOR LASER BEAM POSITIONING SYSTEMS
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Patent #:
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03/26/2024
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17342341
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06/08/2021
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12/08/2022
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Title:
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Methods and Apparatus for Pressure Based Mass Flow Ratio Control
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NONE
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17354680
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06/22/2021
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Pub Dt:
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10/14/2021
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Title:
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LASER PROCESSING APPARATUS, METHODS OF LASER-PROCESSING WORKPIECES AND RELATED ARRANGEMENTS
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NONE
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17365479
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Filing Dt:
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07/01/2021
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01/05/2023
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Title:
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GaN Clamp with Uniform Pressure
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Patent #:
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05/30/2023
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17391724
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08/02/2021
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02/02/2023
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Title:
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METHOD AND APPARATUS FOR PLASMA GENERATION
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08/01/2023
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17396901
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08/09/2021
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02/09/2023
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Title:
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Adaptive Pulse Shaping With Post Match Sensor
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04/09/2024
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17406378
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08/19/2021
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Pub Dt:
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02/23/2023
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Title:
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METHOD AND APPARATUS FOR IMPEDANCE MATCHING IN A POWER DELIVERY SYSTEM FOR REMOTE PLASMA GENERATION
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NONE
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17452030
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Filing Dt:
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10/22/2021
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04/27/2023
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Title:
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Binary Gas Purity Analyzer
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Patent #:
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02/07/2023
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17452953
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10/29/2021
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Pub Dt:
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05/12/2022
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Title:
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PRESSURE CONTROL USING AN EXTERNAL TRIGGER
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Patent #:
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11/07/2023
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17453450
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Filing Dt:
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11/03/2021
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Pub Dt:
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05/19/2022
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Title:
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Thermal Conductivity Pressure Gauge with Heated Chamber Wall
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Patent #:
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NONE
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17455626
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Filing Dt:
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11/18/2021
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Pub Dt:
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05/26/2022
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Title:
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Method and Apparatus for Pulse Gas Delivery with Pressure Control
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03/19/2024
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17480993
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09/21/2021
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Pub Dt:
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01/06/2022
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Title:
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High Speed Synchronization Of Plasma Source/Bias Power Delivery
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17486139
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Filing Dt:
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09/27/2021
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Publication #:
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Pub Dt:
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03/30/2023
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Title:
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Multi-Wavelength Ozone Concentration Sensor and Method of Use
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11/21/2023
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17502666
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10/15/2021
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Pub Dt:
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04/20/2023
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Title:
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Impedance Matching In A RF Power Generation System
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NONE
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17566274
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Filing Dt:
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12/30/2021
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Pub Dt:
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07/06/2023
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Title:
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Demagnetizing Coils For Linearity Improvement Of Current Ratio Of Plasma Processing Systems
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08/22/2023
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17583712
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Filing Dt:
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01/25/2022
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Pub Dt:
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07/07/2022
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Title:
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Multi-Sensor Gas Sampling Detection System for Radical Gases and Short-Lived Molecules and Method of Use
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NONE
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17590874
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Filing Dt:
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02/02/2022
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Pub Dt:
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08/04/2022
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Title:
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Microwave System for Microwave-Assisted Surface Chemistry Annealing of ALD Processes Utilizing Microwave Radiation Energy
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NONE
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17599756
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09/29/2021
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Pub Dt:
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06/02/2022
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Title:
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LASER PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME
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Patent #:
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07/25/2023
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17604603
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10/18/2021
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06/23/2022
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Title:
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PIEZOELECTRIC INERTIA ACTUATOR
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NONE
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17633828
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02/08/2022
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Pub Dt:
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09/22/2022
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Title:
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REDUCED IMPEDANCE VARIATION IN A MODULAR 2-TERMINAL TERMINAL CONTACTING ELECTRICAL MEASUREMENT SYSTEM
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11/07/2023
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17643866
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12/13/2021
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Pub Dt:
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03/31/2022
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Title:
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Intermodulation Distortion Mitigation Using Electronic Variable Capacitor
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04/30/2024
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17644704
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12/16/2021
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06/23/2022
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Title:
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Monitoring Radical Particle Concentration Using Mass Spectrometry
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09/26/2023
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17647239
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01/06/2022
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07/06/2023
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Title:
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Ion Source with Gas Delivery for High-Fidelity Analysis
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NONE
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06/04/2024
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17651751
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02/18/2022
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08/24/2023
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Method and Apparatus for Pressure Based Mass Flow Control
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NONE
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17656177
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03/23/2022
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09/28/2023
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Title:
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Method and Apparatus for Mass Flow Verification
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NONE
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05/28/2024
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17715672
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04/07/2022
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10/12/2023
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Real-Time, Non-Invasive IEDF Plasma Sensor
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NONE
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17721834
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04/15/2022
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10/19/2023
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Title:
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Vibration Isolation Apparatus with Thermally Conductive Pneumatic Chamber, and Method of Manufacture
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NONE
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17830232
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06/01/2022
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12/08/2022
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Title:
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Light-Enhanced Ozone Wafer Processing System and Method of Use
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NONE
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17873624
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07/26/2022
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02/16/2023
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Title:
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Hybrid High-Power And Broadband Variable Impedance Modules
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01/28/2020
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29564998
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05/17/2016
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COMPONENT CARRIER PLATE
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12/03/2019
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29666312
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10/11/2018
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Title:
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LASER PROCESSING MACHINE
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