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Patent #:
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10/31/2017
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Application #:
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14043620
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Filing Dt:
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10/01/2013
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Publication #:
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Pub Dt:
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04/03/2014
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Title:
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Purifier Cassette
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Patent #:
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Issue Dt:
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03/08/2016
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Application #:
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14050722
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Filing Dt:
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10/10/2013
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Publication #:
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Pub Dt:
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04/16/2015
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Title:
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WET-PROCESS CERIA COMPOSITIONS FOR POLISHING SUBSTRATES, AND METHODS RELATED THERETO
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Patent #:
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Issue Dt:
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03/08/2016
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Application #:
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14050977
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Filing Dt:
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10/10/2013
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Pub Dt:
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04/16/2015
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Title:
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WET-PROCESS CERIA COMPOSITIONS FOR POLISHING SUBSTRATES, AND METHODS RELATED THERETO
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Patent #:
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Issue Dt:
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05/17/2016
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Application #:
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14051121
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Filing Dt:
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10/10/2013
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Publication #:
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Pub Dt:
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04/16/2015
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Title:
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MIXED ABRASIVE POLISHING COMPOSITIONS
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Patent #:
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Issue Dt:
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10/27/2015
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Application #:
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14054497
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Filing Dt:
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10/15/2013
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Publication #:
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Pub Dt:
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02/13/2014
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Title:
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FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITORING OF FLUID STORAGE AND DISPENSING VESSEL
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Patent #:
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Issue Dt:
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07/29/2014
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Application #:
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14067887
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Filing Dt:
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10/30/2013
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Publication #:
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Pub Dt:
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02/20/2014
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Title:
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Atmospheric Pressure Microwave Plasma Treated Porous Membranes
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Patent #:
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Issue Dt:
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12/15/2015
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Application #:
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14085744
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Filing Dt:
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11/20/2013
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Pub Dt:
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06/12/2014
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Title:
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METHOD AND SYSTEM FOR ANHYDROUS AMMONIA RECOVERY
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Patent #:
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Issue Dt:
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08/04/2015
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Application #:
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14087363
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Filing Dt:
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11/22/2013
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Pub Dt:
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06/05/2014
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Title:
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INTEGRATED WAVEFRONT SENSOR AND PROFILOMETER
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Patent #:
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Issue Dt:
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07/23/2019
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Application #:
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14094921
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Filing Dt:
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12/03/2013
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Publication #:
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Pub Dt:
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06/04/2015
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Title:
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CMP COMPOSITIONS AND METHODS FOR POLISHING NICKEL PHOSPHOROUS SURFACES
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Patent #:
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Issue Dt:
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09/22/2015
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Application #:
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14095575
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Filing Dt:
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12/03/2013
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Publication #:
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Pub Dt:
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04/03/2014
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Title:
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ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MAKING AND USING SAME
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Patent #:
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Issue Dt:
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05/12/2015
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Application #:
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14099655
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Filing Dt:
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12/06/2013
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Publication #:
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Pub Dt:
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04/17/2014
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Title:
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Polishing Pad for Eddy Current End-Point Detection
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Patent #:
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Issue Dt:
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12/26/2017
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Application #:
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14100339
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Filing Dt:
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12/09/2013
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Publication #:
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Pub Dt:
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06/11/2015
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Title:
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CMP COMPOSITIONS AND METHODS FOR SELECTIVE REMOVAL OF SILICON NITRIDE
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Patent #:
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Issue Dt:
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06/30/2015
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Application #:
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14104984
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Filing Dt:
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12/12/2013
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Publication #:
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Pub Dt:
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04/17/2014
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Title:
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LOW TEMPERATURE GST PROCESS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14114868
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Filing Dt:
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10/30/2013
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Publication #:
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Pub Dt:
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01/01/2015
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Title:
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Porous Composite Membrane Including Microporous Membrane Layers And Nanofiber Layer
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Patent #:
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Issue Dt:
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05/24/2016
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Application #:
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14119402
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Filing Dt:
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11/21/2013
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Publication #:
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Pub Dt:
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03/27/2014
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Title:
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REFILLABLE AMPOULE WITH PURGE CAPABILITY
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Patent #:
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Issue Dt:
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08/29/2017
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Application #:
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14139653
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Filing Dt:
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12/23/2013
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Publication #:
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Pub Dt:
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07/03/2014
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Title:
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RETICLE POD
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Patent #:
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Issue Dt:
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03/21/2017
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Application #:
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14152792
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Filing Dt:
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01/10/2014
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Publication #:
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Pub Dt:
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05/08/2014
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Title:
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HOMOGENEOUS POLISHING PAD FOR EDDY CURRENT END-POINT DETECTION
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Patent #:
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Issue Dt:
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04/12/2016
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Application #:
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14152866
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Filing Dt:
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01/10/2014
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Publication #:
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Pub Dt:
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05/08/2014
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Title:
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SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP
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Patent #:
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Issue Dt:
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03/06/2018
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Application #:
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14156201
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Filing Dt:
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01/15/2014
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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COMPOSITION AND METHOD FOR POLISHING MEMORY HARD DISKS
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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14175573
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Filing Dt:
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02/07/2014
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Publication #:
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Pub Dt:
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08/07/2014
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Title:
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METHOD AND SYSTEM FOR CONTROLLING OPERATION OF A PUMP BASED ON FILTER INFORMATION IN A FILTER INFORMATION TAG
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Patent #:
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Issue Dt:
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01/31/2017
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Application #:
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14183894
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Filing Dt:
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02/19/2014
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Publication #:
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Pub Dt:
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06/19/2014
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Title:
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POLISHING PAD WITH MULTI-MODAL DISTRIBUTION OF PORE DIAMETERS
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Patent #:
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Issue Dt:
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01/19/2016
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Application #:
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14203621
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Filing Dt:
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03/11/2014
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Publication #:
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Pub Dt:
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09/17/2015
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Title:
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COMPOSITION FOR TUNGSTEN CMP
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Patent #:
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Issue Dt:
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04/05/2016
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Application #:
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14203647
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Filing Dt:
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03/11/2014
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Publication #:
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Pub Dt:
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09/17/2015
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Title:
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COMPOSITION FOR TUNGSTEN CMP
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Patent #:
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Issue Dt:
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04/05/2016
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Application #:
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14203693
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Filing Dt:
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03/11/2014
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Publication #:
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Pub Dt:
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09/17/2015
| | | | |
Title:
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COMPOSITION FOR TUNGSTEN CMP
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Patent #:
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Issue Dt:
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12/13/2016
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Application #:
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14211528
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Filing Dt:
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03/14/2014
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Publication #:
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Pub Dt:
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10/30/2014
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Title:
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SULFOLANE MIXTURES AS AMBIENT APROTIC POLAR SOLVENTS
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Patent #:
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Issue Dt:
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05/19/2015
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Application #:
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14217866
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Filing Dt:
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03/18/2014
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Publication #:
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Pub Dt:
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07/24/2014
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Title:
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ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MATERIALS
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Patent #:
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Issue Dt:
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04/12/2016
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Application #:
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14222086
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Filing Dt:
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03/21/2014
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Publication #:
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Pub Dt:
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09/24/2015
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Title:
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COMPOSITION FOR TUNGSTEN BUFFING
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Patent #:
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Issue Dt:
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09/08/2015
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Application #:
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14222716
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Filing Dt:
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03/24/2014
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Publication #:
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Pub Dt:
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09/24/2015
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Title:
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MIXED ABRASIVE TUNGSTEN CMP COMPOSITION
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Patent #:
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Issue Dt:
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04/05/2016
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Application #:
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14222736
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Filing Dt:
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03/24/2014
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Publication #:
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Pub Dt:
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09/24/2015
| | | | |
Title:
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MIXED ABRASIVE TUNGSTEN CMP COMPOSITION
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Patent #:
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Issue Dt:
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11/04/2014
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Application #:
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14223500
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Filing Dt:
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03/24/2014
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Publication #:
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Pub Dt:
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07/24/2014
| | | | |
Title:
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LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
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Patent #:
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Issue Dt:
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01/12/2016
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Application #:
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14224536
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Filing Dt:
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03/25/2014
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Publication #:
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Pub Dt:
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07/24/2014
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Title:
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PVDF PYROLYZATE ADSORBENT AND GAS STORAGE AND DISPENSING SYSTEM UTILIZING SAME
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Patent #:
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Issue Dt:
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12/27/2016
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14224672
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Filing Dt:
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03/25/2014
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Publication #:
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Pub Dt:
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07/24/2014
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Title:
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ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS
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Patent #:
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Issue Dt:
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09/12/2017
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14234023
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Filing Dt:
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01/21/2014
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Pub Dt:
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06/26/2014
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Title:
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ALON COATED SUBSTRATE WITH OPTIONAL YTTRIA OVERLAYER
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04/12/2016
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14238693
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10/21/2014
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Pub Dt:
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02/12/2015
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Title:
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WAFER CARRIER
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Patent #:
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Issue Dt:
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12/22/2015
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14251475
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Filing Dt:
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04/11/2014
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Pub Dt:
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08/07/2014
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Title:
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ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN FILMS
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Issue Dt:
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01/08/2019
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14263500
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04/28/2014
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Pub Dt:
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10/30/2014
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Title:
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WAFER CONTAINER WITH LATCHING MECHANISM FOR LARGE DIAMETER WAFERS
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07/26/2016
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14269622
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05/05/2014
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Pub Dt:
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11/05/2015
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Title:
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POLISHING COMPOSITION FOR EDGE ROLL-OFF IMPROVEMENT
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05/09/2017
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14280245
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Filing Dt:
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05/16/2014
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Pub Dt:
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07/30/2015
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Title:
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DIFFUSION RESISTANT ELECTROSTATIC CLAMP
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Patent #:
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Issue Dt:
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10/20/2015
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14289728
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Filing Dt:
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05/29/2014
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Publication #:
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Pub Dt:
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11/27/2014
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Title:
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CMP COMPOSITIONS SELECTIVE FOR OXIDE OVER POLYSILICON AND NITRIDE WITH HIGH REMOVAL RATE AND LOW DEFECTIVITY
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05/10/2016
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14294980
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Filing Dt:
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06/03/2014
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Pub Dt:
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09/25/2014
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Title:
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METHOD AND APPARATUS FOR TREATING FLUIDS TO REDUCE MICROBUBBLES
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Patent #:
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01/03/2017
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Application #:
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14301861
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06/11/2014
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Publication #:
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Pub Dt:
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10/02/2014
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Title:
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PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAPOR DEPOSITION OF TITANATE, LANTHANATE, AND TANTALATE DIELECTRIC FILMS
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01/19/2016
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14307846
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06/18/2014
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Pub Dt:
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12/24/2015
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Title:
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POLISHING PAD HAVING POROGENS WITH LIQUID FILLER
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09/13/2016
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14321180
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07/01/2014
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Pub Dt:
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01/01/2015
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Title:
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OXIDIZING AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES
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11/14/2017
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14329707
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07/11/2014
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Pub Dt:
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10/30/2014
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Title:
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SYSTEM AND METHOD FOR PRESSURE COMPENSATION IN A PUMP
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10/27/2015
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14331092
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07/14/2014
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Pub Dt:
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10/30/2014
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ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES FOR UTILIZING SAME
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10/13/2015
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14331958
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07/15/2014
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Pub Dt:
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11/06/2014
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COMPOSITIONS AND METHODS FOR THE SELECTIVE REMOVAL OF SILICON NITRIDE
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08/11/2015
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14333536
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07/17/2014
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11/06/2014
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Title:
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COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF SILICON-CONTAINING FILMS INCLUDING SILICON CARBONITRIDE AND SILICON OXYCARBONITRIDE FILMS
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08/07/2018
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14337039
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07/21/2014
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02/12/2015
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WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS
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04/21/2015
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14338132
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07/22/2014
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Pub Dt:
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11/06/2014
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METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION SOURCE IN AN ION IMPLANTATION SYSTEM
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04/17/2018
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14349596
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04/03/2014
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09/04/2014
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MODULAR FILTER CASSETTE
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04/10/2018
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14350543
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04/08/2014
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10/09/2014
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B2F4 MANUFACTURING PROCESS
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06/30/2015
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14357659
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05/13/2014
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11/20/2014
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FOLDED LINER FOR USE WITH AN OVERPACK AND METHODS OF MANUFACTURING THE SAME
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01/17/2017
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14368714
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06/25/2014
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01/29/2015
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COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
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07/04/2017
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14377656
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08/08/2014
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Publication #:
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Pub Dt:
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02/26/2015
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Title:
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Gas Purifier
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Patent #:
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Issue Dt:
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11/07/2017
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14378652
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Filing Dt:
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08/14/2014
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Publication #:
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Pub Dt:
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02/05/2015
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Title:
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ALTERNATE MATERIALS AND MIXTURES TO MINIMIZE PHOSPHORUS BUILDUP IN IMPLANT APPLICATIONS
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01/08/2019
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14378842
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08/14/2014
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01/21/2016
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Title:
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POST-CMP REMOVAL USING COMPOSITIONS AND METHOD OF USE
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05/01/2018
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14378963
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08/14/2014
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Publication #:
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Pub Dt:
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01/21/2016
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Title:
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CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERFORMANCE IMPROVEMENT
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07/04/2017
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14380646
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Filing Dt:
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08/22/2014
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Pub Dt:
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01/15/2015
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Title:
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FLUID DELIVERY SYSTEM AND METHOD
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10/25/2016
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14391696
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Filing Dt:
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10/09/2014
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Publication #:
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Pub Dt:
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03/12/2015
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Title:
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WAFER SHIPPER
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05/17/2016
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14398957
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11/04/2014
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Publication #:
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Pub Dt:
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05/14/2015
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Title:
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REPLACEABLE WAFER SUPPORT BACKSTOP
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12/13/2016
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14398958
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11/04/2014
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Pub Dt:
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05/07/2015
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Title:
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WAFER CONTAINER WITH DOOR INTERFACE SEAL
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04/25/2017
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14398959
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Filing Dt:
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11/04/2014
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Publication #:
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03/26/2015
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Title:
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WAFER CONTAINER WITH DOOR MOUNTED SHIPPING CUSHIONS
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09/13/2016
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14400793
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11/12/2014
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05/28/2015
| | | | |
Title:
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SILYLENE COMPOSITIONS AND METHODS OF USE THEREOF
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06/13/2017
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14401732
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11/17/2014
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Pub Dt:
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06/18/2015
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Title:
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COMPOSITION AND PROCESS FOR STRIPPING PHOTORESIST FROM A SURFACE INCLUDING TITANIUM NITRIDE
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08/20/2019
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14404633
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11/30/2014
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07/09/2015
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Title:
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SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION
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07/23/2019
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14419458
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02/03/2015
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07/30/2015
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Title:
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ULTRA-HIGH PURITY STORAGE AND DISPENSING OF LIQUID REAGENTS
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02/20/2018
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14430105
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03/20/2015
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Pub Dt:
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09/03/2015
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Title:
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ANTI-SPIKE PRESSURE MANAGEMENT OF PRESSURE-REGULATED FLUID STORAGE AND DELIVERY VESSELS
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01/10/2017
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14430217
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03/21/2015
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09/03/2015
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Title:
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COBALT PRECURSORS FOR LOW TEMPERATURE ALD OR CVD OF COBALT-BASED THIN FILMS
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05/02/2017
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14431116
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03/25/2015
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09/10/2015
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Title:
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FLUORINE FREE TUNGSTEN ALD/CVD PROCESS
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06/06/2017
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14432457
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03/30/2015
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09/10/2015
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Title:
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CMP BRUSH PACKAGING
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10/18/2016
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14432741
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03/31/2015
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10/01/2015
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Title:
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Purification system with manifold assembly and removable filter cassette
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03/20/2018
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14437121
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04/20/2015
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09/24/2015
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Title:
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RETICLE POD WITH COVER TO BASEPLATE ALIGNMENT SYSTEM
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05/02/2017
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14437189
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04/20/2015
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10/01/2015
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Title:
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DOUBLE SELF-ALIGNED PHASE CHANGE MEMORY DEVICE STRUCTURE
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08/01/2017
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14439464
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04/29/2015
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10/15/2015
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Title:
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ELECTROSTATIC CHUCK WITH PHOTO-PATTERNABLE SOFT PROTRUSION CONTACT SURFACE
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06/27/2017
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14440209
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05/01/2015
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Pub Dt:
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10/22/2015
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Title:
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POLISHING PAD WITH OFFSET CONCENTRIC GROOVING PATTERN AND METHOD FOR POLISHING A SUBSTRATE THEREWITH
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09/25/2018
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14443204
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05/15/2015
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10/22/2015
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METHODS, SYSTEMS, AND APPARATUSES FOR CONTROLLING SUBSTANCE MIXING CONCENTRATION
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02/05/2019
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14445003
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07/28/2014
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11/13/2014
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01/24/2017
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14450885
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08/04/2014
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02/04/2016
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CHEMICAL MECHANICAL POLISHING OF ALUMINA
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08/18/2015
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14452192
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08/05/2014
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11/20/2014
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10/11/2016
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14459452
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08/14/2014
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02/26/2015
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POLISHING PAD WITH POROUS INTERFACE AND SOLID CORE, AND RELATED APPARATUS AND METHODS
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04/11/2017
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14466115
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08/22/2014
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12/11/2014
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SYSTEM AND METHOD FOR VARIABLE DISPENSE POSITION
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02/23/2016
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14466367
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08/22/2014
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12/11/2014
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Drag Reducing Compositions and Methods of Manufacture and Use
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02/14/2017
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14471755
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08/28/2014
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03/03/2016
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POLISHING OF HARD SUBSTRATES WITH SOFT-CORE COMPOSITE PARTICLES
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01/31/2017
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14478632
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09/05/2014
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01/01/2015
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A PRESSURIZED SYSTEM FOR DISPENSING FLUIDS
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03/08/2016
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14489177
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09/17/2014
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03/05/2015
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CUSTOMIZED POLISHING PADS FOR CMP AND METHODS OF FABRICATION AND USE THEREOF
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02/16/2016
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14494276
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09/23/2014
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01/29/2015
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CMP METHOD FOR FORMING SMOOTH DIAMOND SURFACES
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07/11/2017
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14509081
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10/08/2014
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01/29/2015
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COMPOSITION AND METHOD FOR POLISHING BULK SILICON
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12/13/2016
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14513933
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10/14/2014
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01/29/2015
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GAS STORAGE AND DISPENSING SYSTEM WITH MONOLITHIC CARBON ADSORBENT
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08/09/2016
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14515560
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10/16/2014
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04/23/2015
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CMP POLISHING PAD HAVING EDGE EXCLUSION REGION OF OFFSET CONCENTRIC GROOVE PATTERN
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01/03/2017
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10/16/2014
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04/30/2015
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POLISHING COMPOSITION AND METHOD FOR NICKEL-PHOSPHOROUS COATED MEMORY DISKS
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01/10/2017
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14529504
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10/31/2014
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05/07/2015
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DISSOLVED OXYGEN SENSOR
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03/29/2016
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14530534
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10/31/2014
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02/26/2015
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POLISHING PAD WITH HOMOGENEOUS BODY HAVING DISCRETE PROTRUSIONS THEREON
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04/25/2017
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11/03/2014
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02/12/2015
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OPTICAL SENSOR APPARATUS TO DETECT LIGHT BASED ON THE REFRACTIVE INDEX OF A SAMPLE
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03/21/2017
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14550129
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11/21/2014
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03/19/2015
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METHOD OF FABRICATING A POLISHING
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08/23/2016
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14558071
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12/02/2014
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04/02/2015
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METAL AND DIELECTRIC COMPATIBLE SACRIFICIAL ANTI-REFLECTIVE COATING CLEANING AND REMOVAL COMPOSITION
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03/14/2017
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14558445
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12/02/2014
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03/26/2015
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METHODS AND APPARATUS FOR LARGE DIAMETER WAFER HANDLING
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08/23/2016
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12/12/2014
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06/16/2016
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CMP COMPOSITIONS EXHIBITING REDUCED DISHING IN STI WAFER POLISHING
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01/22/2019
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12/19/2014
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07/02/2015
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SAFETY CLOSURES AND PUMPING SYSTEMS
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08/07/2018
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12/29/2014
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07/02/2015
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02/02/2016
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14610991
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01/30/2015
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06/04/2015
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POLISHING PAD WITH ALIGNMENT FEATURE
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