Patent Assignment Details
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Reel/Frame: | 011194/0129 | |
| Pages: | 3 |
| | Recorded: | 10/23/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09614785
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Filing Dt:
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07/12/2000
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Title:
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SILICON ETCHING APPARATUS USING XEF2
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Assignee
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131-308, SEOUL NATIONAL UNIVERSITY SAN 56-1, SHILLIM-DONG, KWANAK-GU |
SEOUL, 151-742, KOREA, REPUBLIC OF |
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Correspondence name and address
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HEAD, JOHNSON & KACHIGIAN
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PAUL H. JOHNSON
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228 WEST 17TH PLACE
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TULSA, OKLAHOMA 74119
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