Patent Assignment Details
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Reel/Frame: | 010289/0183 | |
| Pages: | 5 |
| | Recorded: | 09/30/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09410265
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Filing Dt:
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09/30/1999
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Title:
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OPTIMIZATION OF CMP PROCESS BY DETECTION OF OXIDE/NITRIDE INTERFACE USING IR SYSTEM
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Assignee
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NEW ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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Correspondence name and address
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LANE, AITKEN & MCCANN
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ANDREW C. AITKEN
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2600 VIRGINIA AVENUE, NW
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WASHINGTON, DC 20037
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