Patent Assignment Details
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Reel/Frame: | 005032/0225 | |
| Pages: | 7 |
| | Recorded: | 03/23/1989 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/17/1990
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Application #:
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07239569
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Filing Dt:
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09/01/1988
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Title:
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PECVD (PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION) METHOD FOR DEPOSITING OF THUNGSTEN OR LAYERS CONTAINING TUNGSTEN BY IN SITU FORMATION OF TUNGSTEN FLUORIDES
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Correspondence name and address
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WILLIAM D. SABO
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IBM CORPORATION
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DEPARTMENT 915, BUILDING 972-2
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ESSEX JUNCTION, VT 05452
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