Patent Assignment Details
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| Reel/Frame: | 018181/0225 | |
| Pages: | 5 |
| | Recorded: | 08/11/2006 | | |
| Attorney Dkt #: | ENTG1840 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/28/2008
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Application #:
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11502729
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Filing Dt:
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08/11/2006
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Publication #:
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Pub Dt:
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02/14/2008
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Title:
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SYSTEMS AND METHODS FOR FLUID FLOW CONTROL IN AN IMMERSION LITHOGRAPHY SYSTEM
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Assignee
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| 3500 LYMAN BLVD. |
| CHASKA, MINNESOTA 55318 |
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Correspondence name and address
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SPRINKLE IP LAW GROUP
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1301 W. 25TH STREET
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SUITE 408
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AUSTIN, TX 78705
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