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Reel/Frame:	038083/0231			Pages:	8
		Recorded:	03/14/2016
Attorney Dkt #:	063707-423796
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 73

Patent #:	5672239	Issue Dt:	09/30/1997	Application #:	08438261	Filing Dt:	05/10/1995
Title:	INTEGRATED SEMICONDUCTOR WAFER PROCESSING SYSTEM

Patent #:	5985089	Issue Dt:	11/16/1999	Application #:	08450369	Filing Dt:	05/25/1995
Title:	PLASMA ETCH SYSTEM

Patent #:	6605198	Issue Dt:	08/12/2003	Application #:	08564659	Filing Dt:	11/29/1995
Title:	APPARATUS FOR, AND METHOD OF, DEPOSITING A FILM ON A SUBSTRATE

Patent #:	5914017	Issue Dt:	06/22/1999	Application #:	08651377	Filing Dt:	05/22/1996
Title:	APPARATUS FOR, AND METHOD OF, REMOVING HYDROCARBONS FROM THE SURFACE OF A SUBSTRATE

Patent #:	6048435	Issue Dt:	04/11/2000	Application #:	08675093	Filing Dt:	07/03/1996
Title:	PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS

Patent #:	6500314	Issue Dt:	12/31/2002	Application #:	08675559	Filing Dt:	07/03/1996
Title:	PLASMA ETCH REACTOR AND METHOD

Patent #:	6127277	Issue Dt:	10/03/2000	Application #:	08742861	Filing Dt:	11/01/1996
Title:	METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR WAFER WITH FEATURES HAVING VERTICAL SIDEWALLS

Patent #:	5958139	Issue Dt:	09/28/1999	Application #:	08850224	Filing Dt:	05/02/1997
Title:	PLASMA ETCH SYSTEM

Patent #:	6240933	Issue Dt:	06/05/2001	Application #:	08853649	Filing Dt:	05/09/1997
Title:	METHODS FOR CLEANING SEMICONDUCTOR SURFACES

Patent #:	6098641	Issue Dt:	08/08/2000	Application #:	08897914	Filing Dt:	07/21/1997
Title:	MOTOR DRIVE ASSEMBLY FOR A SEMICONDUCTOR WAFER PROCESSING SYSTEM

Patent #:	6046116	Issue Dt:	04/04/2000	Application #:	08974089	Filing Dt:	11/19/1997
Title:	A METHOD FOR MINIMIZING THE CRITICAL DIMENSION GROWTH OF A FEATURE ON A SEMICONDUCTOR WAFER

Patent #:	5980643	Issue Dt:	11/09/1999	Application #:	09099309	Filing Dt:	06/18/1998
Title:	ALKALINE WATER-BASED SOLUTION FOR CLEANING METALLIZED MICROELECTRONIC

Patent #:	6432214	Issue Dt:	08/13/2002	Application #:	09113440	Filing Dt:	07/10/1998
Publication #:	US20010047812	Pub Dt:	12/06/2001
Title:	CLEANING APPARATUS

Patent #:	6346428	Issue Dt:	02/12/2002	Application #:	09135210	Filing Dt:	08/17/1998
Title:	METHOD AND APPARATUS FOR MINIMIZING SEMICONDUCTOR WAFER ARCING DURING SEMICONDUCTOR WAFER PROCESSING

Patent #:	6354240	Issue Dt:	03/12/2002	Application #:	09152238	Filing Dt:	09/11/1998
Title:	PLASMA ETCH REACTOR HAVING A PLURALITY OF MAGNETS (AS AMENDED)

Patent #:	6322633	Issue Dt:	11/27/2001	Application #:	09362157	Filing Dt:	07/28/1999
Title:	WAFER CONTAINER CLEANING SYSTEM

Patent #:	6536450	Issue Dt:	03/25/2003	Application #:	09372849	Filing Dt:	08/12/1999
Title:	FLUID HEATING SYSTEM FOR PROCESSING SEMICONDUCTOR MATERIALS

Patent #:	6190496	Issue Dt:	02/20/2001	Application #:	09384614	Filing Dt:	08/27/1999
Title:	PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS

Patent #:	6120610	Issue Dt:	09/19/2000	Application #:	09412873	Filing Dt:	10/05/1999
Title:	PLASMA ETCH SYSTEM

Patent #:	6199298	Issue Dt:	03/13/2001	Application #:	09413622	Filing Dt:	10/06/1999
Title:	VAPOR ASSISTED ROTARY DRYING METHOD AND APPARATUS

Patent #:	6312527	Issue Dt:	11/06/2001	Application #:	09436613	Filing Dt:	11/09/1999
Title:	A NON- CORROSIVE CLEANING METHOD FOR USE IN THE MANUFACTURE OF MICROELECTRONIC DEVICES

Patent #:	6486069	Issue Dt:	11/26/2002	Application #:	09454814	Filing Dt:	12/03/1999
Title:	COBALT SILICIDE ETCH PROCESS AND APPARATUS

Patent #:	6620335	Issue Dt:	09/16/2003	Application #:	09455641	Filing Dt:	12/07/1999
Title:	PLASMA ETCH REACTOR AND METHOD

Patent #:	6334453	Issue Dt:	01/01/2002	Application #:	09503784	Filing Dt:	02/14/2000
Title:	Seal configuration for use with a motor drive assembly in a microelectronic workpiece processing system

Patent #:	6492280	Issue Dt:	12/10/2002	Application #:	09517387	Filing Dt:	03/02/2000
Title:	METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR WAFER WITH FEATURES HAVING VERTICAL SIDEWALLS

Patent #:	6701941	Issue Dt:	03/09/2004	Application #:	09536251	Filing Dt:	03/27/2000
Title:	METHOD FOR TREATING THE SURFACE OF A WORKPIECE

Patent #:	6446644	Issue Dt:	09/10/2002	Application #:	09609879	Filing Dt:	07/05/2000
Title:	CHEMICAL SOLUTIONS SYSTEM FOR PROCESSING SEMICONDUCTOR MATERIALS

Patent #:	6408863	Issue Dt:	06/25/2002	Application #:	09610175	Filing Dt:	07/05/2000
Title:	SEAL CONFIGURATION FOR USE W ITH A MOTOR DRIVE ASSEMBLY IN A MICROELECTRONIC WORK PIECE PROCESSING SYSTEM

Patent #:	6418945	Issue Dt:	07/16/2002	Application #:	09611537	Filing Dt:	07/07/2000
Title:	DUAL CASSETTE CENTRIFUGAL PROCESSOR

Patent #:	6412502	Issue Dt:	07/02/2002	Application #:	09611642	Filing Dt:	07/07/2000
Title:	WAFER CONTAINER CLEANING SYSTEM

Patent #:	6869487	Issue Dt:	03/22/2005	Application #:	09621028	Filing Dt:	07/21/2000
Title:	PROCESS AND APPARATUS FOR TREATING A WORKPIECE SUCH AS A SEMICONDUCTOR WAFER

Patent #:	6797076	Issue Dt:	09/28/2004	Application #:	09658395	Filing Dt:	09/08/2000
Title:	SPRAY NOZZLE SYSTEM FOR A SEMICONDUCTOR WAFER CONTAINER CLEANING APARATUS

Patent #:	6591845	Issue Dt:	07/15/2003	Application #:	09677925	Filing Dt:	10/03/2000
Title:	APPARATUS AND METHOD FOR PROCESSING THE SURFACE OF A WORKPIECE WIH OZONE

Patent #:	6273108	Issue Dt:	08/14/2001	Application #:	09677929	Filing Dt:	10/03/2000
Title:	Apparatus and method for processing the surface of a workpiece with ozone

Patent #:	6267125	Issue Dt:	07/31/2001	Application #:	09677934	Filing Dt:	10/03/2000
Title:	Apparatus and method for processing the surface of a workpiece with ozone

Patent #:	6361611	Issue Dt:	03/26/2002	Application #:	09778579	Filing Dt:	02/07/2001
Publication #:	US20010008140	Pub Dt:	07/19/2001
Title:	Solution for cleaning metallized microelectronic workpieces and methods of using same

Patent #:	6562141	Issue Dt:	05/13/2003	Application #:	09798048	Filing Dt:	03/05/2001
Publication #:	US20020000194	Pub Dt:	01/03/2002
Title:	DUAL DEGAS/COOL LOADLOCK CLUSTER TOOL

Patent #:	6830628	Issue Dt:	12/14/2004	Application #:	09811925	Filing Dt:	03/19/2001
Publication #:	US20010029965	Pub Dt:	10/18/2001
Title:	METHODS FOR CLEANING SEMICONDUCTOR SURFACES

Patent #:	7467598	Issue Dt:	12/23/2008	Application #:	09829587	Filing Dt:	04/09/2001
Publication #:	US20030017709	Pub Dt:	01/23/2003
Title:	SYSTEM FOR, AND METHOD OF, ETCHING A SURFACE ON A WAFER

Patent #:	6601594	Issue Dt:	08/05/2003	Application #:	09837722	Filing Dt:	04/18/2001
Publication #:	US20010042555	Pub Dt:	11/22/2001
Title:	APPARATUS AND METHOD FOR DELIVERING A TREATMENT LIQUID AND OZONE TO TREAT THE SURFACE OF A WORKPIECE

Patent #:	6774046	Issue Dt:	08/10/2004	Application #:	09880584	Filing Dt:	06/13/2001
Publication #:	US20010031561	Pub Dt:	10/18/2001
Title:	METHOD FOR MINIMIZING THE CRITICAL DIMENSION GROWTH OF A FEATURE ON A SEMICONDUCTOR WAFER

Patent #:	7439188	Issue Dt:	10/21/2008	Application #:	09888365	Filing Dt:	06/22/2001
Publication #:	US20020036064	Pub Dt:	03/28/2002
Title:	REACTOR WITH HEATED AND TEXTURED ELECTRODES AND SURFACES

Patent #:	6497768	Issue Dt:	12/24/2002	Application #:	09929312	Filing Dt:	08/14/2001
Publication #:	US20020050279	Pub Dt:	05/02/2002
Title:	PROCESS FOR TREATING A WORKPIECE WITH HYDROFLUORIC ACID AND OZONE

Patent #:	6582525	Issue Dt:	06/24/2003	Application #:	09929437	Filing Dt:	08/14/2001
Publication #:	US20020020436	Pub Dt:	02/21/2002
Title:	METHODS FOR PROCESSING A WORKPIECE USING STEAM AND OZONE

Patent #:	6904920	Issue Dt:	06/14/2005	Application #:	10043716	Filing Dt:	01/09/2002
Publication #:	US20020100495	Pub Dt:	08/01/2002
Title:	METHOD AND APPARATUS FOR CLEANING CONTAINERS

Patent #:	7208396	Issue Dt:	04/24/2007	Application #:	10051886	Filing Dt:	01/16/2002
Publication #:	US20030132524	Pub Dt:	07/17/2003
Title:	PERMANENT ADHERENCE OF THE BACK END OF A WAFER TO AN ELECTRICAL COMPONENT OR SUB-ASSEMBLY

Patent #:	6691718	Issue Dt:	02/17/2004	Application #:	10108278	Filing Dt:	03/26/2002
Publication #:	US20020096202	Pub Dt:	07/25/2002
Title:	WAFER CONTAINER CLEANING SYSTEM

Patent #:	6905969	Issue Dt:	06/14/2005	Application #:	10156478	Filing Dt:	05/28/2002
Publication #:	US20020139665	Pub Dt:	10/03/2002
Title:	PLASMA ETCH REACTOR AND METHOD

Patent #:	6660104	Issue Dt:	12/09/2003	Application #:	10164164	Filing Dt:	06/05/2002
Publication #:	US20020179122	Pub Dt:	12/05/2002
Title:	DUAL CASSETTE CENTRIFUGAL PROCESSOR

Patent #:	7305999	Issue Dt:	12/11/2007	Application #:	10199998	Filing Dt:	07/19/2002
Publication #:	US20030102019	Pub Dt:	06/05/2003
Title:	CENTRIFUGAL SPRAY PROCESSOR AND RETROFIT KIT

Patent #:	6732945	Issue Dt:	05/11/2004	Application #:	10205776	Filing Dt:	07/26/2002
Publication #:	US20020185549	Pub Dt:	12/12/2002
Title:	CHEMICAL SOLUTIONS METHODS FOR PROCESSING SEMICONDUCTOR MATERIALS

Patent #:	6830057	Issue Dt:	12/14/2004	Application #:	10286317	Filing Dt:	11/01/2002
Publication #:	US20040084066	Pub Dt:	05/06/2004
Title:	WAFER CONTAINER CLEANING SYSTEM

Patent #:	6736150	Issue Dt:	05/18/2004	Application #:	10359844	Filing Dt:	02/06/2003
Publication #:	US20030116180	Pub Dt:	06/26/2003
Title:	FLUID HEATING SYSTEM FOR PROCESSING SEMICONDUCTOR MATERIALS

Patent #:	6837252	Issue Dt:	01/04/2005	Application #:	10418695	Filing Dt:	04/18/2003
Publication #:	US20030205240	Pub Dt:	11/06/2003
Title:	APPARATUS FOR TREATING A WORKPIECE WITH STEAM AND OZONE

Patent #:	6817370	Issue Dt:	11/16/2004	Application #:	10420659	Filing Dt:	04/21/2003
Publication #:	US20030205254	Pub Dt:	11/06/2003
Title:	METHOD FOR PROCESSING THE SURFACE OF A WORKPIECE

Patent #:	7179350	Issue Dt:	02/20/2007	Application #:	10446005	Filing Dt:	05/23/2003
Publication #:	US20040231972	Pub Dt:	11/25/2004
Title:	REACTIVE SPUTTERING OF SILICON NITRIDE FILMS BY RF SUPPORTED DC MAGNETRON

Patent #:	7404863	Issue Dt:	07/29/2008	Application #:	10631376	Filing Dt:	07/30/2003
Publication #:	US20040020513	Pub Dt:	02/05/2004
Title:	METHODS OF THINNING A SILICON WAFER USING HF AND OZONE

Patent #:	7270729	Issue Dt:	09/18/2007	Application #:	10633839	Filing Dt:	08/04/2003
Publication #:	US20040038548	Pub Dt:	02/26/2004
Title:	SYSTEM FOR, AND METHOD OF, ETCHING A SURFACE ON A WAFER

Patent #:	6843857	Issue Dt:	01/18/2005	Application #:	10681553	Filing Dt:	10/07/2003
Publication #:	US20040069320	Pub Dt:	04/15/2004
Title:	METHODS FOR CLEANING SEMICONDUCTOR SURFACES

Patent #:	6869486	Issue Dt:	03/22/2005	Application #:	10692829	Filing Dt:	10/23/2003
Publication #:	US20040079393	Pub Dt:	04/29/2004
Title:	METHODS FOR REMOVING METALLIC CONTAMINATION FROM WAFER CONTAINERS

Patent #:	7264680	Issue Dt:	09/04/2007	Application #:	10859668	Filing Dt:	06/03/2004
Publication #:	US20040216763	Pub Dt:	11/04/2004
Title:	PROCESS AND APPARATUS FOR TREATING A WORKPIECE USING OZONE

Patent #:	7416611	Issue Dt:	08/26/2008	Application #:	10870173	Filing Dt:	06/18/2004
Publication #:	US20040221877	Pub Dt:	11/11/2004
Title:	PROCESS AND APPARATUS FOR TREATING A WORKPIECE WITH GASES

Patent #:	7060138	Issue Dt:	06/13/2006	Application #:	10917750	Filing Dt:	08/12/2004
Publication #:	US20050011540	Pub Dt:	01/20/2005
Title:	METHODS FOR CLEANING WAFER CONTAINERS

Patent #:	7169623	Issue Dt:	01/30/2007	Application #:	10937660	Filing Dt:	09/09/2004
Publication #:	US20060051881	Pub Dt:	03/09/2006
Title:	SYSTEM AND METHOD FOR PROCESSING A WAFER INCLUDING STOP-ON-ALUMINA PROCESSING

Patent #:	7163588	Issue Dt:	01/16/2007	Application #:	11005495	Filing Dt:	12/06/2004
Publication #:	US20050133067	Pub Dt:	06/23/2005
Title:	PROCESSING A WORKPIECE USING WATER, A BASE, AND OZONE

Patent #:	7223699	Issue Dt:	05/29/2007	Application #:	11087540	Filing Dt:	03/23/2005
Publication #:	US20050164513	Pub Dt:	07/28/2005
Title:	PLASMA ETCH REACTOR AND METHOD

Patent #:	7378355	Issue Dt:	05/27/2008	Application #:	11127052	Filing Dt:	05/11/2005
Publication #:	US20050236363	Pub Dt:	10/27/2005
Title:	SYSTEM AND METHODS FOR POLISHING A WAFER

Patent #:	7520286	Issue Dt:	04/21/2009	Application #:	11294921	Filing Dt:	12/05/2005
Publication #:	US20070125404	Pub Dt:	06/07/2007
Title:	APPARATUS AND METHOD FOR CLEANING AND DRYING A CONTAINER FOR SEMICONDUCTOR WORKPIECES

Patent #:	7645618	Issue Dt:	01/12/2010	Application #:	11724556	Filing Dt:	03/14/2007
Publication #:	US20070155027	Pub Dt:	07/05/2007
Title:	DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM DEVICE STRUCTURES

Patent #:	8808513	Issue Dt:	08/19/2014	Application #:	12411301	Filing Dt:	03/25/2009
Publication #:	US20090242392	Pub Dt:	10/01/2009
Title:	Stress adjustment in reactive sputtering

Patent #:	8691057	Issue Dt:	04/08/2014	Application #:	12411357	Filing Dt:	03/25/2009
Publication #:	US20090242388	Pub Dt:	10/01/2009
Title:	Stress adjustment in reactive sputtering

Patent #:	7955870	Issue Dt:	06/07/2011	Application #:	12552664	Filing Dt:	09/02/2009
Publication #:	US20100022030	Pub Dt:	01/28/2010
Title:	DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM DEVICE STRUCTURES

Patent #:	8482375	Issue Dt:	07/09/2013	Application #:	12786238	Filing Dt:	05/24/2010
Publication #:	US20100301989	Pub Dt:	12/02/2010
Title:	SPUTTER DEPOSITION OF CERMET RESISTOR FILMS WITH LOW TEMPERATURE COEFFICIENT OF RESISTANCE

Assignor

OEM GROUP, INC.

Exec Dt:

03/09/2016

Assignee

OEM GROUP, LLC

2120 W. GUADALUPE ROAD

GILBERT, ARIZONA 85233

Correspondence name and address
	ARI M. BAI/POLSINELLI PC
	ONE EAST WASHINGTON STREET
	SUITE 1200
	PHOENIX, AZ 85004

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