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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:016700/0252   Pages: 7
Recorded: 07/01/2005
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 52
1
Patent #:
4866346
Issue Dt:
09/12/1989
Application #:
07065281
Filing Dt:
06/22/1987
Title:
MICROWAVE PLASMA GENERATOR
2
Patent #:
4851630
Issue Dt:
07/25/1989
Application #:
07210563
Filing Dt:
06/23/1988
Title:
MICROWAVE REACTIVE GAS GENERATOR
3
Patent #:
5142198
Issue Dt:
08/25/1992
Application #:
07454522
Filing Dt:
12/21/1989
Title:
MICROWAVE REACTIVE GAS DISCHARGE DEVICE
4
Patent #:
5206471
Issue Dt:
04/27/1993
Application #:
07813978
Filing Dt:
12/26/1991
Title:
MICROWAVE ACTIVATED GAS GENERATOR
5
Patent #:
5279866
Issue Dt:
01/18/1994
Application #:
08075148
Filing Dt:
06/10/1993
Title:
PROCESS FOR DEPOSITING WEAR-RESISTANT COATINGS
6
Patent #:
5637279
Issue Dt:
06/10/1997
Application #:
08298653
Filing Dt:
08/31/1994
Title:
OZONE AND OTHER REACTIVE GAS GENERATOR CELL AND SYSTEM
7
Patent #:
5625259
Issue Dt:
04/29/1997
Application #:
08389243
Filing Dt:
02/16/1995
Title:
MICROWAVE PLASMA APPLICATOR WITH A HELICAL FLUID COOLING CHANNEL SURROUNDING A MICROWAVE TRANSPARENT DISCHARGE TUBE
8
Patent #:
5568015
Issue Dt:
10/22/1996
Application #:
08389250
Filing Dt:
02/16/1995
Title:
FLUID-COOLED DIELECTRIC WINDOW FOR A PLASMA SYSTEM
9
Patent #:
5621331
Issue Dt:
04/15/1997
Application #:
08500411
Filing Dt:
07/10/1995
Title:
AUTOMATIC IMPEDANCE MATCHING APPARATUS AND METHOD
10
Patent #:
5688382
Issue Dt:
11/18/1997
Application #:
08521958
Filing Dt:
08/31/1995
Title:
MICROWAVE PLASMA DEPOSITION SOURCE AND METHOD OF FILLING HIGH ASPECT-RATIO FEATURES ON A SUBSTRATE
11
Patent #:
5830272
Issue Dt:
11/03/1998
Application #:
08554459
Filing Dt:
11/07/1995
Title:
SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS
12
Patent #:
5865969
Issue Dt:
02/02/1999
Application #:
08736232
Filing Dt:
10/23/1996
Title:
APPARATUS FOR, AND METHOD OF, PROVIDING A DEPOSITION ON A SUBSTRATE
13
Patent #:
5869802
Issue Dt:
02/09/1999
Application #:
08770316
Filing Dt:
12/20/1996
Title:
PLASMA PRODUCING STRUCTURE
14
Patent #:
6176987
Issue Dt:
01/23/2001
Application #:
08788408
Filing Dt:
01/27/1997
Title:
SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION OF WAFERS
15
Patent #:
5881668
Issue Dt:
03/16/1999
Application #:
08790732
Filing Dt:
01/27/1997
Title:
SYSTEM FOR PROVIDING A CONTROLLED DEPOSITION ON WAFERS
16
Patent #:
5858101
Issue Dt:
01/12/1999
Application #:
08790735
Filing Dt:
01/27/1997
Title:
SYSTEM FOR PROVIDING A CONTROLLED DEPOSITION OF WAFERS
17
Patent #:
5879460
Issue Dt:
03/09/1999
Application #:
08790736
Filing Dt:
01/27/1997
Title:
SYSTEM FOR PROVIDING A CONTROLLED DEPOSITION ON WAFERS
18
Patent #:
5759268
Issue Dt:
06/02/1998
Application #:
08791449
Filing Dt:
01/27/1997
Title:
SYSTEM FOR OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS
19
Patent #:
5882403
Issue Dt:
03/16/1999
Application #:
08791502
Filing Dt:
01/27/1997
Title:
SYSTEM FOR PROVIDING A CONTROLLED DEPOSITION ON WAFERS
20
Patent #:
6083357
Issue Dt:
07/04/2000
Application #:
08791503
Filing Dt:
01/27/1997
Title:
SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS
21
Patent #:
5932180
Issue Dt:
08/03/1999
Application #:
08871088
Filing Dt:
06/09/1997
Title:
OZONE AND OTHER REACTIVE GAS GENERATOR CELL AND SYSTEM
22
Patent #:
6150628
Issue Dt:
11/21/2000
Application #:
08883281
Filing Dt:
06/26/1997
Title:
TOROIDAL LOW-FIELD REACTIVE GAS SOURCE
23
Patent #:
6149367
Issue Dt:
11/21/2000
Application #:
08999936
Filing Dt:
04/15/1998
Title:
END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER
24
Patent #:
6059517
Issue Dt:
05/09/2000
Application #:
08999937
Filing Dt:
04/15/1998
Title:
END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER
25
Patent #:
6135051
Issue Dt:
10/24/2000
Application #:
08999939
Filing Dt:
04/15/1998
Title:
END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER
26
Patent #:
6163006
Issue Dt:
12/19/2000
Application #:
09019573
Filing Dt:
02/06/1998
Title:
PERMANENT MAGNET ECR PLASMA SOURCE WITH MAGNETIC FIELD OPTIMIZATION
27
Patent #:
6051066
Issue Dt:
04/18/2000
Application #:
09059883
Filing Dt:
04/14/1998
Title:
END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER
28
Patent #:
6225592
Issue Dt:
05/01/2001
Application #:
09153193
Filing Dt:
09/15/1998
Title:
METHOD AND APPARATUS FOR LAUNCHING MICROWAVE ENERGY INTO A PLASMA PROCESSING CHAMBER
29
Patent #:
6159290
Issue Dt:
12/12/2000
Application #:
09165689
Filing Dt:
10/02/1998
Title:
APPARATUS FOR, AND METHOD OF, PROVIDING CONTROLLED DEPOSITIONS ON SUBSTRATES
30
Patent #:
6235172
Issue Dt:
05/22/2001
Application #:
09387370
Filing Dt:
08/31/1999
Title:
SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS
31
Patent #:
6388226
Issue Dt:
05/14/2002
Application #:
09502087
Filing Dt:
02/10/2000
Title:
Toroidal low-field reactive gas source
32
Patent #:
6486431
Issue Dt:
11/26/2002
Application #:
09659881
Filing Dt:
09/12/2000
Title:
TOROIDAL LOW-FIELD REACTIVE GAS SOURCE
33
Patent #:
6786976
Issue Dt:
09/07/2004
Application #:
09701854
Filing Dt:
02/15/2001
Title:
METHOD AND SYSTEM FOR CLEANING SEMICONDUCTOR ELEMENTS
34
Patent #:
6924455
Issue Dt:
08/02/2005
Application #:
09774165
Filing Dt:
01/26/2001
Title:
INTEGRATED PLASMA CHAMBER AND INDUCTIVELY-COUPLED TOROIDAL PLASMA SOURCE
35
Patent #:
6815633
Issue Dt:
11/09/2004
Application #:
09804650
Filing Dt:
03/12/2001
Title:
INDUCTIVELY-COUPLED TOROIDAL PLASMA SOURCE
36
Patent #:
6552296
Issue Dt:
04/22/2003
Application #:
09953763
Filing Dt:
09/17/2001
Publication #:
US20020046991
Pub Dt:
04/25/2002
Title:
TOROIDAL LOW-FIELD REACTIVE GAS SOURCE
37
Patent #:
6887339
Issue Dt:
05/03/2005
Application #:
09960227
Filing Dt:
09/20/2001
Title:
RF POWER SUPPLY WITH INTEGRATED MATCHING NETWORK
38
Patent #:
6805791
Issue Dt:
10/19/2004
Application #:
10133237
Filing Dt:
04/26/2002
Publication #:
US20030164338
Pub Dt:
09/04/2003
Title:
OZONATED WATER FLOW AND CONCENTRATION CONTROL APPARATUS AND METHOD
39
Patent #:
6559408
Issue Dt:
05/06/2003
Application #:
10143061
Filing Dt:
05/10/2002
Publication #:
US20020125225
Pub Dt:
09/12/2002
Title:
TOROIDAL LOW-FIELD REACTIVE GAS SOURCE
40
Patent #:
6664497
Issue Dt:
12/16/2003
Application #:
10143070
Filing Dt:
05/10/2002
Publication #:
US20020125226
Pub Dt:
09/12/2002
Title:
TOROIDAL LOW-FIELD REACTIVE GAS SOURCE
41
Patent #:
6781317
Issue Dt:
08/24/2004
Application #:
10373163
Filing Dt:
02/24/2003
Title:
METHODS AND APPARATUS FOR CALIBRATION AND METROLOGY FOR AN INTEGRATED RF GENERATOR SYSTEM
42
Patent #:
6872909
Issue Dt:
03/29/2005
Application #:
10417408
Filing Dt:
04/16/2003
Publication #:
US20040206730
Pub Dt:
10/21/2004
Title:
TOROIDAL LOW-FIELD REACTIVE GAS AND PLASMA SOURCE HAVING A DIELECTRIC VACUUM VESSEL
43
Patent #:
7075366
Issue Dt:
07/11/2006
Application #:
10623414
Filing Dt:
07/18/2003
Publication #:
US20050012551
Pub Dt:
01/20/2005
Title:
METHODS AND SYSTEMS FOR STABILIZING AN AMPLIFIER
44
Patent #:
7161112
Issue Dt:
01/09/2007
Application #:
10689165
Filing Dt:
10/20/2003
Publication #:
US20040079287
Pub Dt:
04/29/2004
Title:
TOROIDAL LOW-FIELD REACTIVE GAS SOURCE
45
Patent #:
7502114
Issue Dt:
03/10/2009
Application #:
10799331
Filing Dt:
03/12/2004
Publication #:
US20050200848
Pub Dt:
09/15/2005
Title:
OZONE CONCENTRATION SENSOR
46
Patent #:
7166816
Issue Dt:
01/23/2007
Application #:
10837912
Filing Dt:
05/03/2004
Title:
INDUCTIVELY-COUPLED TORODIAL PLASMA SOURCE
47
Patent #:
7067017
Issue Dt:
06/27/2006
Application #:
10892539
Filing Dt:
07/15/2004
Publication #:
US20050056301
Pub Dt:
03/17/2005
Title:
METHOD AND SYSTEM FOR CLEANING SEMICONDUCTOR ELEMENTS
48
Patent #:
7122965
Issue Dt:
10/17/2006
Application #:
10897580
Filing Dt:
07/23/2004
Publication #:
US20050057165
Pub Dt:
03/17/2005
Title:
METHODS AND APPARATUS FOR CALIBRATION AND METROLOGY FOR AN INTEGRATED RF GENERATOR SYSTEM
49
Patent #:
6948504
Issue Dt:
09/27/2005
Application #:
10938455
Filing Dt:
09/10/2004
Publication #:
US20050029202
Pub Dt:
02/10/2005
Title:
OZONATED WATER FLOW AND CONCENTRATION CONTROL METHOD
50
Patent #:
7304438
Issue Dt:
12/04/2007
Application #:
10947397
Filing Dt:
09/22/2004
Publication #:
US20050093459
Pub Dt:
05/05/2005
Title:
METHOD AND APPARATUS FOR PREVENTING INSTABILITIES IN RADIO-FREQUENCY PLASMA PROCESSING
51
Patent #:
NONE
Issue Dt:
Application #:
11020376
Filing Dt:
12/22/2004
Publication #:
US20050103439
Pub Dt:
05/19/2005
Title:
Stabilization of electronegative plasmas with feedback control of RF generator systems
52
Patent #:
7501600
Issue Dt:
03/10/2009
Application #:
11058620
Filing Dt:
02/15/2005
Publication #:
US20050145173
Pub Dt:
07/07/2005
Title:
TOROIDAL LOW-FIELD REACTIVE GAS AND PLASMA SOURCE HAVING A DIELECTRIC VACUUM VESSEL
Assignor
1
APPLIED SCIENCE AND TECHNOLOGY, INC.
Exec Dt:
06/08/2005
Assignee
1
MKS INSTRUMENTS, INC.
90 INDUSTRIAL WAY
WILMINGTON, MASSACHUSETTS 01887
Correspondence name and address
PATENT ADMINISTRATOR
PROSKAUER ROSE LLP
ONE INTERNATIONAL PLACE
BOSTON, MA 02110-2600

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