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Reel/Frame:	038663/0265			Pages:	51
		Recorded:	05/04/2016
Attorney Dkt #:	F162680
Conveyance:	SECURITY AGREEMENT

Total properties: 566
Page 3 of 6
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Patent #:	6857323	Issue Dt:	02/22/2005	Application #:	10669065	Filing Dt:	09/23/2003
Title:	TWO PHASE FLOW SENSOR USING TOMOGRAPHY TECHNIQUES

Patent #:	7032882	Issue Dt:	04/25/2006	Application #:	10673989	Filing Dt:	09/29/2003
Publication #:	US20050067603	Pub Dt:	03/31/2005
Title:	VALVE ASSEMBLY HAVING NOVEL FLOW CHARACTERISTICS

Patent #:	7161112	Issue Dt:	01/09/2007	Application #:	10689165	Filing Dt:	10/20/2003
Publication #:	US20040079287	Pub Dt:	04/29/2004
Title:	TOROIDAL LOW-FIELD REACTIVE GAS SOURCE

Patent #:	7320455	Issue Dt:	01/22/2008	Application #:	10693222	Filing Dt:	10/24/2003
Publication #:	US20050109914	Pub Dt:	05/26/2005
Title:	INSTRUMENTED PLATFORM FOR VIBRATION-SENSITIVE EQUIPMENT

Patent #:	RE39466	Issue Dt:	01/16/2007	Application #:	10718511	Filing Dt:	11/20/2003
Title:	FLOW RATE SENSOR IMPLEMENTING A PLURALITY OF INNER TUBES LOCATED WITHIN A SENSOR TUBE

Patent #:	6909975	Issue Dt:	06/21/2005	Application #:	10721817	Filing Dt:	11/24/2003
Publication #:	US20050114070	Pub Dt:	05/26/2005
Title:	INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER

Patent #:	6983215	Issue Dt:	01/03/2006	Application #:	10727081	Filing Dt:	12/02/2003
Publication #:	US20050119864	Pub Dt:	06/02/2005
Title:	RF METROLOGY CHARACTERIZATION FOR FIELD INSTALLATION AND SERVICEABILITY FOR THE PLASMA PROCESSING INDUSTRY

Patent #:	7180758	Issue Dt:	02/20/2007	Application #:	10760174	Filing Dt:	01/16/2004
Publication #:	US20060158911	Pub Dt:	07/20/2006
Title:	CLASS E AMPLIFIER WITH INDUCTIVE CLAMP

Patent #:	7016107	Issue Dt:	03/21/2006	Application #:	10762216	Filing Dt:	01/20/2004
Publication #:	US20050157381	Pub Dt:	07/21/2005
Title:	LOW-GAIN REGENERATIVE AMPLIFIER SYSTEM

Patent #:	7072743	Issue Dt:	07/04/2006	Application #:	10796693	Filing Dt:	03/09/2004
Publication #:	US20050199342	Pub Dt:	09/15/2005
Title:	SEMICONDUCTOR MANUFACTURING GAS FLOW DIVIDER SYSTEM AND METHOD

Patent #:	6986359	Issue Dt:	01/17/2006	Application #:	10796723	Filing Dt:	03/09/2004
Publication #:	US20050199287	Pub Dt:	09/15/2005
Title:	SYSTEM AND METHOD FOR CONTROLLING PRESSURE IN REMOTE ZONES

Patent #:	7502114	Issue Dt:	03/10/2009	Application #:	10799331	Filing Dt:	03/12/2004
Publication #:	US20050200848	Pub Dt:	09/15/2005
Title:	OZONE CONCENTRATION SENSOR

Patent #:	7030619	Issue Dt:	04/18/2006	Application #:	10799446	Filing Dt:	03/12/2004
Publication #:	US20050184735	Pub Dt:	08/25/2005
Title:	IONIZATION GAUGE

Patent #:	6932098	Issue Dt:	08/23/2005	Application #:	10806974	Filing Dt:	03/23/2004
Publication #:	US20040256003	Pub Dt:	12/23/2004
Title:	APPARATUS AND METHOD FOR PRESSURE FLUCTUATION INSENSITIVE MASS FLOW CONTROL

Patent #:	7230960	Issue Dt:	06/12/2007	Application #:	10808732	Filing Dt:	03/24/2004
Publication #:	US20050129073	Pub Dt:	06/16/2005
Title:	TUNABLE EXTERNAL CAVITY LASER WITH ADJUSTABLE CAVITY LENGTH AND MODE-HOP SUPPRESSION

Patent #:	7120542	Issue Dt:	10/10/2006	Application #:	10814970	Filing Dt:	03/30/2004
Publication #:	US20050222782	Pub Dt:	10/06/2005
Title:	FLOW MONITORING SYSTEM

Patent #:	7073771	Issue Dt:	07/11/2006	Application #:	10814973	Filing Dt:	03/30/2004
Publication #:	US20050218361	Pub Dt:	10/06/2005
Title:	POROUS VALVE ASSEMBLY

Patent #:	7007707	Issue Dt:	03/07/2006	Application #:	10816084	Filing Dt:	04/01/2004
Publication #:	US20040187928	Pub Dt:	09/30/2004
Title:	MASS FLOW RATIO SYSTEM AND METHOD

Patent #:	7330657	Issue Dt:	02/12/2008	Application #:	10816255	Filing Dt:	04/01/2004
Publication #:	US20050226616	Pub Dt:	10/13/2005
Title:	METHOD TO DEMULTIPLEX WAVELENGTHS OF LIGHT

Patent #:	6918295	Issue Dt:	07/19/2005	Application #:	10816412	Filing Dt:	04/01/2004
Title:	THERMAL MASS FLOW RATE SENSOR PROVIDING INCREASED RATE OF HEAT TRANSFER TO GAS

Patent #:	7628860	Issue Dt:	12/08/2009	Application #:	10822358	Filing Dt:	04/12/2004
Publication #:	US20050223979	Pub Dt:	10/13/2005
Title:	PULSED MASS FLOW DELIVERY SYSTEM AND METHOD

Patent #:	7323804	Issue Dt:	01/29/2008	Application #:	10829413	Filing Dt:	04/21/2004
Publication #:	US20040212279	Pub Dt:	10/28/2004
Title:	LINEAR OUTPUT, CLOSED LOOP MOVER ASSEMBLY

Patent #:	7166816	Issue Dt:	01/23/2007	Application #:	10837912	Filing Dt:	05/03/2004
Title:	INDUCTIVELY-COUPLED TORODIAL PLASMA SOURCE

Patent #:	6945119	Issue Dt:	09/20/2005	Application #:	10852896	Filing Dt:	05/24/2004
Publication #:	US20040216527	Pub Dt:	11/04/2004
Title:	APPARATUS AND METHODS FOR HEAT LOSS PRESSURE MEASUREMENT

Patent #:	7173950	Issue Dt:	02/06/2007	Application #:	10877572	Filing Dt:	06/25/2004
Publication #:	US20050286573	Pub Dt:	12/29/2005
Title:	LOW-NOISE HIGH-POWER SHG LASER SYSTEM

Patent #:	7423364	Issue Dt:	09/09/2008	Application #:	10888028	Filing Dt:	07/09/2004
Publication #:	US20050006982	Pub Dt:	01/13/2005
Title:	SEALED MOVER ASSEMBLY

Patent #:	6891601	Issue Dt:	05/10/2005	Application #:	10891719	Filing Dt:	07/14/2004
Publication #:	US20050012920	Pub Dt:	01/20/2005
Title:	HIGH RESOLUTION, DYNAMIC POSITIONING MECHANISM FOR SPECIMEN INSPECTION AND PROCESSING

Patent #:	7067017	Issue Dt:	06/27/2006	Application #:	10892539	Filing Dt:	07/15/2004
Publication #:	US20050056301	Pub Dt:	03/17/2005
Title:	METHOD AND SYSTEM FOR CLEANING SEMICONDUCTOR ELEMENTS

Patent #:	7122989	Issue Dt:	10/17/2006	Application #:	10913267	Filing Dt:	08/05/2004
Publication #:	US20060028158	Pub Dt:	02/09/2006
Title:	MULTIPLE SPEED MOVER ASSEMBLY

Patent #:	7506014	Issue Dt:	03/17/2009	Application #:	10914046	Filing Dt:	08/06/2004
Publication #:	US20060031273	Pub Dt:	02/09/2006
Title:	TUNABLE MULTI-PHASE-OFFSET DIRECT DIGITAL SYNTHESIZER

Patent #:	6948504	Issue Dt:	09/27/2005	Application #:	10938455	Filing Dt:	09/10/2004
Publication #:	US20050029202	Pub Dt:	02/10/2005
Title:	OZONATED WATER FLOW AND CONCENTRATION CONTROL METHOD

Patent #:	7000465	Issue Dt:	02/21/2006	Application #:	10943377	Filing Dt:	09/17/2004
Title:	ATTITUDE ERROR SELF-CORRECTION FOR THERMAL SENSORS OF MASS FLOW METERS AND CONTROLLERS

Patent #:	7304438	Issue Dt:	12/04/2007	Application #:	10947397	Filing Dt:	09/22/2004
Publication #:	US20050093459	Pub Dt:	05/05/2005
Title:	METHOD AND APPARATUS FOR PREVENTING INSTABILITIES IN RADIO-FREQUENCY PLASMA PROCESSING

Patent #:	7219255	Issue Dt:	05/15/2007	Application #:	10948085	Filing Dt:	09/23/2004
Publication #:	US20060025871	Pub Dt:	02/02/2006
Title:	FAILSAFE SWITCHING OF INTELLIGENT CONTROLLER METHOD AND DEVICE

Patent #:	7201057	Issue Dt:	04/10/2007	Application #:	10954386	Filing Dt:	09/30/2004
Publication #:	US20060070447	Pub Dt:	04/06/2006
Title:	HIGH-TEMPERATURE REDUCED SIZE MANOMETER

Patent #:	7137301	Issue Dt:	11/21/2006	Application #:	10960153	Filing Dt:	10/07/2004
Publication #:	US20060075823	Pub Dt:	04/13/2006
Title:	METHOD AND APPARATUS FOR FORMING A REFERENCE PRESSURE WITHIN A CHAMBER OF A CAPACITANCE SENSOR

Patent #:	7141447	Issue Dt:	11/28/2006	Application #:	10960158	Filing Dt:	10/07/2004
Publication #:	US20060079016	Pub Dt:	04/13/2006
Title:	METHOD OF FORMING A SEAL BETWEEN A HOUSING AND A DIAPHRAGM OF A CAPACITANCE SENSOR

Patent #:	8276873	Issue Dt:	10/02/2012	Application #:	10971623	Filing Dt:	10/22/2004
Publication #:	US20060086293	Pub Dt:	04/27/2006
Title:	INSTRUMENTED PLATFORM FOR VIBRATION-SENSITIVE EQUIPMENT

Patent #:	7286577	Issue Dt:	10/23/2007	Application #:	10976114	Filing Dt:	10/28/2004
Publication #:	US20060092996	Pub Dt:	05/04/2006
Title:	LASER WAVELENGTH ACTUATORS

Patent #:	7121139	Issue Dt:	10/17/2006	Application #:	10987718	Filing Dt:	11/12/2004
Publication #:	US20060101907	Pub Dt:	05/18/2006
Title:	THERMAL MASS FLOW RATE SENSOR HAVING FIXED BYPASS RATIO

Patent #:	7000463	Issue Dt:	02/21/2006	Application #:	10987719	Filing Dt:	11/12/2004
Title:	REYNOLDS NUMBER CORRECTION FUNCTION FOR MASS FLOW RATE SENSOR

Patent #:	7107834	Issue Dt:	09/19/2006	Application #:	10988026	Filing Dt:	11/12/2004
Publication #:	US20060101908	Pub Dt:	05/18/2006
Title:	THERMAL MASS FLOW RATE SENSOR INCLUDING BYPASS PASSAGEWAYS AND A SENSOR PASSAGEWAY HAVING SIMILAR ENTRANCE EFFECTS

Patent #:	7388890	Issue Dt:	06/17/2008	Application #:	11011461	Filing Dt:	12/13/2004
Publication #:	US20050243875	Pub Dt:	11/03/2005
Title:	PIEZOELECTRIC-TUNED EXTERNAL CAVITY LASER

Patent #:	7284439	Issue Dt:	10/23/2007	Application #:	11011615	Filing Dt:	12/15/2004
Publication #:	US20050262946	Pub Dt:	12/01/2005
Title:	METHOD FOR PRODUCING A PRESSURE SENSOR FOR DETECTING SMALL PRESSURE DIFFERENCES AND LOW PRESSURES

Patent #:	7313966	Issue Dt:	01/01/2008	Application #:	11012871	Filing Dt:	12/14/2004
Publication #:	US20060123915	Pub Dt:	06/15/2006
Title:	METHOD AND APPARATUS FOR STORING VACUUM GAUGE CALIBRATION PARAMETERS AND MEASUREMENT DATA ON A VACUUM GAUGE STRUCTURE

Patent #:	7628861	Issue Dt:	12/08/2009	Application #:	11015465	Filing Dt:	12/17/2004
Publication #:	US20060130744	Pub Dt:	06/22/2006
Title:	PULSED MASS FLOW DELIVERY SYSTEM AND METHOD

Patent #:	7387135	Issue Dt:	06/17/2008	Application #:	11021912	Filing Dt:	12/23/2004
Publication #:	US20060137744	Pub Dt:	06/29/2006
Title:	VALVE ASSEMBLY HAVING RIGID SEATING SURFACES

Patent #:	7204150	Issue Dt:	04/17/2007	Application #:	11036775	Filing Dt:	01/14/2005
Publication #:	US20060156824	Pub Dt:	07/20/2006
Title:	TURBO SUMP FOR USE WITH CAPACITIVE PRESSURE SENSOR

Patent #:	7321175	Issue Dt:	01/22/2008	Application #:	11043001	Filing Dt:	01/24/2005
Publication #:	US20050184599	Pub Dt:	08/25/2005
Title:	LOW COST PRECISION LINEAR ACTUATOR AND CONTROL SYSTEM

Patent #:	7261797	Issue Dt:	08/28/2007	Application #:	11044912	Filing Dt:	01/27/2005
Publication #:	US20050167262	Pub Dt:	08/04/2005
Title:	PASSIVE BIPOLAR ARC CONTROL SYSTEM AND METHOD

Patent #:	7501600	Issue Dt:	03/10/2009	Application #:	11058620	Filing Dt:	02/15/2005
Publication #:	US20050145173	Pub Dt:	07/07/2005
Title:	TOROIDAL LOW-FIELD REACTIVE GAS AND PLASMA SOURCE HAVING A DIELECTRIC VACUUM VESSEL

Patent #:	7455720	Issue Dt:	11/25/2008	Application #:	11060071	Filing Dt:	02/16/2005
Publication #:	US20060180026	Pub Dt:	08/17/2006
Title:	METHOD AND APPARATUS FOR PREVENTING PRODUCTS OF TICL4 AND NH3 OR OTHER FEED GAS REACTIONS FROM DAMAGING VACUUM PUMPS IN TIN OR OTHER DEPOSITION SYSTEMS

Patent #:	7278444	Issue Dt:	10/09/2007	Application #:	11063075	Filing Dt:	02/22/2005
Publication #:	US20060185743	Pub Dt:	08/24/2006
Title:	VALVE ASSEMBLY HAVING IMPROVED PUMP-DOWN PERFORMANCE

Patent #:	7546208	Issue Dt:	06/09/2009	Application #:	11074307	Filing Dt:	03/07/2005
Publication #:	US20060241491	Pub Dt:	10/26/2006
Title:	METHOD AND APPARATUS OF SIGNAL PROCESSING FOR USE IN SPECTROMETRY USING AN IMPROVED APODIZATION FUNCTION

Patent #:	7616462	Issue Dt:	11/10/2009	Application #:	11077555	Filing Dt:	03/09/2005
Publication #:	US20050219875	Pub Dt:	10/06/2005
Title:	POWER SUPPLY CONTROLLER TO ACTIVELY DRIVE A LOAD CURRENT WHEN THE LOAD CURRENT EXCEEDS A SET POINT

Patent #:	7174263	Issue Dt:	02/06/2007	Application #:	11090120	Filing Dt:	03/25/2005
Publication #:	US20060217903	Pub Dt:	09/28/2006
Title:	EXTERNAL VOLUME INSENSITIVE FLOW VERIFICATION

Patent #:	7388354	Issue Dt:	06/17/2008	Application #:	11102961	Filing Dt:	04/11/2005
Publication #:	US20050226019	Pub Dt:	10/13/2005
Title:	METHODS AND DEVICES FOR LOW NOISE CURRENT SOURCE WITH DYNAMIC POWER DISTRIBUTION

Patent #:	7602127	Issue Dt:	10/13/2009	Application #:	11108626	Filing Dt:	04/18/2005
Publication #:	US20060232471	Pub Dt:	10/19/2006
Title:	PHASE AND FREQUENCY CONTROL OF A RADIO FREQUENCY GENERATOR FROM AN EXTERNAL SOURCE

Patent #:	7621290	Issue Dt:	11/24/2009	Application #:	11111646	Filing Dt:	04/21/2005
Publication #:	US20060237063	Pub Dt:	10/26/2006
Title:	GAS DELIVERY METHOD AND SYSTEM INCLUDING A FLOW RATIO CONTROLLER USING ANTISYMMETRIC OPTIMAL CONTROL

Patent #:	7428913	Issue Dt:	09/30/2008	Application #:	11114388	Filing Dt:	04/26/2005
Publication #:	US20060237064	Pub Dt:	10/26/2006
Title:	VALVE ASSEMBLY HAVING ARTICULATING RIGID SEATING SURFACE

Patent #:	8102954	Issue Dt:	01/24/2012	Application #:	11115063	Filing Dt:	04/26/2005
Publication #:	US20060239389	Pub Dt:	10/26/2006
Title:	FREQUENCY INTERFERENCE DETECTION AND CORRECTION

Patent #:	7000479	Issue Dt:	02/21/2006	Application #:	11119604	Filing Dt:	05/02/2005
Title:	HEATED PRESSURE TRANSDUCER

Patent #:	7890220	Issue Dt:	02/15/2011	Application #:	11120396	Filing Dt:	05/03/2005
Publication #:	US20060249076	Pub Dt:	11/09/2006
Title:	LOW OVERHEAD CLOSED LOOP CONTROL SYSTEM

Patent #:	7271523	Issue Dt:	09/18/2007	Application #:	11126040	Filing Dt:	05/10/2005
Publication #:	US20050200239	Pub Dt:	09/15/2005
Title:	CLOSED LOOP MOVER ASSEMBLY WITH MEASUREMENT SYSTEM

Patent #:	7477711	Issue Dt:	01/13/2009	Application #:	11132551	Filing Dt:	05/19/2005
Publication #:	US20060262889	Pub Dt:	11/23/2006
Title:	SYNCHRONOUS UNDERSAMPLING FOR HIGH-FREQUENCY VOLTAGE AND CURRENT MEASUREMENTS

Patent #:	7389697	Issue Dt:	06/24/2008	Application #:	11134001	Filing Dt:	05/20/2005
Publication #:	US20060000289	Pub Dt:	01/05/2006
Title:	PRESSURE SENSOR FOR DETECTING SMALL PRESSURE DIFFERENCES AND LOW PRESSURES

Patent #:	8679287	Issue Dt:	03/25/2014	Application #:	11136610	Filing Dt:	05/23/2005
Publication #:	US20060264045	Pub Dt:	11/23/2006
Title:	METHOD AND APPARATUS FOR PREVENTING ALD REACTANTS FROM DAMAGING VACUUM PUMPS

Patent #:	7249516	Issue Dt:	07/31/2007	Application #:	11146721	Filing Dt:	06/07/2005
Publication #:	US20060021442	Pub Dt:	02/02/2006
Title:	METHOD OF OPERATING A RESISTIVE HEAT-LOSS PRESSURE SENSOR

Patent #:	9011633	Issue Dt:	04/21/2015	Application #:	11164303	Filing Dt:	11/17/2005
Publication #:	US20070107844	Pub Dt:	05/17/2007
Title:	BROADBAND TECHNIQUES TO REDUCE THE EFFECTS OF IMPEDANCE MISMATCH IN PLASMA CHAMBERS

Patent #:	7787477	Issue Dt:	08/31/2010	Application #:	11178626	Filing Dt:	07/11/2005
Publication #:	US20070008972	Pub Dt:	01/11/2007
Title:	ADDRESS-TRANSPARENT DEVICE AND METHOD

Patent #:	7124640	Issue Dt:	10/24/2006	Application #:	11180370	Filing Dt:	07/13/2005
Title:	THERMAL MOUNTING PLATE FOR HEATED PRESSURE TRANSDUCER

Patent #:	7235902	Issue Dt:	06/26/2007	Application #:	11186111	Filing Dt:	07/21/2005
Publication #:	US20060017331	Pub Dt:	01/26/2006
Title:	COOLING SYSTEM FOR LINEAR MOTORS

Patent #:	7264006	Issue Dt:	09/04/2007	Application #:	11207989	Filing Dt:	08/19/2005
Publication #:	US20060107969	Pub Dt:	05/25/2006
Title:	OZONATED WATER FLOW AND CONCENTRATION CONTROL APPARATUS AND METHOD

Patent #:	8089026	Issue Dt:	01/03/2012	Application #:	11216424	Filing Dt:	08/30/2005
Publication #:	US20060011591	Pub Dt:	01/19/2006
Title:	METHODS FOR CONTROL OF PLASMA TRANSITIONS IN SPUTTER PROCESSING SYSTEMS USING A RESONANT CIRCUIT

Patent #:	7151976	Issue Dt:	12/19/2006	Application #:	11229153	Filing Dt:	09/16/2005
Publication #:	US20060111804	Pub Dt:	05/25/2006
Title:	MULTIVARIATE CONTROL OF SEMICONDUCTOR PROCESSES

Patent #:	7372573	Issue Dt:	05/13/2008	Application #:	11240799	Filing Dt:	09/30/2005
Publication #:	US20070242275	Pub Dt:	10/18/2007
Title:	MULTIGAS MONITORING AND DETECTION SYSTEM

Patent #:	7353771	Issue Dt:	04/08/2008	Application #:	11268692	Filing Dt:	11/07/2005
Publication #:	US20070103092	Pub Dt:	05/10/2007
Title:	METHOD AND APPARATUS OF PROVIDING POWER TO IGNITE AND SUSTAIN A PLASMA IN A REACTIVE GAS GENERATOR

Patent #:	7569790	Issue Dt:	08/04/2009	Application #:	11269917	Filing Dt:	11/08/2005
Publication #:	US20060086699	Pub Dt:	04/27/2006
Title:	METHOD AND APPARATUS FOR PROCESSING METAL BEARING GASES

Patent #:	7643909	Issue Dt:	01/05/2010	Application #:	11278071	Filing Dt:	03/30/2006
Publication #:	US20070235668	Pub Dt:	10/11/2007
Title:	HIGHLY RESPONSIVE MASTER-SLAVE VALVE POSITIONING

Patent #:	7932480	Issue Dt:	04/26/2011	Application #:	11278800	Filing Dt:	04/05/2006
Publication #:	US20070235440	Pub Dt:	10/11/2007
Title:	MULTIPLE HEATER CONTROL SYSTEM WITH EXPANDABLE MODULAR FUNCTIONALITY

Patent #:	8997791	Issue Dt:	04/07/2015	Application #:	11279786	Filing Dt:	04/14/2006
Publication #:	US20070240778	Pub Dt:	10/18/2007
Title:	Multiple-Channel Flow Ratio Controller

Patent #:	7296465	Issue Dt:	11/20/2007	Application #:	11284452	Filing Dt:	11/22/2005
Publication #:	US20070113641	Pub Dt:	05/24/2007
Title:	VERTICAL MOUNT MASS FLOW SENSOR

Patent #:	8231098	Issue Dt:	07/31/2012	Application #:	11293439	Filing Dt:	12/02/2005
Publication #:	US20060119026	Pub Dt:	06/08/2006
Title:	METHODS AND DEVICES FOR ACTIVE VIBRATION DAMPING OF AN OPTICAL STRUCTURE

Patent #:	7424346	Issue Dt:	09/09/2008	Application #:	11304456	Filing Dt:	12/15/2005
Publication #:	US20060173642	Pub Dt:	08/03/2006
Title:	APPARATUS AND METHOD FOR PRESSURE FLUCTUATION INSENSITIVE MASS FLOW CONTROL

Patent #:	7292387	Issue Dt:	11/06/2007	Application #:	11332555	Filing Dt:	01/12/2006
Publication #:	US20060250677	Pub Dt:	11/09/2006
Title:	METHODS AND SYSTEMS TO ENHANCE MULTIPLE WAVE MIXING PROCESS

Patent #:	8037896	Issue Dt:	10/18/2011	Application #:	11333142	Filing Dt:	01/17/2006
Publication #:	US20060169327	Pub Dt:	08/03/2006
Title:	PRESSURE REGULATION IN REMOTE ZONES

Patent #:	7467027	Issue Dt:	12/16/2008	Application #:	11340260	Filing Dt:	01/26/2006
Publication #:	US20070174016	Pub Dt:	07/26/2007
Title:	COMPENSATION FOR THERMAL SIPHONING IN MASS FLOW CONTROLLERS

Patent #:	7295015	Issue Dt:	11/13/2007	Application #:	11354278	Filing Dt:	02/14/2006
Publication #:	US20060197537	Pub Dt:	09/07/2006
Title:	IONIZATION GAUGE

Patent #:	7463991	Issue Dt:	12/09/2008	Application #:	11367641	Filing Dt:	03/03/2006
Publication #:	US20060217900	Pub Dt:	09/28/2006
Title:	MASS FLOW VERIFIER WITH FLOW RESTRICTOR

Patent #:	7369920	Issue Dt:	05/06/2008	Application #:	11387042	Filing Dt:	03/21/2006
Publication #:	US20070225870	Pub Dt:	09/27/2007
Title:	PRESSURE CONTROL SYSTEM WITH OPTIMIZED PERFORMANCE

Patent #:	7620516	Issue Dt:	11/17/2009	Application #:	11411005	Filing Dt:	04/25/2006
Publication #:	US20060259259	Pub Dt:	11/16/2006
Title:	VERSATILE SEMICONDUCTOR MANUFACTURING CONTROLLER WITH STATISTICALLY REPEATABLE RESPONSE TIMES

Patent #:	7376525	Issue Dt:	05/20/2008	Application #:	11431417	Filing Dt:	05/09/2006
Publication #:	US20070032970	Pub Dt:	02/08/2007
Title:	APPARATUS AND METHOD FOR ESTIMATION OF INITIAL PHASE OF A BRUSHLESS MOTOR

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100

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Assignors

MKS INSTRUMENTS, INC.

Exec Dt:

04/29/2016

NEWPORT CORPORATION

Exec Dt:

04/29/2016

Assignee

DEUTSCHE BANK AG NEW YORK BRANCH

60 WALL STREET

NEW YORK, NEW YORK 10005

Correspondence name and address
	CHRISTINE DIONNE C/O PAUL HASTINGS LLP
	200 PARK AVENUE
	NEW YORK, NY 10166

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