Patent Assignment Details
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| Reel/Frame: | 014526/0289 | |
| Pages: | 3 |
| | Recorded: | 09/19/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/28/2005
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Application #:
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10665934
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Filing Dt:
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09/19/2003
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Publication #:
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Pub Dt:
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03/24/2005
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Title:
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METHOD OF CONTROLLING CRITICAL DIMENSION MICROLOADING OF PHOTORESIST TRIMMING PROCESS BY SELECTIVE SIDEWALL POLYMER DEPOSITION
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Assignee
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT B. MULCHAY
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P.O. BOX 460-A
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PATENT COUNSEL
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SANTA CLARA, CA 95052
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