Patent Assignment Details
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| Reel/Frame: | 011672/0338 | |
| Pages: | 3 |
| | Recorded: | 03/16/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/01/2003
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Application #:
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09808929
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Filing Dt:
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03/16/2001
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Title:
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METHOD FOR IMPROVED CLEANING IN HDP-CVD PROCESS WITH REDUCED NF3 USAGE
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121 PARK AVENUE 3 |
| HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DRIVE
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POUGHKEEPSIE, NY 12603
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