Total properties:
23
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Patent #:
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Issue Dt:
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05/30/2000
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Application #:
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08891468
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Filing Dt:
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07/11/1997
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Title:
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COMPOSITION AND SLURRY USEFUL FOR METAL CMP
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Patent #:
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Issue Dt:
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10/03/2000
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Application #:
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08891649
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Filing Dt:
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07/11/1997
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
|
07/04/2000
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Application #:
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08901803
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Filing Dt:
|
07/28/1997
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Title:
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POLISHING COMPOSITION INCLUDING AN INHIBITOR OF TUNGSTEN ETCHING
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Patent #:
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Issue Dt:
|
10/30/2001
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Application #:
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08944036
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Filing Dt:
|
09/29/1997
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
|
02/10/2004
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Application #:
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08994894
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Filing Dt:
|
12/19/1997
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Title:
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COMPOSITION FOR OXIDE CMP
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Patent #:
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Issue Dt:
|
08/13/2002
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Application #:
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09040630
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Filing Dt:
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03/18/1998
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Publication #:
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Pub Dt:
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12/13/2001
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
|
05/16/2000
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Application #:
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09062327
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Filing Dt:
|
04/17/1998
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Title:
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POLISHING PAD FOR A SEMICONDUCTOR SUBSTRATE
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Patent #:
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|
Issue Dt:
|
01/23/2001
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Application #:
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09084630
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Filing Dt:
|
05/26/1998
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Title:
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CMP SLURRY CONTAINING A SOLID CATALYST
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Patent #:
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|
Issue Dt:
|
10/24/2000
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Application #:
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09086659
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Filing Dt:
|
05/29/1998
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Title:
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POLISHING COMPOSITION INCLUDING AN INHIBITOR OF TUNGSTEN ETCHING
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|
|
Patent #:
|
|
Issue Dt:
|
03/18/2003
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Application #:
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09105060
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Filing Dt:
|
06/26/1998
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Publication #:
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|
Pub Dt:
|
03/21/2002
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY AND METHOD FOR USING SAME
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|
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Patent #:
|
|
Issue Dt:
|
04/17/2001
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Application #:
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09105065
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Filing Dt:
|
06/26/1998
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER/TANTALUM SUBSTRATES
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Patent #:
|
|
Issue Dt:
|
05/16/2000
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Application #:
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09105555
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Filing Dt:
|
06/26/1998
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER/TANTALUM SUBSTRATE
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|
|
Patent #:
|
|
Issue Dt:
|
09/12/2000
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Application #:
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09113248
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Filing Dt:
|
07/10/1998
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Title:
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POLISHING PAD FOR A SEMICONDUCTOR SUBSTRATE
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|
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Patent #:
|
|
Issue Dt:
|
10/03/2000
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Application #:
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09114003
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Filing Dt:
|
07/10/1998
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Title:
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POLISHING PADS FOR A SEMICONDUCTOR SUBSTRATE
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|
|
Patent #:
|
|
Issue Dt:
|
07/15/2003
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Application #:
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09366588
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Filing Dt:
|
08/04/1999
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Publication #:
|
|
Pub Dt:
|
03/21/2002
| | | | |
Title:
|
CHEMICAL MECHANICAL POLISHING METHOD USEFUL FOR COPPER SUBSTRATES
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|
|
Patent #:
|
|
Issue Dt:
|
05/28/2002
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Application #:
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09405249
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Filing Dt:
|
09/27/1999
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Title:
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CLEANING SOLUTION FOR SEMICONDUCTOR SURFACES FOLLOWING CHEMICAL-MECHANICAL POLISHING
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|
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Patent #:
|
|
Issue Dt:
|
02/19/2002
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Application #:
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09425473
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Filing Dt:
|
10/22/1999
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Title:
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COMPOSITION AND METHOD FOR POLISHING RIGID DISKS
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|
|
Patent #:
|
|
Issue Dt:
|
02/26/2002
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Application #:
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09428965
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Filing Dt:
|
11/04/1999
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Publication #:
|
|
Pub Dt:
|
12/13/2001
| | | | |
Title:
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USE OF CSOH IN A DIELECTRIC CMP SLURRY
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|
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Patent #:
|
|
Issue Dt:
|
09/25/2001
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Application #:
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09440401
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Filing Dt:
|
11/15/1999
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Title:
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COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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|
|
Patent #:
|
|
Issue Dt:
|
11/20/2001
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Application #:
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09440525
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Filing Dt:
|
11/15/1999
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Title:
|
COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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|
|
Patent #:
|
|
Issue Dt:
|
03/26/2002
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Application #:
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09501221
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Filing Dt:
|
02/10/2000
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Title:
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Method for Polishing a Substrate Using a CMP Slurry
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|
|
Patent #:
|
|
Issue Dt:
|
11/13/2001
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Application #:
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09503996
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Filing Dt:
|
02/14/2000
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Title:
|
Method of polishing using multi-oxidizer slurry
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
09504058
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Filing Dt:
|
02/14/2000
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Publication #:
|
|
Pub Dt:
|
12/26/2002
| | | | |
Title:
|
Method of polishing a substrate
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|