Patent Assignment Details
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| Reel/Frame: | 009677/0420 | |
| Pages: | 4 |
| | Recorded: | 12/23/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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09220987
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Filing Dt:
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12/23/1998
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Title:
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METHOD FOR CALIBRATING OPTICAL SENSOR USED TO MEASURE THE
TEMPERATURE OF A SUBSTRATE DURING RAPID THERMAL PROCESS
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Assignees
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| 280-8, SUNGSU 2-GA, SUNGDONG-KU |
| SEOUL, KOREA, REPUBLIC OF 133-1 |
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| 1900 S. PRICE ROAD |
| CHANDLER, ARIZONA 85249 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON ET AL
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SERGE J. HODGSON
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CA 95110
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