Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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Reel/Frame: | 046267/0422 | |
| Pages: | 18 |
| | Recorded: | 07/05/2018 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
3
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Patent #:
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Issue Dt:
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02/05/2019
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Application #:
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16019942
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Filing Dt:
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06/27/2018
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Title:
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Method For Processing A Semiconductor Wafer Using Non-Contact Electrical Measurements Indicative Of At Least One Tip-To-Tip Short Or Leakage, At Least One Tip-To-Side Short Or Leakage, And At Least One Side-To-Side Short Or Leakage, Where Such Measurements Are Obtained From Cells With Respective Tip-To-Tip Short, Tip-To-Side Short, And Side-To-Side Short Test Areas, Using A Charged Particle-Beam Inspector With Beam Deflection To Account For Motion Of The Stage
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Patent #:
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Issue Dt:
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05/14/2019
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Application #:
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16024054
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Filing Dt:
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06/29/2018
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Title:
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Method For Processing A Semiconductor Wafer Using Non-Contact Electrical Measurements Indicative Of At Least One Tip-To-Tip Short Or Leakage, At Least One Via-Chamfer Short Or Leakage, And At Least One Corner Short Or Leakage, Where Such Measurements Are Obtained From Cells With Respective Tip-To-Tip Short, Via-Chamfer Short, And Corner Short Test Areas, Using A Charged Particle-Beam Inspector With Beam Deflection To Account For Motion Of The Stage
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Patent #:
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Issue Dt:
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02/05/2019
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Application #:
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16024856
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Filing Dt:
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06/30/2018
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Title:
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Method For Processing A Semiconductor Wafer Using Non-Contact Electrical Measurements Indicative Of At Least One Side-To-Side Short Or Leakage, At Least One Via-Chamfer Short Or Leakage, And At Least One Corner Short Or Leakage, Where Such Measurements Are Obtained From Cells With Respective Side-To-Side Short, Via-Chamfer Short, And Corner Short Test Areas, Using A Charged Particle-Beam Inspector With Beam Deflection To Account For Motion Of The Stage
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Assignee
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333 W. SAN CARLOS ST. |
STE 1000 |
SAN JOSE, CALIFORNIA 95110 |
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Correspondence name and address
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DAVID GARROD, PH.D., ESQ.
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711 IVY STREET
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PITTSBURGH, PA 15232
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