Patent Assignment Details
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| Reel/Frame: | 058069/0441 | |
| Pages: | 3 |
| | Recorded: | 11/10/2021 | | |
| Attorney Dkt #: | 9268-2US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/20/2024
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Application #:
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17256677
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Filing Dt:
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12/29/2020
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Publication #:
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Pub Dt:
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09/02/2021
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Title:
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DYNAMIC TEMPERATURE CONTROL OF SUBSTRATE SUPPORT IN SUBSTRATE PROCESSING SYSTEM
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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5445 CORPORATE DRIVE
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SUITE 200
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TROY, MI 48098
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05/23/2024 07:36 PM
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