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Patent #:
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Issue Dt:
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06/20/2006
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Application #:
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11008069
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Filing Dt:
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12/09/2004
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Publication #:
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Pub Dt:
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06/15/2006
| | | | |
Title:
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PRECURSORS FOR SILICA OR METAL SILICATE FILMS
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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11030503
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Filing Dt:
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01/06/2005
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Title:
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LOW DEFECTIVITY PRODUCT SLURRY FOR CMP AND ASSOCIATED PRODUCTION METHOD
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Patent #:
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Issue Dt:
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03/23/2010
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Application #:
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11050562
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Filing Dt:
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02/03/2005
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Publication #:
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Pub Dt:
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08/03/2006
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Title:
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AQUEOUS BASED RESIDUE REMOVERS COMPRISING FLUORIDE
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Patent #:
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Issue Dt:
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06/20/2006
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Application #:
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11051140
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Filing Dt:
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02/04/2005
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Title:
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ORGANOMETALLIC COMPLEXES AND THEIR USE AS PRECURSORS TO DEPOSIT METAL FILMS
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Patent #:
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Issue Dt:
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02/26/2008
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Application #:
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11104012
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Filing Dt:
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04/12/2005
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Publication #:
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Pub Dt:
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10/20/2005
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Title:
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CABINET FOR CHEMICAL DELIVERY WITH SOLVENT PURGING AND REMOVAL
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Patent #:
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Issue Dt:
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04/17/2007
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Application #:
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11111452
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Filing Dt:
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04/21/2005
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Publication #:
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Pub Dt:
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07/06/2006
| | | | |
Title:
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VOLATILE METAL BETA-KETOIMINATE AND METAL BETA-DIIMINATE COMPLEXES
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Patent #:
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Issue Dt:
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04/25/2006
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Application #:
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11111455
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Filing Dt:
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04/21/2005
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Title:
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VOLATILE METAL BETA-KETOIMINATE COMPLEXES
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Patent #:
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Issue Dt:
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09/04/2007
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Application #:
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11128515
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Filing Dt:
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05/13/2005
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Publication #:
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Pub Dt:
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11/16/2006
| | | | |
Title:
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ENHANCED PURGE EFFECT IN GAS CONDUIT
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Patent #:
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Issue Dt:
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01/25/2011
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Application #:
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11129862
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Filing Dt:
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05/16/2005
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Publication #:
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Pub Dt:
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11/16/2006
| | | | |
Title:
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PRECURSORS FOR CVD SILICON CARBO-NITRIDE AND SILICON NITRIDE FILMS
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Patent #:
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Issue Dt:
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01/08/2008
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Application #:
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11132315
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Filing Dt:
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05/19/2005
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Publication #:
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Pub Dt:
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11/24/2005
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Title:
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POLISHING METHOD TO REDUCE DISHING OF TUNGSTEN ON A DIELECTRIC
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Patent #:
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Issue Dt:
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07/31/2012
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Application #:
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11139950
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Filing Dt:
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05/27/2005
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Publication #:
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Pub Dt:
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10/06/2005
| | | | |
Title:
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AQUEOUS STRIPPING AND CLEANING COMPOSITION
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Patent #:
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Issue Dt:
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10/04/2011
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Application #:
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11155654
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Filing Dt:
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06/20/2005
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Publication #:
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Pub Dt:
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01/19/2006
| | | | |
Title:
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COMPOSITION FOR STRIPPING AND CLEANING AND USE THEREOF
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Patent #:
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Issue Dt:
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01/01/2008
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Application #:
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11194467
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Filing Dt:
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08/02/2005
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Publication #:
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Pub Dt:
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12/01/2005
| | | | |
Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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07/21/2009
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Application #:
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11208723
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Filing Dt:
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08/23/2005
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Publication #:
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Pub Dt:
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03/23/2006
| | | | |
Title:
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IONIC LIQUID BASED MIXTURES FOR GAS STORAGE AND DELIVERY
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Patent #:
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Issue Dt:
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04/07/2009
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Application #:
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11212628
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Filing Dt:
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08/29/2005
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Publication #:
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Pub Dt:
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03/02/2006
| | | | |
Title:
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CHEMICAL-MECHANICAL PLANARIZATION COMPOSITION HAVING BENZENESULFONIC ACID AND PER-COMPOUND OXIDIZING AGENTS, AND ASSOCIATED METHOD FOR USE
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Patent #:
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Issue Dt:
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02/19/2008
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Application #:
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11228223
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Filing Dt:
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09/19/2005
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Publication #:
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Pub Dt:
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04/13/2006
| | | | |
Title:
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POROUS LOW DIELECTRIC CONSTANT COMPOSITIONS AND METHODS FOR MAKING AND USING SAME
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Patent #:
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Issue Dt:
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02/01/2011
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Application #:
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11249207
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Filing Dt:
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10/13/2005
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Publication #:
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Pub Dt:
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04/19/2007
| | | | |
Title:
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AQUEOUS CLEANING COMPOSITION AND METHOD FOR USING SAME
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Patent #:
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Issue Dt:
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07/08/2014
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Application #:
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11250250
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Filing Dt:
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10/14/2005
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Publication #:
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Pub Dt:
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04/19/2007
| | | | |
Title:
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Aqueous cleaning composition for removing residues and method using same
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Patent #:
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Issue Dt:
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04/07/2009
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Application #:
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11264027
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Filing Dt:
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11/02/2005
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Publication #:
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Pub Dt:
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06/08/2006
| | | | |
Title:
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FREE RADICAL-FORMING ACTIVATOR ATTACHED TO SOLID AND USED TO ENHANCE CMP FORMULATIONS
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Patent #:
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Issue Dt:
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02/15/2011
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Application #:
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11313495
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Filing Dt:
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12/19/2005
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Publication #:
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Pub Dt:
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08/03/2006
| | | | |
Title:
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AQUEOUS BASED RESIDUE REMOVERS COMPRISING FLUORIDE
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Patent #:
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Issue Dt:
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05/19/2009
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Application #:
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11330815
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Filing Dt:
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01/12/2006
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Publication #:
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Pub Dt:
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07/12/2007
| | | | |
Title:
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PH BUFFERED AQUEOUS CLEANING COMPOSITION AND METHOD FOR REMOVING PHOTORESIST RESIDUE
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Patent #:
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Issue Dt:
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01/11/2011
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Application #:
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11340641
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Filing Dt:
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01/27/2006
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Publication #:
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Pub Dt:
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08/03/2006
| | | | |
Title:
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SYSTEM AND METHOD COMPRISING SAME FOR MEASUREMENT AND/OR ANALYSIS OF PARTICLES IN GAS STREAM
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Patent #:
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Issue Dt:
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01/27/2009
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Application #:
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11365290
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Filing Dt:
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03/01/2006
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Publication #:
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Pub Dt:
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09/06/2007
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Title:
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SELF-CONTAINED DISTILLATION PURIFIER/SUPERHEATER FOR LIQUID-FILL PRODUCT CONTAINER AND DELIVERY SYSTEMS
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Patent #:
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Issue Dt:
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01/13/2009
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Application #:
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11387934
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Filing Dt:
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03/24/2006
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Publication #:
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Pub Dt:
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11/30/2006
| | | | |
Title:
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DIHYDROXY ENOL COMPOUNDS USED IN CHEMICAL MECHANICAL POLISHING COMPOSITIONS HAVING METAL ION OXIDIZERS
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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11399322
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Filing Dt:
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04/07/2006
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Publication #:
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Pub Dt:
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10/19/2006
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Title:
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DUAL-FLOW VALVE AND INTERNAL PROCESSING VESSEL ISOLATION SYSTEM
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Patent #:
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Issue Dt:
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10/31/2006
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Application #:
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11436544
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Filing Dt:
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05/19/2006
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Publication #:
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Pub Dt:
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09/14/2006
| | | | |
Title:
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COMPOSITIONS SUBSTRATE FOR REMOVING ETCHING RESIDUE AND USE THEREOF
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Patent #:
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Issue Dt:
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01/25/2011
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Application #:
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11439554
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Filing Dt:
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05/23/2006
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Publication #:
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Pub Dt:
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11/29/2007
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Title:
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PROCESS FOR PRODUCING SILICON OXIDE FILMS FROM ORGANOAMINOSILANE PRECURSORS
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Patent #:
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Issue Dt:
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11/23/2010
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Application #:
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11450666
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Filing Dt:
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06/09/2006
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Publication #:
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Pub Dt:
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12/13/2007
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Title:
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PROCESS FOR SEPARATING COMPONENTS OF A MULTI-COMPONENT FEED STREAM
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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11452290
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Filing Dt:
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06/14/2006
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Publication #:
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Pub Dt:
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12/28/2006
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Title:
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COMPOSITION FOR REMOVAL OF RESIDUE COMPRISING CATIONIC SALTS AND METHODS USING SAME
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Patent #:
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Issue Dt:
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11/27/2007
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Application #:
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11484094
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Filing Dt:
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07/11/2006
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Publication #:
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Pub Dt:
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11/09/2006
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Title:
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STABILIZERS TO INHIBIT THE POLYMERIZATION OF SUBSTITUTED CYCLOTETRASILOXANE
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Patent #:
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Issue Dt:
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11/25/2008
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11494412
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07/27/2006
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Pub Dt:
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01/31/2008
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Title:
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COMPONENT HEATER
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Patent #:
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05/12/2009
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11496135
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07/31/2006
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Pub Dt:
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11/30/2006
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Title:
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ADDITIVES TO PREVENT DEGRADATION OF ALKYL-HYDROGEN SILOXANES
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10/30/2007
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11513950
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08/30/2006
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01/04/2007
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Title:
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PRECURSORS FOR DEPOSITING SILICON CONTAINING FILMS
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10/28/2008
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11514650
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09/01/2006
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03/06/2008
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Title:
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STABILIZATION OF NITROGEN-CONTAINING AND OXYGEN-CONTAINING ORGANOSILANES USING WEAKLY BASIC ION-EXCHANGE RESINS
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07/13/2010
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11522768
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09/18/2006
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04/12/2007
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Title:
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TI, TA, HF, ZR AND RELATED METAL SILICON AMIDES FOR ALD/CVD OF METAL-SILICON NITRIDES, OXIDES OR OXYNITRIDES
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01/13/2009
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11534336
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09/22/2006
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03/27/2008
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Title:
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ELECTRO-OPTIC DISPLAY AND MATERIALS FOR USE THEREIN
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11/11/2008
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11590029
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10/31/2006
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05/01/2008
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Title:
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LEAK CONTAINMENT APPARATUS FOR REACTIVE GASES
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03/09/2010
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11602662
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11/21/2006
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06/28/2007
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Title:
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FORMULATION FOR REMOVAL OF PHOTORESIST, ETCH RESIDUE AND BARC
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02/01/2011
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11652407
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01/11/2007
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07/17/2008
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Title:
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CLEANING COMPOSITION FOR SEMICONDUCTOR SUBSTRATES
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Issue Dt:
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09/20/2011
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11687947
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03/19/2007
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10/18/2007
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Title:
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METHOD AND APPARATUS FOR ACHIEVING MAXIMUM YIELD IN THE ELECTROLYTIC PREPARATION OF GROUP IV AND V HYDRIDES
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03/19/2013
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11693707
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03/29/2007
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02/14/2008
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Title:
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MATERIALS AND METHODS OF FORMING CONTROLLED VOID
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04/06/2010
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11700526
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01/31/2007
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07/31/2008
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Title:
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METHOD FOR IMMOBILIZING LIGANDS AND ORGANOMETALLIC COMPOUNDS ON SILICA SURFACE, AND THEIR APPLICATION IN CHEMICAL MECHANICAL PLANARIZATION
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05/24/2011
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11735603
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04/16/2007
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10/25/2007
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Title:
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METAL COMPLEXES OF POLYDENTATE BETA-KETOIMINATES
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10/16/2012
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11738699
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04/23/2007
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11/29/2007
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Title:
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COMPOSITION AND METHOD FOR PHOTORESIST REMOVAL
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06/23/2009
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11768395
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06/26/2007
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12/13/2007
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Title:
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ELECTRO-OPTIC DISPLAYS, AND MATERIALS FOR USE THEREIN
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03/30/2010
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11829150
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07/27/2007
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01/29/2009
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Title:
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SOFT INSERT GASKET
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08/18/2015
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11867171
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10/04/2007
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04/24/2008
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Solid Source Container With Inlet Plenum
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04/29/2014
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11939109
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11/13/2007
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06/19/2008
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SPLASHGUARD AND INLET DIFFUSER FOR HIGH VACUUM, HIGH FLOW BUBBLER VESSEL
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07/05/2011
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11944669
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11/26/2007
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05/28/2009
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DEVICES AND METHODS FOR PERFORMING INSPECTIONS, REPAIRS, AND/OR OTHER OPERATIONS WITHIN VESSELS
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12/29/2015
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11944788
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11/26/2007
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05/28/2009
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Vessels With Personnel Access Provisions
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04/06/2010
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11945678
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11/27/2007
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05/28/2009
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METAL COMPLEXES OF TRIDENTATE BETA-KETOIMINATES
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03/16/2010
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11949868
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12/04/2007
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06/19/2008
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CYCLIC CHEMICAL VAPOR DEPOSITION OF METAL-SILICON CONTAINING FILMS
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02/16/2010
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11970510
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01/07/2008
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08/07/2008
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QUATERNARY TRIFLUOROMETHYLCYCLOHEXANE DERIVATIVES FOR LIQUID CRYSTALS
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03/10/2009
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12023552
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01/31/2008
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08/21/2008
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Title:
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ACTIVATED CHEMICAL PROCESS FOR ENHANCING MATERIAL PROPERTIES OF DIELECTRIC FILMS
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06/28/2011
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12038409
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02/27/2008
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06/25/2009
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STABILIZERS FOR THE STABILIZATION OF UNSATURATED HYDROCARBON-BASED PRECURSOR
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03/30/2010
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12047655
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03/13/2008
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09/17/2009
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SEMI-AQUEOUS STRIPPING AND CLEANING COMPOSITION CONTAINING AMINOBENZENESULFONIC ACID
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04/20/2010
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12052806
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03/21/2008
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07/10/2008
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PROCESS FOR REMOVING CONTAMINANT FROM A SURFACE AND COMPOSITION USEFUL THEREFOR DESCRIPTION
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05/17/2011
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12115838
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05/06/2008
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Pub Dt:
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11/06/2008
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Title:
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POROGENS, POROGENATED PRECURSORS AND METHODS FOR USING THE SAME TO PROVIDE POROUS ORGANOSILICA GLASS FILMS WITH LOW DIELECTRIC CONSTANTS
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Patent #:
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Issue Dt:
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03/27/2012
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Application #:
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12126333
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Filing Dt:
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05/23/2008
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Publication #:
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Pub Dt:
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12/11/2008
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Title:
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LOW TEMPERATURE THERMAL CONDUCTIVE INKS
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Patent #:
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Issue Dt:
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05/14/2013
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Application #:
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12128381
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Filing Dt:
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05/28/2008
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Publication #:
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Pub Dt:
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06/25/2009
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Title:
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Stabilizers for the Stabilization of Unsaturated Hydrocarbon-based Precursor
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Patent #:
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Issue Dt:
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10/09/2012
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Application #:
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12139585
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Filing Dt:
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06/16/2008
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Publication #:
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Pub Dt:
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12/25/2008
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Title:
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PROCESS FOR SELECTIVELY DEPOSITING COPPER THIN FILMS ON SUBSTRATES WITH COPPER AND RUTHENIUM AREAS VIA VAPOR DEPOSITION
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Patent #:
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Issue Dt:
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03/06/2012
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Application #:
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12190125
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Filing Dt:
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08/12/2008
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Publication #:
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Pub Dt:
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02/18/2010
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Title:
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PRECURSORS FOR DEPOSITING SILICON-CONTAINING FILMS AND METHODS FOR MAKING AND USING SAME
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12213141
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Filing Dt:
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06/16/2008
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Publication #:
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Pub Dt:
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10/16/2008
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Title:
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Composition and method used for chemical mechanical planarization of metals
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Patent #:
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Issue Dt:
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05/25/2010
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Application #:
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12245196
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Filing Dt:
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10/03/2008
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Publication #:
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Pub Dt:
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05/28/2009
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Title:
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METAL COMPLEXES OF TRIDENTATE BETA-KETOIMINATES
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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12257950
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Filing Dt:
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10/24/2008
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Publication #:
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Pub Dt:
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04/29/2010
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Title:
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Polishing Slurry for Copper Films
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Patent #:
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Issue Dt:
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09/11/2012
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Application #:
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12258996
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Filing Dt:
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10/27/2008
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Publication #:
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Pub Dt:
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05/07/2009
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Title:
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COPPER PRECURSORS FOR THIN FILM DEPOSITION
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Patent #:
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Issue Dt:
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04/26/2011
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Application #:
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12262879
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Filing Dt:
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10/31/2008
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Publication #:
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Pub Dt:
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02/26/2009
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Title:
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MECHANICAL ENHANCEMENT OF DENSE AND POROUS ORGANOSILICATE MATERIALS BY UV EXPOSURE
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Patent #:
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Issue Dt:
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08/21/2012
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Application #:
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12266058
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Filing Dt:
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11/06/2008
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Publication #:
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Pub Dt:
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05/21/2009
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Title:
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GROUP 2 METAL PRECURSORS FOR DEPOSITING MULTI-COMPONENT METAL OXIDE FILMS
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Patent #:
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Issue Dt:
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04/26/2011
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Application #:
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12267790
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Filing Dt:
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11/10/2008
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Publication #:
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Pub Dt:
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03/12/2009
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Title:
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PRECURSORS FOR CVD SILICON CARBO-NITRIDE FILMS
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Patent #:
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Issue Dt:
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06/14/2011
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Application #:
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12272886
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Filing Dt:
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11/18/2008
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Publication #:
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Pub Dt:
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05/28/2009
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Title:
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TELLURIUM PRECURSORS FOR GST FILMS IN AN ALD OR CVD PROCESS
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Patent #:
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Issue Dt:
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02/08/2011
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Application #:
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12321730
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Filing Dt:
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01/22/2009
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Title:
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COMPOSITIONS FOR REMOVING RESIDUE FROM A SUBSTRATE AND USE THEREOF
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Patent #:
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Issue Dt:
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07/26/2011
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Application #:
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12351880
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Filing Dt:
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01/12/2009
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Publication #:
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Pub Dt:
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09/24/2009
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Title:
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ELECTRO-OPTIC DISPLAY AND MATERIALS FOR USE THEREIN
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Patent #:
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Issue Dt:
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02/14/2012
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Application #:
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12352700
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Filing Dt:
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01/13/2009
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Publication #:
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Pub Dt:
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12/17/2009
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Title:
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DIHYDROXY ENOL COMPOUNDS USED IN CHEMICAL MECHANICAL POLISHING COMPOSITIONS HAVING METAL ION OXIDIZERS
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Patent #:
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Issue Dt:
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11/27/2012
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Application #:
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12355325
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Filing Dt:
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01/16/2009
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Publication #:
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Pub Dt:
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07/30/2009
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Title:
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ANTIMONY PRECURSORS FOR GST FILMS IN ALD/CVD PROCESSES
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Patent #:
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Issue Dt:
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10/02/2012
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Application #:
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12360588
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Filing Dt:
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01/27/2009
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Publication #:
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Pub Dt:
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01/28/2010
| | | | |
Title:
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SELECTIVE ETCHING AND FORMATION OF XENON DIFLUORIDE
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Patent #:
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Issue Dt:
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01/22/2013
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Application #:
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12394183
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Filing Dt:
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02/27/2009
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Publication #:
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Pub Dt:
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09/10/2009
| | | | |
Title:
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STRIPPER FOR DRY FILM REMOVAL
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Patent #:
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Issue Dt:
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10/25/2011
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Application #:
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12406467
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Filing Dt:
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03/18/2009
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Publication #:
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Pub Dt:
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09/24/2009
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Title:
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ADHESION TO COPPER AND COPPER ELECTROMIGRATION RESISTANCE
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Patent #:
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Issue Dt:
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04/24/2012
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Application #:
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12407279
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Filing Dt:
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03/19/2009
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Publication #:
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Pub Dt:
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09/23/2010
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Title:
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SPLASHGUARD FOR HIGH FLOW VACUUM BUBBLER VESSEL
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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12410529
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Filing Dt:
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03/25/2009
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Publication #:
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Pub Dt:
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03/25/2010
| | | | |
Title:
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PREPARATION OF METAL OXIDE THIN FILM VIA CYCLIC CVD OR ALD
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Patent #:
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Issue Dt:
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12/01/2015
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Application #:
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12419619
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Filing Dt:
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04/07/2009
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Publication #:
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Pub Dt:
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10/22/2009
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Title:
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CHEMICAL-MECHANICAL PLANARIZATION COMPOSITION HAVING BENZENESULFONIC ACID AND PER-COMPOUND OXIDIZING AGENTS, AND ASSOCIATED METHOD FOR USE
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Patent #:
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Issue Dt:
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07/01/2014
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Application #:
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12425821
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Filing Dt:
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04/17/2009
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Publication #:
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Pub Dt:
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11/12/2009
| | | | |
Title:
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Binary and Ternary Metal Chalcogenide Materials and Method of Making and Using Same
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Patent #:
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Issue Dt:
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03/27/2012
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Application #:
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12431172
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Filing Dt:
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04/28/2009
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Publication #:
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Pub Dt:
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10/15/2009
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Title:
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COMPOSITIONS FOR CHEMICAL-MECHANICAL PLANARIZATION OF NOBLE-METAL-FEATURED SUBSTRATES, ASSOCIATED METHODS, AND SUBSTRATES PRODUCED BY SUCH METHODS
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Patent #:
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Issue Dt:
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08/23/2011
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Application #:
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12464922
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Filing Dt:
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05/13/2009
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Publication #:
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Pub Dt:
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02/25/2010
| | | | |
Title:
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CROSS PURGE VALVE AND CONTAINER ASSEMBLY
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Patent #:
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Issue Dt:
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05/08/2012
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Application #:
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12470002
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Filing Dt:
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05/21/2009
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Publication #:
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Pub Dt:
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12/03/2009
| | | | |
Title:
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PROCESS STABILITY OF NBDE USING SUBSTITUTED PHENOL STABILIZERS
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Patent #:
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Issue Dt:
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12/06/2016
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Application #:
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12474237
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Filing Dt:
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05/28/2009
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Publication #:
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Pub Dt:
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10/14/2010
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Title:
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Fixture Drying Apparatus and Method
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Patent #:
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Issue Dt:
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10/30/2012
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Application #:
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12476734
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Filing Dt:
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06/02/2009
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Publication #:
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Pub Dt:
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12/02/2010
| | | | |
Title:
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LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
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Patent #:
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Issue Dt:
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06/19/2012
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Application #:
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12493751
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Filing Dt:
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06/29/2009
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Publication #:
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Pub Dt:
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11/05/2009
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Title:
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IONIC LIQUID BASED MIXTURES FOR GAS STORAGE AND DELIVERY
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Patent #:
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Issue Dt:
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11/12/2013
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Application #:
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12499556
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Filing Dt:
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07/08/2009
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Publication #:
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Pub Dt:
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01/14/2010
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Title:
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PROCESS FOR INHIBITING CORROSION AND REMOVING CONTAMINANT FROM A SURFACE DURING WAFER DICING AND COMPOSITION USEFUL THEREFOR
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Patent #:
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Issue Dt:
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02/12/2013
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Application #:
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12504064
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Filing Dt:
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07/16/2009
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Publication #:
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Pub Dt:
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03/04/2010
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Title:
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SELECTIVE ETCHING OF SILICON DIOXIDE COMPOSITIONS
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Patent #:
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Issue Dt:
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11/20/2012
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12535192
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08/04/2009
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Pub Dt:
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07/08/2010
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Title:
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HIGH COORDINATION SPHERE GROUP 2 METAL B-DIKETIMINATE PRECURSORS
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Patent #:
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10/09/2012
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12540395
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08/13/2009
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02/18/2010
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Title:
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PROCESS FOR RESTORING DIELECTRIC PROPERTIES
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Patent #:
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03/06/2012
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12554052
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09/04/2009
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Pub Dt:
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03/18/2010
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Title:
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PROCESS AND SYSTEM FOR PROVIDING ACETYLENE
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11/12/2013
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12609542
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10/30/2009
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05/13/2010
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Title:
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Amino Vinylsilane Precursors for Stressed SiN Films
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Issue Dt:
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01/28/2014
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12623998
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11/23/2009
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06/03/2010
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Title:
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Dielectric Barrier Deposition Using Oxygen Containing Precursor
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Issue Dt:
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01/29/2013
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12624970
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11/24/2009
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Pub Dt:
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06/17/2010
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Title:
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WET CLEAN COMPOSITIONS FOR COWP AND POROUS DIELECTRICS
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Patent #:
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Issue Dt:
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06/25/2013
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Application #:
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12629416
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12/02/2009
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Publication #:
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Pub Dt:
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06/10/2010
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Title:
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PRECURSORS FOR DEPOSITING GROUP 4 METAL-CONTAINING FILMS
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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12630304
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12/03/2009
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Publication #:
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Pub Dt:
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06/24/2010
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Title:
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Combination, Method, and Composition for Chemical Mechanical Planarization of A Tungsten-Containing Substrate
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Patent #:
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Issue Dt:
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04/09/2013
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Application #:
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12632111
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12/07/2009
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Pub Dt:
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07/01/2010
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Title:
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METHOD AND COMPOSITION FOR CHEMICAL MECHANICAL PLANARIZATION OF A METAL
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Patent #:
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Issue Dt:
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08/28/2012
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Application #:
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12632918
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12/08/2009
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Publication #:
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Pub Dt:
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07/01/2010
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Title:
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METHOD AND COMPOSITION FOR CHEMICAL MECHANICAL PLANARIZATION OF A METAL OR A METAL ALLOY
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Patent #:
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Issue Dt:
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05/13/2014
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Application #:
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12702655
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02/09/2010
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Publication #:
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Pub Dt:
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02/17/2011
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Title:
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Method for Preparing Metal Complexes of Polydentate Beta-Ketoiminates
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