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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	012785/0457			Pages:	7
		Recorded:	04/08/2002
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 12

Patent #:	4977688	Issue Dt:	12/18/1990	Application #:	07427512	Filing Dt:	10/27/1989
Title:	VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL

Patent #:	5115576	Issue Dt:	05/26/1992	Application #:	07588169	Filing Dt:	09/26/1990
Title:	VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL

Patent #:	5315766	Issue Dt:	05/31/1994	Application #:	07888477	Filing Dt:	05/22/1992
Title:	VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL

Patent #:	5674123	Issue Dt:	10/07/1997	Application #:	08503677	Filing Dt:	07/18/1995
Title:	DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES

Patent #:	5815637	Issue Dt:	09/29/1998	Application #:	08645341	Filing Dt:	05/13/1996
Title:	HUMIDIFIER FOR CONTROL OF SEMI-CONDUCTOR MANUFACTURING ENVIRONMENTS

Patent #:	5879458	Issue Dt:	03/09/1999	Application #:	08713396	Filing Dt:	09/13/1996
Title:	MOLECULAR CONTAMINATION CONTROL SYSTEM

Patent #:	5848933	Issue Dt:	12/15/1998	Application #:	08916021	Filing Dt:	08/21/1997
Title:	DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES

Patent #:	6120371	Issue Dt:	09/19/2000	Application #:	09176476	Filing Dt:	10/21/1998
Title:	DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES

Patent #:	6042651	Issue Dt:	03/28/2000	Application #:	09240254	Filing Dt:	01/29/1999
Title:	MOLECULAR CONTAMINATION CONTROL SYSTEM

Patent #:	6221163	Issue Dt:	04/24/2001	Application #:	09460616	Filing Dt:	12/14/1999
Title:	MOLECULAR CONTAMINATION CONTROL SYSTEM

Patent #:	6168085	Issue Dt:	01/02/2001	Application #:	09461151	Filing Dt:	12/14/1999
Title:	SYSTEM AND METHOD FOR CASCADE CONTROL OF TEMPERATURE AND HUMIDITY FOR SEMI-CONDUCTOR MANUFACTURING ENVIRONMENTS

Patent #:	6368411	Issue Dt:	04/09/2002	Application #:	09790769	Filing Dt:	02/21/2001
Publication #:	US20010042439	Pub Dt:	11/22/2001
Title:	Molecular contamination control system

Assignor

Exec Dt:

02/27/2002

Assignee

48761 KATO ROAD

FREMONT, CALIFORNIA 94538

Correspondence name and address
	O'MELVENY & MYERS LLP
	MARK E. MILLER, ESQ.
	275 BATTERY STREET
	SAN FRANCISCO CA 94111-3305

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