Patent Assignment Details
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| Reel/Frame: | 013200/0500 | |
| Pages: | 4 |
| | Recorded: | 08/20/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10151722
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Filing Dt:
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05/20/2002
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Publication #:
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Pub Dt:
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11/20/2003
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Title:
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Stabilization of electronegative plasmas with feedback control of RF generator systems
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Assignee
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887-4610 |
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Correspondence name and address
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TESTA, HURWITZ & THIBEAULT, LLP
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JAMIE H. ROSE
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HIGH STREET TOWER
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125 HIGH STREET
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BOSTON, MA 02110
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05/27/2024 07:35 PM
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