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Patent #:
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Issue Dt:
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07/26/2011
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Application #:
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11856862
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Filing Dt:
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09/18/2007
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Publication #:
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Pub Dt:
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10/21/2010
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Title:
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ETCH-ENHANCED TECHNIQUE FOR LIFT-OFF PATTERNING
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Patent #:
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Issue Dt:
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12/07/2010
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Application #:
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11858687
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Filing Dt:
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09/20/2007
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Publication #:
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Pub Dt:
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04/10/2008
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Title:
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POLYMERIZATION TECHNIQUE TO ATTENUATE OXYGEN INHIBITION OF SOLIDIFICATION OF LIQUIDS AND COMPOSITION THEREFOR
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Patent #:
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Issue Dt:
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03/15/2011
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Application #:
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11943907
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Filing Dt:
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11/21/2007
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Publication #:
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Pub Dt:
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05/21/2009
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Title:
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METHOD OF CREATING A TEMPLATE EMPLOYING A LIFT-OFF PROCESS
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Patent #:
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Issue Dt:
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07/03/2012
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Application #:
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12026022
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Filing Dt:
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02/05/2008
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Publication #:
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Pub Dt:
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06/19/2008
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Title:
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SINGLE PHASE FLUID IMPRINT LITHOGRAPHY METHOD
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Patent #:
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Issue Dt:
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05/04/2010
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Application #:
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12026049
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Filing Dt:
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02/05/2008
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Publication #:
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Pub Dt:
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07/24/2008
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Title:
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CAPILLARY IMPRINTING TECHNIQUE
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Patent #:
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Issue Dt:
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12/17/2013
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Application #:
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12047572
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Filing Dt:
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03/13/2008
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Publication #:
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Pub Dt:
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06/26/2008
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Title:
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Methods for Exposure for the Purpose of Thermal Management for Imprint Lithography Processes
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Patent #:
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Issue Dt:
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03/27/2012
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Application #:
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12139911
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Filing Dt:
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06/16/2008
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Publication #:
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Pub Dt:
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12/18/2008
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Title:
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SOLVENT-ASSISTED LAYER FORMATION FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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11/23/2010
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Application #:
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12175258
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Filing Dt:
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07/17/2008
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Publication #:
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Pub Dt:
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01/29/2009
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Title:
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ALIGNMENT SYSTEM AND METHOD FOR A SUBSTRATE IN A NANO-IMPRINT PROCESS
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Patent #:
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Issue Dt:
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09/14/2010
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Application #:
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12182905
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Filing Dt:
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07/30/2008
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Publication #:
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Pub Dt:
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02/05/2009
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Title:
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SELF-ALIGNED CROSS-POINT MEMORY FABRICATION
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Patent #:
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Issue Dt:
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02/21/2012
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Application #:
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12262669
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Filing Dt:
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10/31/2008
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Publication #:
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Pub Dt:
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05/07/2009
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Title:
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DROP PATTERN GENERATION FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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10/03/2017
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Application #:
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12275998
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Filing Dt:
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11/21/2008
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Publication #:
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Pub Dt:
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06/04/2009
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Title:
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POROUS TEMPLATE AND IMPRINTING STACK FOR NANO-IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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09/30/2014
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Application #:
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12326709
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Filing Dt:
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12/02/2008
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Publication #:
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Pub Dt:
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06/18/2009
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Title:
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ULTRA-THIN POLYMERIC ADHESION LAYER
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Patent #:
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Issue Dt:
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02/03/2015
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Application #:
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12327618
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Filing Dt:
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12/03/2008
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Publication #:
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Pub Dt:
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06/04/2009
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Title:
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High Throughput Imprint Based on Contact Line Motion Tracking Control
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Patent #:
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Issue Dt:
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03/27/2012
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Application #:
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12336821
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Filing Dt:
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12/17/2008
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Publication #:
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Pub Dt:
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05/28/2009
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Title:
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AN IMPRINT LITHOGRAPHY METHOD
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Patent #:
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Issue Dt:
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09/06/2011
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Application #:
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12344100
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Filing Dt:
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12/24/2008
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Publication #:
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Pub Dt:
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07/02/2009
| | | | |
Title:
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TEMPLATE PATTERN DENSITY DOUBLING
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Patent #:
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Issue Dt:
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04/26/2016
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Application #:
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12364979
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Filing Dt:
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02/03/2009
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Publication #:
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Pub Dt:
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08/06/2009
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Title:
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Controlling Template Surface Composition in Nano-Imprint Lithography
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Patent #:
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Issue Dt:
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01/29/2013
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Application #:
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12367079
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Filing Dt:
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02/06/2009
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Publication #:
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Pub Dt:
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08/13/2009
| | | | |
Title:
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EXTRUSION REDUCTION IN IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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08/31/2010
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Application #:
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12389673
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Filing Dt:
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02/20/2009
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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ENHANCED MULTI CHANNEL ALIGNMENT
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Patent #:
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Issue Dt:
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10/19/2010
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Application #:
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12392663
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Filing Dt:
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02/25/2009
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Publication #:
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Pub Dt:
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08/27/2009
| | | | |
Title:
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REAL TIME IMPRINT PROCESS DIAGNOSTICS FOR DEFECTS
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Patent #:
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Issue Dt:
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04/10/2012
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Application #:
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12404024
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Filing Dt:
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03/13/2009
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Publication #:
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Pub Dt:
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11/05/2009
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Title:
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COMPOSITION TO REDUCE ADHESION BETWEEN A CONFORMABLE REGION AND A MOLD
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Patent #:
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Issue Dt:
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05/29/2012
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Application #:
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12415563
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Filing Dt:
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03/31/2009
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Publication #:
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Pub Dt:
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10/01/2009
| | | | |
Title:
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LARGE AREA ROLL-TO-ROLL IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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12430428
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Filing Dt:
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04/27/2009
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Publication #:
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Pub Dt:
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08/13/2009
| | | | |
Title:
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FULL-WAFER OR LARGE AREA IMPRINTING WITH MULTIPLE SEPARATED SUB-FIELDS FOR HIGH THROUGHPUT LITHOGRAPHY
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Patent #:
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Issue Dt:
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09/06/2011
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Application #:
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12464487
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Filing Dt:
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05/12/2009
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Publication #:
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Pub Dt:
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10/08/2009
| | | | |
Title:
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TEMPLATE HAVING ALIGNMENT MARKS FORMED OF CONTRAST MATERIAL
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Patent #:
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Issue Dt:
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05/03/2011
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Application #:
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12479437
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Filing Dt:
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06/05/2009
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Publication #:
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Pub Dt:
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11/19/2009
| | | | |
Title:
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IMPRINTING OF PARTIAL FIELDS AT THE EDGE OF THE WAFER
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Patent #:
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Issue Dt:
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09/20/2011
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Application #:
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12488642
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Filing Dt:
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06/22/2009
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Publication #:
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Pub Dt:
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10/15/2009
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Title:
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PRESERVING FILLED FEATURES WHEN VACUUM WIPING
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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12511593
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Filing Dt:
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07/29/2009
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Publication #:
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Pub Dt:
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04/15/2010
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Title:
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ENERGY SOURCES FOR CURING IN AN IMPRINT LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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01/14/2014
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Application #:
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12553645
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Filing Dt:
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09/03/2009
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Publication #:
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Pub Dt:
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04/29/2010
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Title:
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Misalignment Management
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Patent #:
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Issue Dt:
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06/25/2013
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Application #:
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12572838
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Filing Dt:
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10/02/2009
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Publication #:
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Pub Dt:
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04/08/2010
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Title:
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NANO-IMPRINT LITHOGRAPHY TEMPLATES
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Patent #:
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Issue Dt:
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03/27/2012
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Application #:
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12575907
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Filing Dt:
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10/08/2009
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Publication #:
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Pub Dt:
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04/22/2010
| | | | |
Title:
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IMPRINT LITHOGRAPHY SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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02/01/2011
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Application #:
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12576030
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Filing Dt:
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10/08/2009
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Publication #:
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Pub Dt:
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02/18/2010
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Title:
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INTERFEROMETRIC ANALYSIS METHOD FOR THE MANUFACTURE OF NANO-SCALE DEVICES
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Patent #:
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Issue Dt:
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01/01/2013
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12580324
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Filing Dt:
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10/16/2009
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Pub Dt:
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04/29/2010
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Title:
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OPTICAL SYSTEM FOR USE IN STAGE CONTROL
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Patent #:
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Issue Dt:
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08/20/2013
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12580813
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10/16/2009
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Pub Dt:
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04/22/2010
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Title:
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Drop Pattern Generation with Edge Weighting
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12/13/2011
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12581236
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10/19/2009
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04/22/2010
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Title:
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REDUCTION OF STRESS DURING TEMPLATE SEPARATION
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04/09/2013
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12581634
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10/19/2009
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Pub Dt:
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04/22/2010
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Title:
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NANO-IMPRINT LITHOGRAPHY STACK WITH ENHANCED ADHESION BETWEEN SILICON-CONTAINING AND NON-SILICON CONTAINING LAYERS
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Issue Dt:
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07/09/2013
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12582041
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10/20/2009
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Pub Dt:
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04/22/2010
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Title:
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FLUID DISPENSE DEVICE CALIBRATION
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07/10/2012
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12582091
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10/20/2009
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Pub Dt:
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03/25/2010
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Title:
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IMPRINT LITHOGRAPHY SYSTEM AND METHOD
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11/13/2012
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12603270
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10/21/2009
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05/06/2010
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Title:
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SEPARATION IN AN IMPRINT LITHOGRAPHY PROCESS
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NONE
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12603819
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10/22/2009
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Pub Dt:
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04/29/2010
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FLUID TRANSPORT AND DISPENSING
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02/18/2014
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12604517
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10/23/2009
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Pub Dt:
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04/29/2010
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Title:
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STRAIN AND KINETICS CONTROL DURING SEPARATION PHASE OF IMPRINT PROCESS
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Patent #:
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11/04/2014
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12604866
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10/23/2009
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Pub Dt:
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04/29/2010
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Title:
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Imprint Lithography Template
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01/25/2011
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12605848
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Filing Dt:
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10/26/2009
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Pub Dt:
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02/18/2010
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Title:
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TEMPLATE HAVING A SILICON NITRIDE, SILICON CARBIDE OR SILICON OXYNITRIDE FILM
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04/30/2013
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12606274
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10/27/2009
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Pub Dt:
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05/06/2010
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Title:
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ALIGNMENT FOR EDGE FIELD NANO-IMPRINTING
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Patent #:
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Issue Dt:
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01/29/2013
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12606588
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10/27/2009
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Pub Dt:
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05/06/2010
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Title:
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FACILITATING ADHESION BETWEEN SUBSTRATE AND PATTERNED LAYER
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Patent #:
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Issue Dt:
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09/01/2015
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12607564
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10/28/2009
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Pub Dt:
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05/06/2010
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Title:
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Master Template Replication
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07/31/2012
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12610714
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11/02/2009
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Pub Dt:
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05/06/2010
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Title:
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SUBSTRATE ALIGNMENT
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10/11/2011
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12616349
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11/11/2009
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03/11/2010
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Title:
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CHUCKING SYSTEM COMPRISING AN ARRAY OF FLUID CHAMBERS
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09/10/2013
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12616896
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11/12/2009
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05/13/2010
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Large Area Patterning of Nano-Sized Shapes
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02/07/2012
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12684538
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01/08/2010
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05/06/2010
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Title:
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DOUBLE-SIDED NANO-IMPRINT LITHOGRAPHY SYSTEM
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02/07/2012
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12686732
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01/13/2010
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05/27/2010
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Title:
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METHOD AND SYSTEM FOR DOUBLE-SIDED PATTERNING OF SUBSTRATES
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04/26/2011
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12688190
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01/15/2010
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05/13/2010
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Title:
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METHOD TO CONTROL AN ATMOSPHERE BETWEEN A BODY AND A SUBSTRATE
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12/28/2010
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12689773
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01/19/2010
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06/10/2010
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POSITIVE TONE BI-LAYER METHOD
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10/09/2012
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12707345
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02/17/2010
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06/10/2010
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METHOD FOR EXPELLING GAS POSITIONED BETWEEN A SUBSTRATE AND A MOLD
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03/22/2011
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12707365
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02/17/2010
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06/10/2010
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Title:
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CAPILLARY IMPRINTING TECHNIQUE
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02/28/2012
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12717664
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03/04/2010
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07/08/2010
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Title:
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CONFORMING TEMPLATE FOR PATTERNING LIQUIDS DISPOSED ON SUBSTRATES
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11/29/2011
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12749552
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03/30/2010
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07/22/2010
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FORMING A LAYER ON A SUBSTRATE
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11/19/2013
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12753239
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04/02/2010
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Publication #:
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Pub Dt:
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12/02/2010
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Title:
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SYSTEM AND METHOD FOR MODEL CHECKING BY INTERLEAVING STATELESS AND STATE-BASED METHODS
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05/17/2011
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12762658
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04/19/2010
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08/12/2010
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Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY PROCESSES
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Issue Dt:
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10/20/2015
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12817787
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06/17/2010
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Pub Dt:
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12/23/2010
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Title:
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DUAL ZONE TEMPLATE CHUCK
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12/16/2014
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12828498
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07/01/2010
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01/06/2011
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Title:
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CHUCKING SYSTEM WITH RECESSED SUPPORT FEATURE
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02/11/2014
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12835009
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07/13/2010
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Pub Dt:
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11/11/2010
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Title:
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Residual Layer Thickness Measurement and Correction
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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12835181
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Filing Dt:
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07/13/2010
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Publication #:
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Pub Dt:
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11/04/2010
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Title:
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IMPRINT ALIGNMENT METHOD, SYSTEM AND TEMPLATE
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Patent #:
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Issue Dt:
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02/24/2015
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Application #:
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12854359
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Filing Dt:
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08/11/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Title:
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FUNCTIONAL NANOPARTICLES
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Patent #:
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Issue Dt:
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10/11/2011
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Application #:
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12883930
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Filing Dt:
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09/16/2010
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Publication #:
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Pub Dt:
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01/20/2011
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Title:
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CHUCKING SYSTEM FOR NANO-MANUFACTURING
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Patent #:
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Issue Dt:
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09/18/2012
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Application #:
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12905192
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Filing Dt:
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10/15/2010
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Publication #:
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Pub Dt:
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02/10/2011
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Title:
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IMPRINT LITHOGRAPHY METHOD
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Patent #:
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Issue Dt:
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04/03/2012
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Application #:
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12906742
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Filing Dt:
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10/18/2010
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Publication #:
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Pub Dt:
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02/03/2011
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Title:
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ALIGNMENT SYSTEM AND METHOD FOR A SUBSTRATE IN A NANO-IMPRINT PROCESS
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Patent #:
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Issue Dt:
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03/05/2013
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Application #:
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12942652
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Filing Dt:
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11/09/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Title:
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METHOD AND SYSTEM TO CONTROL MOVEMENT OF A BODY FOR NANO-SCALE MANUFACTURING
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Patent #:
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Issue Dt:
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05/24/2011
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Application #:
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12946063
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Filing Dt:
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11/15/2010
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Publication #:
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Pub Dt:
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03/10/2011
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Title:
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POSITIVE TONE BI-LAYER METHOD
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12954376
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Filing Dt:
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11/24/2010
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Publication #:
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Pub Dt:
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07/07/2011
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Title:
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ADHESION LAYERS IN NANOIMPRINT LITHOGRAHY
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12987196
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Filing Dt:
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01/10/2011
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Publication #:
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Pub Dt:
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07/28/2011
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Title:
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SYSTEMS AND METHODS FOR SUBSTRATE FORMATION
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Patent #:
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Issue Dt:
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12/31/2013
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Application #:
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13014354
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Filing Dt:
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01/26/2011
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Publication #:
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Pub Dt:
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07/28/2011
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Title:
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Micro-Conformal Templates for Nanoimprint Lithography
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Patent #:
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Issue Dt:
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03/17/2015
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Application #:
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13014508
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Filing Dt:
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01/26/2011
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Publication #:
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Pub Dt:
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07/28/2011
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Title:
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METHODS AND SYSTEMS OF MATERIAL REMOVAL AND PATTERN TRANSFER
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Patent #:
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Issue Dt:
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04/08/2014
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Application #:
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13015379
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Filing Dt:
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01/27/2011
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Publication #:
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Pub Dt:
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07/28/2011
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Title:
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ROLL-TO-ROLL IMPRINT LITHOGRAPHY AND PURGING SYSTEM
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Patent #:
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Issue Dt:
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08/12/2014
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Application #:
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13017259
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Filing Dt:
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01/31/2011
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Publication #:
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Pub Dt:
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04/10/2014
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Title:
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NANOIMPRINT LITHOGRAPHY PROCESSES FOR FORMING NANOPARTICLES
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Patent #:
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Issue Dt:
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11/15/2011
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Application #:
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13028336
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Filing Dt:
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02/16/2011
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Publication #:
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Pub Dt:
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06/16/2011
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Title:
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CAPILLARY IMPRINTING TECHNIQUE
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Patent #:
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Issue Dt:
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10/15/2013
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Application #:
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13073533
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Filing Dt:
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03/28/2011
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Publication #:
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Pub Dt:
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07/14/2011
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Title:
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Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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13095514
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Filing Dt:
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04/27/2011
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Publication #:
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Pub Dt:
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10/27/2011
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Title:
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SAFE SEPARATION FOR NANO IMPRINTING
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Patent #:
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Issue Dt:
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10/21/2014
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Application #:
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13098959
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Filing Dt:
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05/02/2011
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Publication #:
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Pub Dt:
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09/01/2011
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Title:
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IMPRINTING OF PARTIAL FIELDS AT THE EDGE OF THE WAFER
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Patent #:
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Issue Dt:
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06/30/2015
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Application #:
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13105422
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Filing Dt:
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05/11/2011
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Publication #:
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Pub Dt:
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11/17/2011
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Title:
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NANOSTRUCTURED SOLAR CELL
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13105695
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Filing Dt:
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05/11/2011
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Publication #:
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Pub Dt:
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11/17/2011
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Title:
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BACKSIDE CONTACT SOLAR CELL
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13106407
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Filing Dt:
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05/12/2011
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Publication #:
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Pub Dt:
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09/08/2011
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Title:
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Reducing Adhesion between a Conformable Region and a Mold
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Patent #:
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Issue Dt:
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11/27/2012
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Application #:
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13108614
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Filing Dt:
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05/16/2011
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Publication #:
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Pub Dt:
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09/15/2011
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Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY PROCESS
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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13172350
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Filing Dt:
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06/29/2011
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Publication #:
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Pub Dt:
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10/20/2011
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Title:
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LOW-K DIELECTRIC FUNCTIONAL IMPRINTING MATERIALS
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Patent #:
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Issue Dt:
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09/24/2013
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Application #:
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13178057
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Filing Dt:
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07/07/2011
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Publication #:
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Pub Dt:
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01/12/2012
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Title:
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ENHANCED DENSIFICATION OF SILICON OXIDE LAYERS
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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13178268
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Filing Dt:
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07/07/2011
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Publication #:
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Pub Dt:
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01/12/2012
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Title:
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CONTAMINATE DETECTION AND SUBSTRATE CLEANING
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Patent #:
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Issue Dt:
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01/28/2014
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Application #:
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13226635
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Filing Dt:
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09/07/2011
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Publication #:
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Pub Dt:
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12/29/2011
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Title:
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RELEASE AGENT PARTITION CONTROL IN IMPRINT LITHOGRAPHY
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13227205
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Filing Dt:
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09/07/2011
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Publication #:
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Pub Dt:
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03/08/2012
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Title:
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METHODS OF CLEANING HARD DRIVE DISK SUBSTRATES FOR NANOIMPRINT LITHOGRAPHY
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13228298
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Filing Dt:
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09/08/2011
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Publication #:
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Pub Dt:
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03/22/2012
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Title:
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Vapor Delivery System For Use in Imprint Lithography
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Patent #:
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Issue Dt:
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01/20/2015
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Application #:
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13245288
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Filing Dt:
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09/26/2011
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Publication #:
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Pub Dt:
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03/29/2012
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Title:
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High Contrast Alignment Marks Through Multiple Stage Imprinting
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Patent #:
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Issue Dt:
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12/23/2014
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Application #:
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13289601
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Filing Dt:
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11/04/2011
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Publication #:
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Pub Dt:
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05/10/2012
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Title:
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NANOIMPRINT LITHOGRAPHY FORMATION OF FUNCTIONAL NANOPARTICLES USING DUAL RELEASE LAYERS
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Patent #:
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Issue Dt:
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09/09/2014
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Application #:
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13290770
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Filing Dt:
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11/07/2011
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Publication #:
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Pub Dt:
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05/10/2012
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Title:
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PATTERNING OF NON-CONVEX SHAPED NANOSTRUCTURES
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Patent #:
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Issue Dt:
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08/20/2013
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Application #:
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13352824
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Filing Dt:
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01/18/2012
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Publication #:
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Pub Dt:
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05/10/2012
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Title:
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TEMPLATE PILLAR FORMATION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13398442
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Filing Dt:
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02/16/2012
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Publication #:
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Pub Dt:
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08/23/2012
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Title:
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High Aspect Ratio Patterning of Silicon
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Patent #:
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Issue Dt:
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10/01/2013
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Application #:
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13441500
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Filing Dt:
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04/06/2012
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Publication #:
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Pub Dt:
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07/26/2012
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Title:
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CRITICAL DIMENSION CONTROL DURING TEMPLATE FORMATION
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Patent #:
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Issue Dt:
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02/04/2014
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Application #:
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13446364
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Filing Dt:
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04/13/2012
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Publication #:
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Pub Dt:
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08/09/2012
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Title:
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PHOTOCATALYTIC REACTIONS IN NANO-IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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13455966
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Filing Dt:
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04/25/2012
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Publication #:
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Pub Dt:
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10/25/2012
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Title:
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Optically Absorptive Material for Alignment Marks
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13546622
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Filing Dt:
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07/11/2012
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Publication #:
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Pub Dt:
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11/15/2012
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Title:
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REDUCED RESIDUAL FORMATION IN ETCHED MULTI-LAYER STACKS
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Patent #:
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Issue Dt:
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09/27/2016
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Application #:
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13720315
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Filing Dt:
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12/19/2012
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Publication #:
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Pub Dt:
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06/20/2013
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Title:
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FABRICATION OF SEAMLESS LARGE AREA MASTER TEMPLATES FOR IMPRINT LITHOGRAPHY USING STEP AND REPEAT TOOLS
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Patent #:
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Issue Dt:
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02/04/2014
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Application #:
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13743772
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Filing Dt:
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01/17/2013
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Publication #:
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Pub Dt:
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09/19/2013
| | | | |
Title:
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EXTRUSION REDUCTION IN IMPRINT LITHOGRAPHY
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13754015
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Filing Dt:
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01/30/2013
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Publication #:
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Pub Dt:
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07/31/2014
| | | | |
Title:
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Fabrication of High-Throughput Nano-Imprint Lithography Templates
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Patent #:
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Issue Dt:
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04/11/2017
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Application #:
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13773217
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Filing Dt:
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02/21/2013
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Publication #:
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Pub Dt:
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08/22/2013
| | | | |
Title:
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LARGE AREA IMPRINT LITHOGRAPHY
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