Patent Assignment Details
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| Reel/Frame: | 046185/0571 | |
| Pages: | 7 |
| | Recorded: | 06/23/2018 | | |
| Attorney Dkt #: | 205948-7064US1 (00269) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/19/2019
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Application #:
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15893054
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Filing Dt:
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02/09/2018
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Publication #:
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Pub Dt:
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08/09/2018
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Title:
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ATOMIC LAYER ETCHING PROCESSES USING SEQUENTIAL, SELF-LIMITING THERMAL REACTIONS COMPRISING OXIDATION AND FLUORINATION
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Assignee
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| 1800 GRANT STREET |
| 8TH FLOOR |
| DENVER, COLORADO 80203 |
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Correspondence name and address
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DOMINGOS J. SILVA
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SAUL EWING ARNSTEIN & LEHR LLP
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1500 MARKET STREET, 38TH FLOOR
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PHILADELPHIA, PA 19102
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