Patent Assignment Details
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| Reel/Frame: | 013141/0584 | |
| Pages: | 3 |
| | Recorded: | 07/19/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/11/2004
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Application #:
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10199789
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Filing Dt:
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07/19/2002
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Publication #:
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Pub Dt:
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01/22/2004
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Title:
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FEEDBACK METHOD UTILIZING LITHOGRAPHIC EXPOSURE FIELD DIMENSIONS TO PREDICT PROCESS TOOL OVERLAY SETTINGS
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Assignee
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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MCGINN & GIBB, PLLC
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FREDERICK W. GIBB, III
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2568-A RIVA RD., STE. 304
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ANNAPOLIS, MD 21401
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