Patent Assignment Details
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| Reel/Frame: | 012187/0686 | |
| Pages: | 4 |
| | Recorded: | 09/24/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09671928
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Filing Dt:
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09/27/2000
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Title:
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Apparatus for high-resolution in-situ plasma etching of inorganic and metal films
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Assignee
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| 4311 JAMBOREE ROAD |
| NEWPORT BEACH, CALIFORNIA 92660 |
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Correspondence name and address
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THOMAS, KAYDEN, HORSTEMEYER ET AL
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SCOTT A. HORSTEMEYER
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100 GALLERIA PARKWAY, SUITE 1750
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ATLANTA, GEORGIA 30339-5948
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