Patent Assignment Details
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Reel/Frame: | 014989/0711 | |
| Pages: | 2 |
| | Recorded: | 02/17/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10321341
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Filing Dt:
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12/16/2002
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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Fluoride in supercritical fluid for photoresist and residue removal
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Assignee
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AKASAKA 5-CHOME, MINATU-KU |
TOKYO 107-848, JAPAN |
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Correspondence name and address
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HAVERSTOCK & OWENS LLP
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THOMAS B. HAVERSTOCK
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162 NORTH WOLFE ROAD
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SUNNYVALE, CALIFORNIA 94086
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