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Patent #:
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Issue Dt:
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06/10/1997
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Application #:
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08439349
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Filing Dt:
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05/11/1995
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Title:
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CHEMICAL VAPOR DEPOSITION (CVD) OF SILICON DIOXIDE FILMS USING OXYGEN- SILICON SOURCE REACTANTS AND A FREE RADICAL PROMOTER
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Patent #:
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Issue Dt:
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03/05/1996
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Application #:
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08446435
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Filing Dt:
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05/22/1995
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Title:
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ORGANIC STRIPPING COMPOSITION
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Patent #:
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Issue Dt:
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03/25/1997
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Application #:
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08454775
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Filing Dt:
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05/31/1995
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Title:
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METHOD FOR THE GROWTH OF INDUSTRIAL CRYSTALS
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Patent #:
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Issue Dt:
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07/16/1996
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Application #:
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08475111
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Filing Dt:
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06/07/1995
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Title:
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ADSORBENT FOR REMOVAL OF TRACE OXYGEN FROM INERT GASES
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08502508
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Filing Dt:
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07/13/1995
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Title:
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NONFUNCTIONALIZED POLY(ARYLENE ETHERS)
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Patent #:
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Issue Dt:
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08/19/1997
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Application #:
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08502511
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Filing Dt:
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07/13/1995
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Title:
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NONFUNCTIONALIZED POLY(ARYLENE ETHER) DIELECTRICS
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Patent #:
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Issue Dt:
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06/10/1997
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Application #:
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08593779
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Filing Dt:
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01/30/1996
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Title:
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PROCESS FOR NITROGEN TRIFLUORIDE SYNTHESIS
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Patent #:
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Issue Dt:
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03/18/1997
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Application #:
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08601627
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Filing Dt:
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02/14/1996
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Title:
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ENHANCED SENSITIVITY FOR OXYGEN AND OTHER INTERACTIVE GASES IN SAMPLE GASES USING GAS CHROMATOGRAPHY
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Patent #:
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Issue Dt:
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05/06/1997
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Application #:
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08645439
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Filing Dt:
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05/13/1996
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Title:
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PLASMA ETCH WITH TRIFLUOROACETIC ACID AND DERIVATIVES
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Patent #:
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Issue Dt:
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07/08/1997
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Application #:
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08651311
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Filing Dt:
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05/22/1996
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Title:
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ULTRA HIGH PURITY DELIVERY SYSTEM FOR LIQUEFIED COMPRESSED GASES
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Patent #:
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Issue Dt:
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03/31/1998
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Application #:
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08667132
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Filing Dt:
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06/20/1996
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Title:
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SURFACTANTS FOR HETEROGENEOUS PROCESSES IN LIQUID OR SUPERCRITICAL CO2
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Patent #:
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Issue Dt:
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09/23/1997
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Application #:
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08667254
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Filing Dt:
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06/20/1996
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Title:
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PROCESS FOR IMPROVED QUALITY OF CVD COPPER FILMS
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Patent #:
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Issue Dt:
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04/28/1998
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Application #:
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08678277
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Filing Dt:
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07/11/1996
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Title:
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LOW TEMPERATURE DEPOSITION OF SILICON DIOXIDE USING ORGANOSILANES
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Patent #:
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Issue Dt:
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03/24/1998
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Application #:
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08741843
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Filing Dt:
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10/31/1996
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Title:
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FLUOROCHEMICAL RECOVERY AND RECYCLE USING MEMBRANES
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Patent #:
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Issue Dt:
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01/20/1998
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Application #:
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08744013
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Filing Dt:
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11/05/1996
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Title:
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BASIC STRIPPING AND CLEANING COMPOSITION
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Patent #:
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Issue Dt:
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12/16/1997
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Application #:
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08745754
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Filing Dt:
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11/08/1996
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Title:
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STRIPPING AND CLEANING COMPOSITION
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Patent #:
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Issue Dt:
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07/20/1999
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Application #:
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08761563
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Filing Dt:
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12/06/1996
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Title:
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METHOD AND APPARATUS FOR CONSTANT COMPOSITION DELIVERY OF HYDRIDE GASES FOR SEMICONDUCTOR PROCESSING
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08789229
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Filing Dt:
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01/24/1997
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Title:
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POLISH PROCESS AND SLURRY FOR PLANARIZATION
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Patent #:
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Issue Dt:
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05/19/1998
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Application #:
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08821484
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Filing Dt:
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03/21/1997
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Title:
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METHOD FOR THE GROWTH OF INDUSTRIAL CRYSTALS
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Patent #:
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Issue Dt:
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07/27/1999
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Application #:
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08855880
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Filing Dt:
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05/12/1997
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Title:
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AQUEOUS STRIPPING AND CLEANING COMPOSITIONS CONTAINING HYDROXYLAMINE AND USE THEREOF
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Patent #:
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Issue Dt:
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05/11/1999
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Application #:
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08858800
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Filing Dt:
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05/20/1997
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Title:
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PURIFICATION OF ORGANOSILANES OF GROUP 13 (IIIA) AND 15 (VA) IMPURITIES
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Patent #:
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Issue Dt:
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01/26/1999
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Application #:
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08891313
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Filing Dt:
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07/10/1997
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Title:
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GAS DISSOLUTION UNDER PRESSURE
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Patent #:
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Issue Dt:
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04/06/1999
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Application #:
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08911076
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Filing Dt:
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08/14/1997
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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08914085
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Filing Dt:
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08/18/1997
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Title:
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ABATEMENT OF NF3 USING SMALL PARTICLE FLUIDIZED BED
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Patent #:
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Issue Dt:
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01/12/1999
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Application #:
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08937407
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Filing Dt:
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09/25/1997
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Title:
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A PROCESS TO FORM MESOSTRUCTURED FILMS
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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08939635
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Filing Dt:
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09/29/1997
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Title:
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THERMALLY STABLE AMINOSULFUR TRIFLUORIDES
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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08939940
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Filing Dt:
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09/29/1997
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Title:
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FLUORINATION WITH AMINOSULFUR TRIFLUORIDES
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Patent #:
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Issue Dt:
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09/21/1999
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Application #:
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08941530
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Filing Dt:
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09/30/1997
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Title:
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METHOD AND APPARATUS FOR MAKING ULTRA-PURE HYDROGEN
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08942996
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Filing Dt:
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10/02/1997
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Title:
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SILICON NITRIDE FROM BIS(TERTIARYBUTYLAMINO)SILANE
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Patent #:
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Issue Dt:
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10/12/1999
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Application #:
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08944907
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Filing Dt:
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10/06/1997
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Title:
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SOLVENT PURGE MECHANISM
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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08951424
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Filing Dt:
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10/16/1997
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Title:
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AQUENOUS STRIPPING AND CLEANING COMPOSITIONS
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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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08964783
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Filing Dt:
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11/05/1997
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Title:
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METHOD FOR REMOVAL OF MOISTURE FROM GASEOUS HCL
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Patent #:
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Issue Dt:
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06/08/1999
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Application #:
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08971545
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Filing Dt:
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11/17/1997
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Title:
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ABATEMENT OF NF3 WITH METAL OXALATES
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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08977831
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Filing Dt:
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11/25/1997
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Title:
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METHOD FOR HIGH RATE DEPOSITION OF TUNGSTEN
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Patent #:
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Issue Dt:
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12/07/1999
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Application #:
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09004937
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Filing Dt:
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01/09/1998
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Title:
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AQUEOUS STRIPPING AND CLEANING COMPOSITIONS
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Patent #:
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Issue Dt:
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08/15/2000
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Application #:
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09009099
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Filing Dt:
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01/20/1998
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Title:
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SURFACE TENSION REDUCTION WITH N,N'-DIALKYLALKYLENEDIAMINES
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Patent #:
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Issue Dt:
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08/17/1999
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Application #:
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09020582
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Filing Dt:
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01/30/1998
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Title:
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IMIDAZOLATE SULFURYL DIFLUORIDES
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09030039
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Filing Dt:
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02/25/1998
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Title:
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FUNCTIONAL GROUPS FOR THERMAL CROSSLINKING OF POLYMERIC SYSTEMS
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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09034876
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Filing Dt:
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03/04/1998
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Title:
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BULK VESSEL HEATER SKID FOR LIQUEFIED COMPRESSED GASES
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Patent #:
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Issue Dt:
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09/12/2000
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Application #:
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09043505
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Filing Dt:
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03/23/1998
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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09046092
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Filing Dt:
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03/23/1998
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Title:
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RECOVERY OF PERFLUORINATED COMPOUNDS FROM THE EXHAUST OF SEMICONDUCTOR FABS USING MEMBRANE AND ADSORPTION IN SERIES
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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09077704
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Filing Dt:
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06/05/1998
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Title:
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METHOD AND APPARATUS FOR CONSTANT COMPOSITION DELIVERY OF HYDRIDE GASES FOR SEMICONDUCTOR PROCESSING
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09093975
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Filing Dt:
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06/09/1998
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Title:
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GAS PHASE REMOVAL OF SIO2/METALS FROM SILICON
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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09095818
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Filing Dt:
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06/11/1998
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Title:
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DEPOSITION OF SILICON DIOXIDE AND SILICONE OXYNITRIDE USING BIS (TERTIARYBUTYLAMINO) SILANE
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Patent #:
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Issue Dt:
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07/11/2000
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Application #:
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09138489
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Filing Dt:
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08/24/1998
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Title:
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CONTROL VENT SYSTEM FOR ULTRA-HIGH PURITY DELIVERY SYSTEM FOR LIQUEFIED COMPRESSED GASES
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Patent #:
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Issue Dt:
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12/19/2000
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Application #:
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09141897
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Filing Dt:
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08/28/1998
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Title:
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COMPOSITION AND METHOD FOR SELECTIVELY ETCHING A SILICON NITRIDE FILM
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Patent #:
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Issue Dt:
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04/17/2001
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Application #:
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09174196
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Filing Dt:
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10/16/1998
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Title:
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DYNAMIC BLENDING GAS DELIVERY SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09196452
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Filing Dt:
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11/19/1998
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Title:
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NANOPOROUS POLYMER FILMS FOR EXTREME LOW AND INTERLAYER DIELECTRICS
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Patent #:
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Issue Dt:
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04/04/2000
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Application #:
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09206427
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Filing Dt:
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12/07/1998
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Title:
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REGENERATION OF METAL CVD PRECURSORS
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09217113
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Filing Dt:
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12/21/1998
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Title:
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APPARATUS AND METHOD FOR DETECTING PARTICLES IN REACTIVE AND TOXIC GASES
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09226996
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Filing Dt:
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01/07/1999
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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06/19/2001
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Application #:
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09227702
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Filing Dt:
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01/08/1999
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Title:
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METHOD OF CLEAN A WAFER CARRIER
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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09238851
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Filing Dt:
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01/27/1999
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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LOW SURFACE TENSION, LOW VISCOSITY, AQUEOUS, ACIDIC COMPOSITIONS CONTAINING FLUORIDE AND ORGANIC, POLAR SOLVENTS FOR REMOVAL OF PHOTORESIST AND ORGANIC AND INORGANIC ETCH RESIDUES AT ROOM TEMPERATURE
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09251083
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Filing Dt:
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02/16/1999
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Title:
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ABATEMENT OF F2 USING SMALL PARTICLE FLUIDIZED BED
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09256933
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Filing Dt:
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02/24/1999
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Title:
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SYNTHESIS OF METAL OXIDE AND OXYNITRIDE
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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09318003
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Filing Dt:
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05/25/1999
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Title:
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SOLVENT PURGE MECHANISM
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Patent #:
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Issue Dt:
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11/14/2000
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Application #:
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09318814
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Filing Dt:
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05/26/1999
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Title:
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PROCESS FOR REMOVING CONTAMINANT FROM A SURFACE AND COMPOSITION USEFUL THEREFOR
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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09321036
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Filing Dt:
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05/27/1999
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Title:
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SLURRY COMPOSITION AND METHOD OF CHEMICAL MECHANICAL POLISHING USING SAME
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Patent #:
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Issue Dt:
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08/01/2000
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Application #:
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09329417
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Filing Dt:
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06/10/1999
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Title:
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PRODUCTION OF METAL-LIGAND COMPLEXES
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09345813
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Filing Dt:
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07/02/1999
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Publication #:
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Pub Dt:
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04/04/2002
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Title:
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COMPOSITES OF POWDERED FILLERS AND POLYMER MATRIX
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09350074
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Filing Dt:
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07/08/1999
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Title:
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LIQUID PRECURSOR MIXTURES FOR DEPOSITION OF MULTICOMPONENT METAL CONTAINING MATERIALS
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Patent #:
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Issue Dt:
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08/21/2001
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Application #:
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09379007
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Filing Dt:
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08/23/1999
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Title:
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STORAGE AND SAFE DELIVERY OF HAZARDOUS SPECIALTY GASES BY ACID/BASE REACTIONS WITH IONIC POLYMERS
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09417668
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Filing Dt:
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10/14/1999
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Title:
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VACUUM PREPARATION OF HYDROGEN HALIDLE DRIER
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09418084
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Filing Dt:
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10/14/1999
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Title:
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CHEMICAL DELIVERY SYSTEM WITH ULTRASONIC FLUID SENSORS
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Patent #:
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Issue Dt:
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08/01/2000
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Application #:
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09432724
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Filing Dt:
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11/01/1999
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Title:
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PROCESS FOR THE SYNTHESIS OF DIALKYL, DIARYL, AND ARYLALKYL AMINOSULFUR TRIFLUORIDES
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09432980
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Filing Dt:
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11/03/1999
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Title:
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PROCESSES FOR IMPROVED SURFACE PROPERTIES INCORPORATING COMPRESSIVE HEATING OF REACTIVE GASES
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Patent #:
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Issue Dt:
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07/31/2001
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Application #:
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09478483
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Filing Dt:
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01/06/2000
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Title:
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USE OF ALKYLATED POLYAMINES IN PHOTORESIST DEVELOPERS
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09481050
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Filing Dt:
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01/11/2000
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09481063
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Filing Dt:
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01/11/2000
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Title:
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Cyclic ureas in photoresist developers
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09483751
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Filing Dt:
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01/14/2000
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Title:
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FLUORINATION WITH AMINOSULFUR TRIFLUORIDES
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09533114
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Filing Dt:
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03/22/2000
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Title:
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PROCESS FOR REMOVING CONTAMINANT FROM A SURFACE AND COMPOSITION USEFUL THEREFUL
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09534303
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Filing Dt:
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03/23/2000
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Title:
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Cleaning compositions and use thereof containing ammonium hydroxide and fluorosurfactant
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09535682
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Filing Dt:
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03/23/2000
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Title:
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Thermally stable aminosulfur trifluorides
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Patent #:
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Issue Dt:
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08/07/2001
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Application #:
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09535756
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Filing Dt:
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03/27/2000
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Title:
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Process for generating useful electrophiles from common anions and their application in electrophilic rections with organic substrates
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09542995
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Filing Dt:
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04/04/2000
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Title:
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RECLAMATION AND SEPARATION OF PERFLUOROCARBONS USING CONDENSATOIN
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09546452
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Filing Dt:
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04/10/2000
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Title:
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LIQUID PRECURSOR MIXTURES FOR DEPOSITION OF MULTICOMPONENT METAL CONTAINING MATERIALS
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09546867
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Filing Dt:
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04/10/2000
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Title:
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PROCESS FOR METAL METALLOID OXIDES AND NITRIDES WITH COMPOSITIONAL GRADIENTS
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Patent #:
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Issue Dt:
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08/21/2001
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Application #:
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09566075
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Filing Dt:
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05/08/2000
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Title:
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Purification of nitrogen trifluoride by continuous cryogenic distillation
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09567164
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Filing Dt:
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05/08/2000
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Title:
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PROCESS FOR CONCENTRATING FLUORINE COMPOUNDS
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Patent #:
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Issue Dt:
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10/28/2003
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Application #:
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09567387
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Filing Dt:
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05/09/2000
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Title:
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METHOD OF IMPROVING THE PERFORMANCE OF AN ION MOBILITY SPECTOMETER USED TO DETECT TRACE ATMOSPHERIC IMPURITIES IN GASES
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Patent #:
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Issue Dt:
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11/15/2005
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Application #:
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09577347
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Filing Dt:
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05/24/2000
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Title:
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SELECTIVE POLISHING WITH SLURRIES CONTAINING POLYELECTROLYTES
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09602933
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Filing Dt:
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06/23/2000
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Title:
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PROCESS AND APPARATUS FOR REMOVING PARTICLES FROM HIGH PURITY GAS SYSTEMS
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Patent #:
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Issue Dt:
|
10/08/2002
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Application #:
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09615877
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Filing Dt:
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07/13/2000
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Title:
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SYNTHESIS OF 2-DEOXY-2-FLUORO-ARABINOSE DERIVATIVES
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09619604
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Filing Dt:
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07/19/2000
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Title:
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High purity preparation of florinated 1,3-dicarbonyls using bdm (bis-fluoroxydifluoromethane)
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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09641933
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Filing Dt:
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08/18/2000
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Title:
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SUB-ATMOSPHERIC GAS DELIVERY METHOD AND APPARATUS
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Patent #:
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|
Issue Dt:
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10/16/2001
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Application #:
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09652416
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Filing Dt:
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08/31/2000
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Title:
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Composition and method for selectively etching a silicon nitride film
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Patent #:
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Issue Dt:
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08/21/2001
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Application #:
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09661750
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Filing Dt:
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09/14/2000
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Title:
|
Chemical delivery system with spill containment door
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Patent #:
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Issue Dt:
|
05/06/2003
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Application #:
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09668929
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Filing Dt:
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09/25/2000
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Title:
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PHOTORESIST STRIPPER/CLEANER COMPOSITIONS CONTAINING AROMATIC ACID INHIBITORS
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Patent #:
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Issue Dt:
|
01/04/2005
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Application #:
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09675376
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Filing Dt:
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09/29/2000
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Title:
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MULTIPLE CONTENTS CONTAINER ASSEMBLY FOR ULTRAPURE SOLVENT PURGING
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Patent #:
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Issue Dt:
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08/05/2003
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Application #:
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09676426
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Filing Dt:
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09/29/2000
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Title:
|
DEPOSITION OF TITANIUM AMIDES
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|
|
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Patent #:
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Issue Dt:
|
02/04/2003
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Application #:
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09702189
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Filing Dt:
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10/31/2000
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Title:
|
REMOVING FLUORINE FROM SEMICONDUCTOR PROCESSING EXHAUST GAS
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|
|
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Patent #:
|
|
Issue Dt:
|
07/15/2003
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Application #:
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09711573
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Filing Dt:
|
11/13/2000
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Title:
|
MESOPOROUS FILMS HAVING REDUCED DIELECTRIC CONSTANTS
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Patent #:
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Issue Dt:
|
12/02/2003
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Application #:
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09732414
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Filing Dt:
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12/07/2000
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Publication #:
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Pub Dt:
|
08/08/2002
| | | | |
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Title:
|
METHOD FOR CLEANING ETCHER PARTS
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|
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09757559
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Filing Dt:
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01/09/2001
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Publication #:
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Pub Dt:
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09/12/2002
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Title:
|
Compositions for chemical mechanical planarization of tungsten
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09781855
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Filing Dt:
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02/12/2001
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Publication #:
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Pub Dt:
|
08/15/2002
| | | | |
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Title:
|
High purity chemical container with external level sensor and removable dip tube
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|
|
|
|
Patent #:
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NONE
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Issue Dt:
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Application #:
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09782268
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Filing Dt:
|
02/13/2001
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Publication #:
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Pub Dt:
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10/24/2002
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Title:
|
Continuous preparation of high purity Bis(fluoroxy)difluoromethane (BDM) at elevated pressure
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|
|
|
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Patent #:
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|
Issue Dt:
|
06/29/2004
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Application #:
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09783069
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Filing Dt:
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02/13/2001
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Publication #:
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Pub Dt:
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08/15/2002
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Title:
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CHEMICAL-MECHANICAL PLANARIZATION USING OZONE
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|
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Patent #:
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Issue Dt:
|
02/25/2003
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Application #:
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09783900
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Filing Dt:
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02/15/2001
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|
Publication #:
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Pub Dt:
|
10/10/2002
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Title:
|
ACTIVE FLUORIDE CATALYSTS FOR FLUORINATION REACTIONS
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09791409
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Filing Dt:
|
02/22/2001
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|
Publication #:
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Pub Dt:
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01/31/2002
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Title:
|
VOLATILE PRECURSORS FOR DEPOSITION OF METALS AND METAL-CONTAINING FILMS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/04/2003
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Application #:
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09799644
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Filing Dt:
|
03/06/2001
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|
Publication #:
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Pub Dt:
|
07/26/2001
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Title:
|
DYNAMIC BLENDING GAS DELIVERY SYSTEM AND METHOD
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|
