USPTO Assignments on the Web

	United States Patent and Trademark Office
	Home\|Site Index\|Search\|Guides\|Contacts\|eBusiness\|eBiz alerts\|News\|Help

Assignments on the Web > Patent Query

Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	041772/0733			Pages:	35
		Recorded:	02/20/2017
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 764
Page 3 of 8
Pages: 1 2 3 4 5 6 7 8

Patent #:	NONE	Issue Dt:		Application #:	09816293	Filing Dt:	03/23/2001
Publication #:	US20020174893	Pub Dt:	11/28/2002
Title:	Apparatus for detecting liquid dry conditions for liquefied compressed gases

Patent #:	NONE	Issue Dt:		Application #:	09825491	Filing Dt:	04/03/2001
Publication #:	US20010029979	Pub Dt:	10/18/2001
Title:	Gas control device and method of supplying gas

Patent #:	6526824	Issue Dt:	03/04/2003	Application #:	09876243	Filing Dt:	06/07/2001
Publication #:	US20020184945	Pub Dt:	12/12/2002
Title:	HIGH PURITY CHEMICAL CONTAINER WITH EXTERNAL LEVEL SENSOR AND LIQUID SUMP

Patent #:	NONE	Issue Dt:		Application #:	09881552	Filing Dt:	06/14/2001
Publication #:	US20030022800	Pub Dt:	01/30/2003
Title:	AQUEOUS BUFFERED FLUORIDE-CONTAINING ETCH RESIDUE REMOVERS AND CLEANERS

Patent #:	6932945	Issue Dt:	08/23/2005	Application #:	09884406	Filing Dt:	06/19/2001
Publication #:	US20020192126	Pub Dt:	12/19/2002
Title:	ADSORBENT BASED GAS DELIVERY SYSTEM WITH INTEGRATED PURIFIER

Patent #:	6926017	Issue Dt:	08/09/2005	Application #:	09884450	Filing Dt:	06/18/2001
Publication #:	US20020046760	Pub Dt:	04/25/2002
Title:	WAFER CONTAINER WASHING APPARATUS

Patent #:	6627546	Issue Dt:	09/30/2003	Application #:	09893968	Filing Dt:	06/29/2001
Publication #:	US20030096500	Pub Dt:	05/22/2003
Title:	PROCESS FOR REMOVING CONTAMINANT FROM A SURFACE AND COMPOSITION USEFUL THEREFOR

Patent #:	NONE	Issue Dt:		Application #:	09907020	Filing Dt:	07/17/2001
Publication #:	US20010039961	Pub Dt:	11/15/2001
Title:	Gas control device and method of supplying gas

Patent #:	NONE	Issue Dt:		Application #:	09929158	Filing Dt:	08/14/2001
Publication #:	US20020068684	Pub Dt:	06/06/2002
Title:	Stripping and cleaning compositions

Patent #:	NONE	Issue Dt:		Application #:	09929858	Filing Dt:	08/14/2001
Publication #:	US20020096211	Pub Dt:	07/25/2002
Title:	Gas control device and method of supplying gas

Patent #:	6431229	Issue Dt:	08/13/2002	Application #:	09938883	Filing Dt:	08/24/2001
Title:	SOLVENTLESS PURGEABLE DIAPHRAGM VALVED MANIFOLD FOR LOW VAPOR PRESSURE CHEMICALS

Patent #:	6583048	Issue Dt:	06/24/2003	Application #:	09944042	Filing Dt:	08/31/2001
Publication #:	US20020142579	Pub Dt:	10/03/2002
Title:	ORGANOSILICON PRECURSORS FOR INTERLAYER DIELECTRIC FILMS WITH LOW DIELECTRIC CONSTANTS

Patent #:	6638326	Issue Dt:	10/28/2003	Application #:	09965233	Filing Dt:	09/25/2001
Publication #:	US20030131535	Pub Dt:	07/17/2003
Title:	COMPOSITIONS FOR CHEMICAL MECHANICAL PLANARIZATION OF TANTALUM AND TANTALUM NITRIDE

Patent #:	6616769	Issue Dt:	09/09/2003	Application #:	09966195	Filing Dt:	09/28/2001
Publication #:	US20030062065	Pub Dt:	04/03/2003
Title:	SYSTEMS AND METHODS FOR CONDITIONING ULTRA HIGH PURITY GAS BULK CONTAINERS

Patent #:	6614009	Issue Dt:	09/02/2003	Application #:	09966197	Filing Dt:	09/28/2001
Publication #:	US20030062361	Pub Dt:	04/03/2003
Title:	HIGH FLOW RATE TRANSPORTABLE UHP GAS SUPPLY SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	09985870	Filing Dt:	11/06/2001
Publication #:	US20020111024	Pub Dt:	08/15/2002
Title:	Chemical mechanical polishing compositions

Patent #:	6474077	Issue Dt:	11/05/2002	Application #:	10015495	Filing Dt:	12/12/2001
Title:	VAPOR DELIVERY FROM A LOW VAPOR PRESSURE LIQUEFIED COMPRESSED GAS

Patent #:	6764670	Issue Dt:	07/20/2004	Application #:	10016034	Filing Dt:	11/01/2001
Publication #:	US20030082086	Pub Dt:	05/01/2003
Title:	REMOVAL OF THIOTHIONYLFLUORIDE FROM SULFUR TETRAFLUORIDE

Patent #:	NONE	Issue Dt:		Application #:	10016076	Filing Dt:	12/13/2001
Publication #:	US20020054956	Pub Dt:	05/09/2002
Title:	Integrated dynamic blending apparatus

Patent #:	6866792	Issue Dt:	03/15/2005	Application #:	10017934	Filing Dt:	12/12/2001
Publication #:	US20030164471	Pub Dt:	09/04/2003
Title:	COMPOSITIONS FOR CHEMICAL MECHANICAL PLANARIZATION OF COPPER

Patent #:	6858697	Issue Dt:	02/22/2005	Application #:	10029892	Filing Dt:	12/21/2001
Publication #:	US20030149213	Pub Dt:	08/07/2003
Title:	STABILIZERS TO INHIBIT THE POLYMERIZATION OF SUBSTITUTED CYCLOTETRASILOXANE

Patent #:	6534666	Issue Dt:	03/18/2003	Application #:	10037739	Filing Dt:	12/27/2001
Title:	USE OF WATER AND ACIDIC WATER TO PURIFY LIQUID MOCVD PRECURSORS

Patent #:	6943142	Issue Dt:	09/13/2005	Application #:	10042612	Filing Dt:	01/09/2002
Publication #:	US20030130146	Pub Dt:	07/10/2003
Title:	AQUEOUS STRIPPING AND CLEANING COMPOSITION

Patent #:	6953047	Issue Dt:	10/11/2005	Application #:	10046614	Filing Dt:	01/14/2002
Publication #:	US20030131885	Pub Dt:	07/17/2003
Title:	CABINET FOR CHEMICAL DELIVERY WITH SOLVENT PURGING

Patent #:	6716955	Issue Dt:	04/06/2004	Application #:	10046615	Filing Dt:	01/14/2002
Publication #:	US20030171527	Pub Dt:	09/11/2003
Title:	POLY(ARYLENE ETHER) POLYMER WITH LOW TEMPERATURE CROSSLINKING GRAFTS AND ADHESIVE COMPRISING THE SAME

Patent #:	6544319	Issue Dt:	04/08/2003	Application #:	10050352	Filing Dt:	01/16/2002
Title:	PURIFICATION OF HEXAFLUORO-1,3-BUTADIENE

Patent #:	6770254	Issue Dt:	08/03/2004	Application #:	10052052	Filing Dt:	01/17/2002
Publication #:	US20030133861	Pub Dt:	07/17/2003
Title:	PURIFICATION OF GROUP IVB METAL HALIDES

Patent #:	7524346	Issue Dt:	04/28/2009	Application #:	10057206	Filing Dt:	01/25/2002
Publication #:	US20030194879	Pub Dt:	10/16/2003
Title:	Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates

Patent #:	NONE	Issue Dt:		Application #:	10074757	Filing Dt:	02/11/2002
Publication #:	US20030162398	Pub Dt:	08/28/2003
Title:	Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same

Patent #:	6837250	Issue Dt:	01/04/2005	Application #:	10085249	Filing Dt:	02/27/2002
Publication #:	US20030164177	Pub Dt:	09/04/2003
Title:	CVD CHAMBER CLEANING USING MIXED PFCS FROM CAPTURE/RECYCLE

Patent #:	6637469	Issue Dt:	10/28/2003	Application #:	10101339	Filing Dt:	03/19/2002
Publication #:	US20030178091	Pub Dt:	09/25/2003
Title:	PRODUCT DELIVERY SYSTEM FOR STATIONARY OR PORTABLE BULK CONTAINERS

Patent #:	6651703	Issue Dt:	11/25/2003	Application #:	10101340	Filing Dt:	03/19/2002
Publication #:	US20030178093	Pub Dt:	09/25/2003
Title:	TRANSPORTATION AND STORAGE OF ULTRA-HIGH PURITY PRODUCTS

Patent #:	6790428	Issue Dt:	09/14/2004	Application #:	10102488	Filing Dt:	03/20/2002
Publication #:	US20030180211	Pub Dt:	09/25/2003
Title:	PROCESS FOR THE REDUCTION OR ELIMINATION OF NH3/HF BYPRODUCT IN THE MANUFACTURE OF NITROGEN TRIFLUORIDE

Patent #:	6479645	Issue Dt:	11/12/2002	Application #:	10104214	Filing Dt:	03/22/2002
Title:	SULFURPENTAFLUORIDE COMPOUNDS AND METHODS FOR MAKING AND USING SAME

Patent #:	NONE	Issue Dt:		Application #:	10120708	Filing Dt:	04/11/2002
Publication #:	US20030192430	Pub Dt:	10/16/2003
Title:	Helical built-in purifier for gas supply cylinders

Patent #:	6846515	Issue Dt:	01/25/2005	Application #:	10150798	Filing Dt:	05/17/2002
Publication #:	US20030198742	Pub Dt:	10/23/2003
Title:	POROGENS, POROGENATED PRECURSORS AND METHODS FOR USING THE SAME TO PROVIDE POROUS ORGANOSILICA GLASS FILMS WITH LOW DIELECTRIC CONSTANTS

Patent #:	6648034	Issue Dt:	11/18/2003	Application #:	10155726	Filing Dt:	05/23/2002
Title:	PURGEABLE MANIFOLD FOR LOW VAPOR PRESSURE CHEMICALS CONTAINERS

Patent #:	7307343	Issue Dt:	12/11/2007	Application #:	10158511	Filing Dt:	05/30/2002
Publication #:	US20030224156	Pub Dt:	12/04/2003
Title:	LOW DIELECTRIC MATERIALS AND METHODS FOR MAKING SAME

Patent #:	6946158	Issue Dt:	09/20/2005	Application #:	10167084	Filing Dt:	06/10/2002
Publication #:	US20030072883	Pub Dt:	04/17/2003
Title:	DEPOSITION OF TITANIUM AMIDES

Patent #:	6552209	Issue Dt:	04/22/2003	Application #:	10179818	Filing Dt:	06/24/2002
Title:	PREPARATION OF METAL IMINO/AMINO COMPLEXES FOR METAL OXIDE AND METAL NITRIDE THIN FILMS

Patent #:	6517608	Issue Dt:	02/11/2003	Application #:	10187342	Filing Dt:	06/28/2002
Publication #:	US20020178911	Pub Dt:	12/05/2002
Title:	PROCESS AND APPARATUS FOR REMOVING PARTICLES FROM HIGH PURITY GAS SYSTEMS

Patent #:	6677286	Issue Dt:	01/13/2004	Application #:	10191060	Filing Dt:	07/10/2002
Title:	COMPOSITONS FOR REMOVING ETCHING RESIDUE AND USE THEREOF

Patent #:	7446078	Issue Dt:	11/04/2008	Application #:	10191719	Filing Dt:	07/09/2002
Publication #:	US20040009873	Pub Dt:	01/15/2004
Title:	ADSORBENT FOR WATER REMOVAL FROM AMMONIA

Patent #:	NONE	Issue Dt:		Application #:	10191726	Filing Dt:	07/08/2002
Publication #:	US20040005420	Pub Dt:	01/08/2004
Title:	Fluid containment vessels with chemically resistant coatings

Patent #:	6901941	Issue Dt:	06/07/2005	Application #:	10192481	Filing Dt:	07/10/2002
Publication #:	US20040007272	Pub Dt:	01/15/2004
Title:	VESSEL WITH OPTIMIZED PURGE GAS FLOW AND METHOD USING SAME

Patent #:	6515191	Issue Dt:	02/04/2003	Application #:	10197969	Filing Dt:	07/17/2002
Publication #:	US20020198417	Pub Dt:	12/26/2002
Title:	SYNTHESIS OF VICINAL DIFLUORO AROMATICS AND INTERMEDIATES THEREOF

Patent #:	NONE	Issue Dt:		Application #:	10198509	Filing Dt:	07/18/2002
Publication #:	US20040014327	Pub Dt:	01/22/2004
Title:	Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials

Patent #:	NONE	Issue Dt:		Application #:	10218087	Filing Dt:	08/12/2002
Publication #:	US20040029395	Pub Dt:	02/12/2004
Title:	Process solutions containing acetylenic diol surfactants

Patent #:	6896955	Issue Dt:	05/24/2005	Application #:	10219164	Filing Dt:	08/13/2002
Publication #:	US20030008525	Pub Dt:	01/09/2003
Title:	IONIC ADDITIVES FOR EXTREME LOW DIELECTRIC CONSTANT CHEMICAL FORMULATIONS

Patent #:	7033560	Issue Dt:	04/25/2006	Application #:	10232052	Filing Dt:	08/30/2002
Publication #:	US20040044163	Pub Dt:	03/04/2004
Title:	SINGLE SOURCE MIXTURES OF METAL SILOXIDES

Patent #:	6886573	Issue Dt:	05/03/2005	Application #:	10237224	Filing Dt:	09/06/2002
Publication #:	US20040045576	Pub Dt:	03/11/2004
Title:	PLASMA CLEANING GAS WITH LOWER GLOBAL WARMING POTENTIAL THAN SF6

Patent #:	NONE	Issue Dt:		Application #:	10238803	Filing Dt:	09/10/2002
Publication #:	US20040045577	Pub Dt:	03/11/2004
Title:	Cleaning of processing chambers with dilute NF3 plasmas

Patent #:	6838066	Issue Dt:	01/04/2005	Application #:	10243153	Filing Dt:	09/13/2002
Publication #:	US20040052708	Pub Dt:	03/18/2004
Title:	PROCESS FOR RECOVERY, PURIFICATION, AND RECYCLE OF ARGON

Patent #:	6743267	Issue Dt:	06/01/2004	Application #:	10245440	Filing Dt:	09/17/2002
Publication #:	US20030114083	Pub Dt:	06/19/2003
Title:	GEL-FREE COLLOIDAL ABRASIVE POLISHING COMPOSITIONS AND ASSOCIATED METHODS

Patent #:	NONE	Issue Dt:		Application #:	10253054	Filing Dt:	09/24/2002
Publication #:	US20040055621	Pub Dt:	03/25/2004
Title:	Processing of semiconductor components with dense processing fluids and ultrasonic energy

Patent #:	6818919	Issue Dt:	11/16/2004	Application #:	10253108	Filing Dt:	09/23/2002
Publication #:	US20040056255	Pub Dt:	03/25/2004
Title:	NOVEL LIGHT EMITTING LAYERS FOR LED DEVICES BASED ON HIGH TG POLYMER MATRIX COMPOSITIONS

Patent #:	7282099	Issue Dt:	10/16/2007	Application #:	10253296	Filing Dt:	09/24/2002
Publication #:	US20040055624	Pub Dt:	03/25/2004
Title:	DENSE PHASE PROCESSING FLUIDS FOR MICROELECTRONIC COMPONENT MANUFACTURE

Patent #:	7166419	Issue Dt:	01/23/2007	Application #:	10254785	Filing Dt:	09/26/2002
Publication #:	US20040063042	Pub Dt:	04/01/2004
Title:	COMPOSITIONS SUBSTRATE FOR REMOVING ETCHING RESIDUE AND USE THEREOF

Patent #:	6681791	Issue Dt:	01/27/2004	Application #:	10256158	Filing Dt:	09/26/2002
Title:	MANIFOLD VALVE POSITION INDICATOR AND OPERATOR ALERTING SYSTEM

Patent #:	6818289	Issue Dt:	11/16/2004	Application #:	10263254	Filing Dt:	10/02/2002
Publication #:	US20030157311	Pub Dt:	08/21/2003
Title:	MESOPOROUS FILMS HAVING REDUCED DIELECTRIC CONSTANTS

Patent #:	6956206	Issue Dt:	10/18/2005	Application #:	10264180	Filing Dt:	10/03/2002
Publication #:	US20040108454	Pub Dt:	06/10/2004
Title:	NEGATIVE ION ATMOSPHERIC PRESSURE IONIZATION AND SELECTED ION MASS SPECTROMETRY USING A 63NI ELECTRON SOURCE

Patent #:	6709487	Issue Dt:	03/23/2004	Application #:	10278131	Filing Dt:	10/22/2002
Title:	ADSORBENT FOR MOISTURE REMOVAL FROM FLUORINE-CONTAINING FLUIDS

Patent #:	7216655	Issue Dt:	05/15/2007	Application #:	10282924	Filing Dt:	10/29/2002
Publication #:	US20030102015	Pub Dt:	06/05/2003
Title:	WAFER CONTAINER WASHING APPARATUS

Patent #:	7404990	Issue Dt:	07/29/2008	Application #:	10295568	Filing Dt:	11/14/2002
Publication #:	US20040096672	Pub Dt:	05/20/2004
Title:	NON-THERMAL PROCESS FOR FORMING POROUS LOW DIELECTRIC CONSTANT FILMS

Patent #:	NONE	Issue Dt:		Application #:	10299482	Filing Dt:	11/19/2002
Publication #:	US20040096386	Pub Dt:	05/20/2004
Title:	Method for nitrogen trifluoride production

Patent #:	6893476	Issue Dt:	05/17/2005	Application #:	10315398	Filing Dt:	12/09/2002
Publication #:	US20040107650	Pub Dt:	06/10/2004
Title:	COMPOSITION AND ASSOCIATED METHODS FOR CHEMICAL MECHANICAL PLANARIZATION HAVING HIGH SELECTIVITY FOR METAL REMOVAL

Patent #:	6818783	Issue Dt:	11/16/2004	Application #:	10323480	Filing Dt:	12/19/2002
Publication #:	US20030135061	Pub Dt:	07/17/2003
Title:	VOLATILE PRECURSORS FOR DEPOSITION OF METALS AND METAL-CONTAINING FILMS

Patent #:	6827752	Issue Dt:	12/07/2004	Application #:	10333643	Filing Dt:	03/12/2003
Publication #:	US20030182868	Pub Dt:	10/02/2003
Title:	CERIUM OXIDE SLURRY, AND METHOD OF MANUFACTURING SUBSTRATE

Patent #:	NONE	Issue Dt:		Application #:	10337700	Filing Dt:	01/07/2003
Publication #:	US20040129764	Pub Dt:	07/08/2004
Title:	Reducing surface tension and oxidation potential of tin-based solders

Patent #:	NONE	Issue Dt:		Application #:	10339709	Filing Dt:	01/09/2003
Publication #:	US20040029396	Pub Dt:	02/12/2004
Title:	Process solutions containing surfactants

Patent #:	6963006	Issue Dt:	11/08/2005	Application #:	10342930	Filing Dt:	01/15/2003
Publication #:	US20040138491	Pub Dt:	07/15/2004
Title:	PROCESS FOR THE PRODUCTION AND PURIFICATION OF BIS(TERTIARY-BUTYLAMINO)SILANE

Patent #:	NONE	Issue Dt:		Application #:	10349065	Filing Dt:	01/22/2003
Publication #:	US20030108473	Pub Dt:	06/12/2003
Title:	Process for producing ammonia with ultra-low metals content

Patent #:	6869582	Issue Dt:	03/22/2005	Application #:	10350715	Filing Dt:	01/24/2003
Publication #:	US20040146453	Pub Dt:	07/29/2004
Title:	PROCESS FOR THE SYNTHESIS OF BRSF5

Patent #:	7002040	Issue Dt:	02/21/2006	Application #:	10353211	Filing Dt:	01/28/2003
Publication #:	US20040146454	Pub Dt:	07/29/2004
Title:	PROCESS FOR PURIFYING FLUOROXY COMPOUNDS

Patent #:	6894200	Issue Dt:	05/17/2005	Application #:	10357897	Filing Dt:	02/03/2003
Publication #:	US20030149315	Pub Dt:	08/07/2003
Title:	SYNTHESIS OF VICINAL DIFLUORO AROMATICS AND INTERMEDIATES THEREOF

Patent #:	7029508	Issue Dt:	04/18/2006	Application #:	10361822	Filing Dt:	02/11/2003
Publication #:	US20040006924	Pub Dt:	01/15/2004
Title:	CATALYST ATTACHED TO SOLID AND USED TO PROMOTE FREE RADICAL FORMATION IN CMP FORMULATIONS

Patent #:	7098149	Issue Dt:	08/29/2006	Application #:	10379466	Filing Dt:	03/04/2003
Publication #:	US20040175957	Pub Dt:	09/09/2004
Title:	MECHANICAL ENHANCEMENT OF DENSE AND POROUS ORGANOSILICATE MATERIALS BY UV EXPOSURE

Patent #:	NONE	Issue Dt:		Application #:	10393542	Filing Dt:	03/19/2003
Publication #:	US20040025444	Pub Dt:	02/12/2004
Title:	Fenton's reagent composition for chemical-mechanical polishing, method of using same, and substrate treated with same

Patent #:	7276180	Issue Dt:	10/02/2007	Application #:	10401405	Filing Dt:	03/27/2003
Publication #:	US20030176068	Pub Dt:	09/18/2003
Title:	CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS

Patent #:	NONE	Issue Dt:		Application #:	10404190	Filing Dt:	04/01/2003
Publication #:	US20040197474	Pub Dt:	10/07/2004
Title:	Method for enhancing deposition rate of chemical vapor deposition films

Patent #:	NONE	Issue Dt:		Application #:	10404195	Filing Dt:	04/01/2003
Publication #:	US20050260420	Pub Dt:	11/24/2005
Title:	LOW DIELECTRIC MATERIALS AND METHODS FOR MAKING SAME

Patent #:	6669760	Issue Dt:	12/30/2003	Application #:	10409230	Filing Dt:	04/08/2003
Title:	SEPARATION OF C2F6 FROM CF4 BY ADSORPTION ON ACTIVATED CARBON

Patent #:	7384471	Issue Dt:	06/10/2008	Application #:	10409468	Filing Dt:	04/07/2003
Publication #:	US20030232137	Pub Dt:	12/18/2003
Title:	POROGENS, POROGENATED PRECURSORS AND METHODS FOR USING THE SAME TO PROVIDE POROUS ORGANOSILICA GLASS FILMS WITH LOW DIELECTRIC CONSTANTS

Patent #:	NONE	Issue Dt:		Application #:	10410803	Filing Dt:	04/10/2003
Publication #:	US20040011380	Pub Dt:	01/22/2004
Title:	METHOD FOR ETCHING HIGH DIELECTRIC CONSTANT MATERIALS AND FOR CLEANING DEPOSITION CHAMBERS FOR HIGH DIELECTRIC CONSTANT MATERIALS

Patent #:	7172646	Issue Dt:	02/06/2007	Application #:	10413787	Filing Dt:	04/15/2003
Publication #:	US20040206241	Pub Dt:	10/21/2004
Title:	REACTIVE LIQUID BASED GAS STORAGE AND DELIVERY SYSTEMS

Patent #:	NONE	Issue Dt:		Application #:	10420369	Filing Dt:	04/22/2003
Publication #:	US20040215030	Pub Dt:	10/28/2004
Title:	Precursors for metal containing films

Patent #:	7311946	Issue Dt:	12/25/2007	Application #:	10428447	Filing Dt:	05/02/2003
Publication #:	US20040219369	Pub Dt:	11/04/2004
Title:	METHODS FOR DEPOSITING METAL FILMS ON DIFFUSION BARRIER LAYERS BY CVD OR ALD PROCESSES

Patent #:	NONE	Issue Dt:		Application #:	10439565	Filing Dt:	05/16/2003
Publication #:	US20030213521	Pub Dt:	11/20/2003
Title:	Intra-cylinder tubular pressure regulator

Patent #:	NONE	Issue Dt:		Application #:	10441242	Filing Dt:	05/19/2003
Publication #:	US20040009665	Pub Dt:	01/15/2004
Title:	Deposition of copper films

Patent #:	6951710	Issue Dt:	10/04/2005	Application #:	10443867	Filing Dt:	05/23/2003
Publication #:	US20040234904	Pub Dt:	11/25/2004
Title:	COMPOSITIONS SUITABLE FOR REMOVING PHOTORESIST, PHOTORESIST BYPRODUCTS AND ETCHING RESIDUE, AND USE THEREOF

Patent #:	6844271	Issue Dt:	01/18/2005	Application #:	10444217	Filing Dt:	05/23/2003
Publication #:	US20040235312	Pub Dt:	11/25/2004
Title:	PROCESS OF CVD OF HF AND ZR CONTAINING OXYNITRIDE FILMS

Patent #:	7160482	Issue Dt:	01/09/2007	Application #:	10451230	Filing Dt:	04/01/2004
Publication #:	US20050009207	Pub Dt:	01/13/2005
Title:	COMPOSITION COMPRISING AN OXIDIZING AND COMPLEXING COMPOUND

Patent #:	9676966	Issue Dt:	06/13/2017	Application #:	10534699	Filing Dt:	01/22/2009
Publication #:	US20090197412	Pub Dt:	08/06/2009
Title:	CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS

Patent #:	7968465	Issue Dt:	06/28/2011	Application #:	10568077	Filing Dt:	08/03/2007
Publication #:	US20080038995	Pub Dt:	02/14/2008
Title:	PERIODIC ACID COMPOSITIONS FOR POLISHING RUTHENIUM/LOW K SUBSTRATES

Patent #:	7101948	Issue Dt:	09/05/2006	Application #:	10602279	Filing Dt:	06/23/2003
Publication #:	US20040054114	Pub Dt:	03/18/2004
Title:	STABILIZERS TO INHIBIT THE POLYMERIZATION OF SUBSTITUTED CYCLOTETRASILOXANE

Patent #:	7124913	Issue Dt:	10/24/2006	Application #:	10602329	Filing Dt:	06/24/2003
Publication #:	US20040262327	Pub Dt:	12/30/2004
Title:	HIGH PURITY CHEMICAL CONTAINER WITH DIPTUBE AND LEVEL SENSOR TERMINATING IN LOWEST MOST POINT OF CONCAVE FLOOR

Patent #:	6814092	Issue Dt:	11/09/2004	Application #:	10607897	Filing Dt:	06/27/2003
Publication #:	US20040045802	Pub Dt:	03/11/2004
Title:	SYSTEMS AND METHODS FOR CONDITIONING ULTRA HIGH PURITY GAS BULK CONTAINERS

Patent #:	7129199	Issue Dt:	10/31/2006	Application #:	10616662	Filing Dt:	07/10/2003
Publication #:	US20040053800	Pub Dt:	03/18/2004
Title:	PROCESS SOLUTIONS CONTAINING SURFACTANTS

Patent #:	7014669	Issue Dt:	03/21/2006	Application #:	10619708	Filing Dt:	07/14/2003
Publication #:	US20040029495	Pub Dt:	02/12/2004
Title:	CATALYTIC COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING, METHOD OF USING SAME, AND SUBSTRATE TREATED WITH SAME

100

Patent #:	7037350	Issue Dt:	05/02/2006	Application #:	10619901	Filing Dt:	07/14/2003
Publication #:	US20050014890	Pub Dt:	01/20/2005
Title:	COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING AND METHOD OF USING SAME

Assignor

AIR PRODUCTS AND CHEMICALS, INC.

Exec Dt:

02/14/2017

Assignee

VERSUM MATERIALS US, LLC

8555 S. RIVER PARKWAY

TEMPE, ARIZONA 85284

Correspondence name and address
	LISA HOFFMANN
	7201 HAMILTON BLVD.
	ALLENTOWN, PA 18195

Search Results as of: 05/30/2024 10:59 AM

If you have any comments or questions concerning the data displayed, contact PRD / Assignments at 571-272-3350. v.2.6

Web interface last modified: August 25, 2017 v.2.6