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NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	041772/0733			Pages:	35
		Recorded:	02/20/2017
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 764
Page 4 of 8
Pages: 1 2 3 4 5 6 7 8

Patent #:	NONE	Issue Dt:		Application #:	10619911	Filing Dt:	07/15/2003
Publication #:	US20050011859	Pub Dt:	01/20/2005
Title:	Unsaturated oxygenated fluorocarbons for selective aniostropic etch applications

Patent #:	NONE	Issue Dt:		Application #:	10619922	Filing Dt:	07/15/2003
Publication #:	US20050014383	Pub Dt:	01/20/2005
Title:	USE OF HYPOFLUORITES, FLUOROPEROXIDES, AND/OR FLUOROTRIOXIDES AS OXIDIZING AGENT IN FLUOROCARBON ETCH PLASMAS

Patent #:	7189795	Issue Dt:	03/13/2007	Application #:	10621022	Filing Dt:	07/16/2003
Publication #:	US20050014921	Pub Dt:	01/20/2005
Title:	POLY(ARYLENE ETHER)S BEARING GRAFTED HYDROXYALKYLS FOR USE IN ELECTRICALLY CONDUCTIVE ADHESIVES

Patent #:	6840252	Issue Dt:	01/11/2005	Application #:	10621766	Filing Dt:	07/17/2003
Publication #:	US20040028569	Pub Dt:	02/12/2004
Title:	MULTIPLE CONTENTS CONTAINER ASSEMBLY FOR ULTRAPURE SOLVENT PURGING

Patent #:	7470454	Issue Dt:	12/30/2008	Application #:	10624356	Filing Dt:	07/21/2003
Publication #:	US20040096593	Pub Dt:	05/20/2004
Title:	NON-THERMAL PROCESS FOR FORMING POROUS LOW DIELECTRIC CONSTANT FILMS

Patent #:	7468290	Issue Dt:	12/23/2008	Application #:	10624357	Filing Dt:	07/21/2003
Publication #:	US20040175501	Pub Dt:	09/09/2004
Title:	MECHANICAL ENHANCEMENT OF DENSE AND POROUS ORGANOSILICATE MATERIALS BY UV EXPOSURE

Patent #:	NONE	Issue Dt:		Application #:	10635046	Filing Dt:	08/05/2003
Publication #:	US20050029492	Pub Dt:	02/10/2005
Title:	Processing of semiconductor substrates with dense fluids comprising acetylenic diols and/or alcohols

Patent #:	7524801	Issue Dt:	04/28/2009	Application #:	10652308	Filing Dt:	09/02/2003
Publication #:	US20040035354	Pub Dt:	02/26/2004
Title:	PROCESS FOR REMOVING CONTAMINANT FROM A SURFACE AND COMPOSITION USEFUL THEREFOR

Patent #:	7302812	Issue Dt:	12/04/2007	Application #:	10654216	Filing Dt:	09/02/2003
Publication #:	US20050044886	Pub Dt:	03/03/2005
Title:	PROCESS FOR PRODUCTION OF ISOTOPES

Patent #:	7033409	Issue Dt:	04/25/2006	Application #:	10665417	Filing Dt:	09/22/2003
Publication #:	US20050250329	Pub Dt:	11/10/2005
Title:	COMPOSITIONS FOR CHEMICAL MECHANICAL PLANARIZATION OF TANTALUM AND TANTALUM NITRIDE

Patent #:	7129311	Issue Dt:	10/31/2006	Application #:	10665739	Filing Dt:	09/18/2003
Publication #:	US20040127070	Pub Dt:	07/01/2004
Title:	ADDITIVES TO PREVENT DEGRADATION OF ALKYL-HYDROGEN SILOXANES

Patent #:	6966348	Issue Dt:	11/22/2005	Application #:	10669942	Filing Dt:	09/24/2003
Publication #:	US20050051234	Pub Dt:	03/10/2005
Title:	PURGEABLE CONTAINER FOR LOW VAPOR PRESSURE CHEMICALS

Patent #:	6824579	Issue Dt:	11/30/2004	Application #:	10673347	Filing Dt:	09/30/2003
Publication #:	US20040060472	Pub Dt:	04/01/2004
Title:	SELECTIVE POLISHING WITH SLURRIES CONTAINING POLYELECTROLYTES

Patent #:	6938654	Issue Dt:	09/06/2005	Application #:	10680267	Filing Dt:	10/06/2003
Publication #:	US20040065382	Pub Dt:	04/08/2004
Title:	MONITORING OF ULTRA-HIGH PURITY PRODUCT STORAGE TANKS DURING TRANSPORTATION

Patent #:	NONE	Issue Dt:		Application #:	10683231	Filing Dt:	10/10/2003
Publication #:	US20050079803	Pub Dt:	04/14/2005
Title:	Chemical-mechanical planarization composition having PVNO and associated method for use

Patent #:	7153335	Issue Dt:	12/26/2006	Application #:	10683232	Filing Dt:	10/10/2003
Publication #:	US20050076578	Pub Dt:	04/14/2005
Title:	TUNABLE COMPOSITION AND METHOD FOR CHEMICAL-MECHANICAL PLANARIZATION WITH ASPARTIC ACID/TOLYLTRIAZOLE

Patent #:	NONE	Issue Dt:		Application #:	10683233	Filing Dt:	10/10/2003
Publication #:	US20050076579	Pub Dt:	04/14/2005
Title:	Bicine/tricine containing composition and method for chemical-mechanical planarization

Patent #:	7022255	Issue Dt:	04/04/2006	Application #:	10683258	Filing Dt:	10/10/2003
Publication #:	US20050079718	Pub Dt:	04/14/2005
Title:	CHEMICAL-MECHANICAL PLANARIZATION COMPOSITION WITH NITROGEN CONTAINING POLYMER AND METHOD FOR USE

Patent #:	NONE	Issue Dt:		Application #:	10683553	Filing Dt:	10/10/2003
Publication #:	US20050076580	Pub Dt:	04/14/2005
Title:	Polishing composition and use thereof

Patent #:	7033942	Issue Dt:	04/25/2006	Application #:	10683730	Filing Dt:	10/10/2003
Publication #:	US20040072439	Pub Dt:	04/15/2004
Title:	CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS

Patent #:	6984366	Issue Dt:	01/10/2006	Application #:	10687073	Filing Dt:	10/16/2003
Publication #:	US20040096387	Pub Dt:	05/20/2004
Title:	METHOD FOR NITROGEN TRIFLUORIDE PRODUCTION

Patent #:	NONE	Issue Dt:		Application #:	10689043	Filing Dt:	10/21/2003
Publication #:	US20040134873	Pub Dt:	07/15/2004
Title:	Abrasive-free chemical mechanical polishing composition and polishing process containing same

Patent #:	7208049	Issue Dt:	04/24/2007	Application #:	10689402	Filing Dt:	10/20/2003
Publication #:	US20050081885	Pub Dt:	04/21/2005
Title:	PROCESS SOLUTIONS CONTAINING SURFACTANTS USED AS POST-CHEMICAL MECHANICAL PLANARIZATION TREATMENT

Patent #:	7247566	Issue Dt:	07/24/2007	Application #:	10690623	Filing Dt:	10/23/2003
Publication #:	US20050090109	Pub Dt:	04/28/2005
Title:	CMP METHOD FOR COPPER, TUNGSTEN, TITANIUM, POLYSILICON, AND OTHER SUBSTRATES USING ORGANOSULFONIC ACIDS AS OXIDIZERS

Patent #:	7427361	Issue Dt:	09/23/2008	Application #:	10690626	Filing Dt:	10/23/2003
Publication #:	US20050076581	Pub Dt:	04/14/2005
Title:	PARTICULATE OR PARTICLE-BOUND CHELATING AGENTS

Patent #:	7122222	Issue Dt:	10/17/2006	Application #:	10695379	Filing Dt:	10/27/2003
Publication #:	US20040146644	Pub Dt:	07/29/2004
Title:	PRECURSORS FOR DEPOSITING SILICON CONTAINING FILMS AND PROCESSES THEREOF

Patent #:	NONE	Issue Dt:		Application #:	10696529	Filing Dt:	10/29/2003
Publication #:	US20050096490	Pub Dt:	05/05/2005
Title:	Purification of perfluoromethane

Patent #:	7342068	Issue Dt:	03/11/2008	Application #:	10715916	Filing Dt:	11/18/2003
Publication #:	US20050107564	Pub Dt:	05/19/2005
Title:	AQUEOUS POLYURETHANE DISPERSION AND METHOD FOR MAKING AND USING SAME

Patent #:	7250072	Issue Dt:	07/31/2007	Application #:	10717050	Filing Dt:	11/19/2003
Publication #:	US20050106090	Pub Dt:	05/19/2005
Title:	REMOVAL OF SULFUR-CONTAINING IMPURITIES FROM VOLATILE METAL HYDRIDES

Patent #:	7357138	Issue Dt:	04/15/2008	Application #:	10723714	Filing Dt:	11/26/2003
Publication #:	US20040129671	Pub Dt:	07/08/2004
Title:	METHOD FOR ETCHING HIGH DIELECTRIC CONSTANT MATERIALS AND FOR CLEANING DEPOSITION CHAMBERS FOR HIGH DIELECTRIC CONSTANT MATERIALS

Patent #:	6821352	Issue Dt:	11/23/2004	Application #:	10723737	Filing Dt:	11/26/2003
Publication #:	US20040171503	Pub Dt:	09/02/2004
Title:	COMPOSITIONS FOR REMOVING ETCHING RESIDUE AND USE THEREOF

Patent #:	6892473	Issue Dt:	05/17/2005	Application #:	10730505	Filing Dt:	12/08/2003
Publication #:	US20050120581	Pub Dt:	06/09/2005
Title:	PROCESS FOR REMOVING WATER FROM AMMONIA

Patent #:	7160360	Issue Dt:	01/09/2007	Application #:	10730506	Filing Dt:	12/08/2003
Publication #:	US20050120877	Pub Dt:	06/09/2005
Title:	PURIFICATION OF HYDRIDE GASES

Patent #:	NONE	Issue Dt:		Application #:	10730527	Filing Dt:	12/08/2003
Publication #:	US20040144038	Pub Dt:	07/29/2004
Title:	Composition and associated method for oxide chemical mechanical planarization

Patent #:	7211553	Issue Dt:	05/01/2007	Application #:	10737203	Filing Dt:	12/16/2003
Publication #:	US20050029490	Pub Dt:	02/10/2005
Title:	PROCESSING OF SUBSTRATES WITH DENSE FLUIDS COMPRISING ACETYLENIC DIOLS AND/OR ALCOHOLS

Patent #:	NONE	Issue Dt:		Application #:	10744285	Filing Dt:	12/23/2003
Publication #:	US20040175942	Pub Dt:	09/09/2004
Title:	Composition and method used for chemical mechanical planarization of metals

Patent #:	NONE	Issue Dt:		Application #:	10753134	Filing Dt:	01/07/2004
Publication #:	US20060130896	Pub Dt:	06/22/2006
Title:	High reliability gas mixture back-up system

Patent #:	7077880	Issue Dt:	07/18/2006	Application #:	10759666	Filing Dt:	01/16/2004
Publication #:	US20050155296	Pub Dt:	07/21/2005
Title:	SURFACE MODIFIED COLLOIDAL ABRASIVES, INCLUDING STABLE BIMETALLIC SURFACE COATED SILICA SOLS FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	7074378	Issue Dt:	07/11/2006	Application #:	10763365	Filing Dt:	01/23/2004
Publication #:	US20050163695	Pub Dt:	07/28/2005
Title:	PROCESS FOR THE PURIFICATION OF NF3

Patent #:	7030283	Issue Dt:	04/18/2006	Application #:	10763366	Filing Dt:	01/23/2004
Publication #:	US20050165260	Pub Dt:	07/28/2005
Title:	PROCESS FOR PRODUCING 1,1-DIFLUOROVINYL CYCLOALIPHATIC COMPOUNDS

Patent #:	6838573	Issue Dt:	01/04/2005	Application #:	10768370	Filing Dt:	01/30/2004
Title:	COPPER CVD PRECURSORS WITH ENHANCED ADHESION PROPERTIES

Patent #:	NONE	Issue Dt:		Application #:	10780183	Filing Dt:	02/17/2004
Publication #:	US20050181633	Pub Dt:	08/18/2005
Title:	Precursors for depositing silicon-containing films and processes thereof

Patent #:	NONE	Issue Dt:		Application #:	10783651	Filing Dt:	02/19/2004
Publication #:	US20040161938	Pub Dt:	08/19/2004
Title:	Chemical-mechanical planarization using ozone

Patent #:	7138550	Issue Dt:	11/21/2006	Application #:	10784377	Filing Dt:	02/23/2004
Publication #:	US20050037289	Pub Dt:	02/17/2005
Title:	BRIDGED CARBOCYCLIC COMPOUNDS AND METHODS OF MAKING AND USING SAME

Patent #:	7439654	Issue Dt:	10/21/2008	Application #:	10785298	Filing Dt:	02/24/2004
Publication #:	US20050183739	Pub Dt:	08/25/2005
Title:	TRANSMISSION OF ULTRASONIC ENERGY INTO PRESSURIZED FLUIDS

Patent #:	7087102	Issue Dt:	08/08/2006	Application #:	10788223	Filing Dt:	02/26/2004
Publication #:	US20050191854	Pub Dt:	09/01/2005
Title:	PROCESS FOR PURIFICATION OF GERMANE

Patent #:	7267842	Issue Dt:	09/11/2007	Application #:	10800880	Filing Dt:	03/15/2004
Publication #:	US20050202167	Pub Dt:	09/15/2005
Title:	METHOD FOR REMOVING TITANIUM DIOXIDE DEPOSITS FROM A REACTOR

Patent #:	7521405	Issue Dt:	04/21/2009	Application #:	10804513	Filing Dt:	03/19/2004
Publication #:	US20040204328	Pub Dt:	10/14/2004
Title:	PROCESS SOLUTIONS CONTAINING SURFACTANTS

Patent #:	7524533	Issue Dt:	04/28/2009	Application #:	10820864	Filing Dt:	04/09/2004
Publication #:	US20040234704	Pub Dt:	11/25/2004
Title:	DIFFUSION BARRIER LAYERS AND PROCESSES FOR DEPOSITING METAL FILMS THEREUPON BY CVD OR ALD PROCESSES

Patent #:	7220714	Issue Dt:	05/22/2007	Application #:	10822804	Filing Dt:	04/13/2004
Publication #:	US20040192572	Pub Dt:	09/30/2004
Title:	PROCESS AND COMPOSITION FOR REMOVING RESIDUES FROM THE MICROSTRUCTURE OF AN OBJECT

Patent #:	8137764	Issue Dt:	03/20/2012	Application #:	10842503	Filing Dt:	05/11/2004
Publication #:	US20040241463	Pub Dt:	12/02/2004
Title:	MECHANICAL ENHANCER ADDITIVES FOR LOW DIELECTRIC FILMS

Patent #:	7074034	Issue Dt:	07/11/2006	Application #:	10862851	Filing Dt:	06/07/2004
Publication #:	US20050287487	Pub Dt:	12/29/2005
Title:	BURNER AND PROCESS FOR COMBUSTION OF A GAS CAPABLE OF REACTING TO FORM SOLID PRODUCTS

Patent #:	7303607	Issue Dt:	12/04/2007	Application #:	10867068	Filing Dt:	06/14/2004
Publication #:	US20050276733	Pub Dt:	12/15/2005
Title:	LIQUID MEDIA CONTAINING LEWIS ACIDIC REACTIVE COMPOUNDS FOR STORAGE AND DELIVERY OF LEWIS BASIC GASES

Patent #:	7807613	Issue Dt:	10/05/2010	Application #:	10877305	Filing Dt:	06/25/2004
Publication #:	US20040266637	Pub Dt:	12/30/2004
Title:	AQUEOUS BUFFERED FLUORIDE-CONTAINING ETCH RESIDUE REMOVERS AND CLEANERS

Patent #:	7396381	Issue Dt:	07/08/2008	Application #:	10887561	Filing Dt:	07/08/2004
Publication #:	US20060008392	Pub Dt:	01/12/2006
Title:	STORAGE AND DELIVERY SYSTEMS FOR GASES HELD IN LIQUID MEDIUM

Patent #:	9217929	Issue Dt:	12/22/2015	Application #:	10896589	Filing Dt:	07/22/2004
Publication #:	US20060016785	Pub Dt:	01/26/2006
Title:	Composition for removing photoresist and/or etching residue from a substrate and use thereof

Patent #:	7261118	Issue Dt:	08/28/2007	Application #:	10902778	Filing Dt:	08/02/2004
Publication #:	US20050039794	Pub Dt:	02/24/2005
Title:	METHOD AND VESSEL FOR THE DELIVERY OF PRECURSOR MATERIALS

Patent #:	7247179	Issue Dt:	07/24/2007	Application #:	10914113	Filing Dt:	08/09/2004
Publication #:	US20050044803	Pub Dt:	03/03/2005
Title:	COMPOSITION AND ASSOCIATED METHODS FOR CHEMICAL MECHANICAL PLANARIZATION HAVING HIGH SELECTIVITY FOR METAL REMOVAL

Patent #:	NONE	Issue Dt:		Application #:	10920541	Filing Dt:	08/18/2004
Publication #:	US20060040054	Pub Dt:	02/23/2006
Title:	Passivating ALD reactor chamber internal surfaces to prevent residue buildup

Patent #:	7361316	Issue Dt:	04/22/2008	Application #:	10925096	Filing Dt:	08/24/2004
Publication #:	US20050025678	Pub Dt:	02/03/2005
Title:	PROCESS FOR RECOVERY, PURIFICATION, AND RECYCLE OF ARGON

Patent #:	NONE	Issue Dt:		Application #:	10929755	Filing Dt:	08/30/2004
Publication #:	US20060045986	Pub Dt:	03/02/2006
Title:	Silicon nitride from aminosilane using PECVD

Patent #:	6913029	Issue Dt:	07/05/2005	Application #:	10942218	Filing Dt:	09/15/2004
Publication #:	US20050028841	Pub Dt:	02/10/2005
Title:	MULTIPLE CONTENTS CONTAINER ASSEMBLY FOR ULTRAPURE SOLVENT PURGING

Patent #:	7361631	Issue Dt:	04/22/2008	Application #:	10942290	Filing Dt:	09/15/2004
Publication #:	US20050119143	Pub Dt:	06/02/2005
Title:	COMPOSITIONS FOR THE REMOVAL OF ORGANIC AND INORGANIC RESIDUES

Patent #:	7371688	Issue Dt:	05/13/2008	Application #:	10942301	Filing Dt:	09/15/2004
Publication #:	US20050112901	Pub Dt:	05/26/2005
Title:	REMOVAL OF TRANSITION METAL TERNARY AND/OR QUATERNARY BARRIER MATERIALS FROM A SUBSTRATE

Patent #:	7045107	Issue Dt:	05/16/2006	Application #:	10945243	Filing Dt:	09/20/2004
Publication #:	US20060062711	Pub Dt:	03/23/2006
Title:	PROCESS FOR THE PRODUCTION OF NITROGEN TRIFLUORIDE

Patent #:	7404845	Issue Dt:	07/29/2008	Application #:	10948277	Filing Dt:	09/23/2004
Publication #:	US20060060817	Pub Dt:	03/23/2006
Title:	IONIC LIQUID BASED MIXTURES FOR GAS STORAGE AND DELIVERY

Patent #:	7186613	Issue Dt:	03/06/2007	Application #:	10964499	Filing Dt:	10/13/2004
Publication #:	US20050116346	Pub Dt:	06/02/2005
Title:	LOW DIELECTRIC MATERIALS AND METHODS FOR MAKING SAME

Patent #:	7282084	Issue Dt:	10/16/2007	Application #:	10966803	Filing Dt:	10/15/2004
Publication #:	US20060081482	Pub Dt:	04/20/2006
Title:	LIQUID MEDIA CONTAINING LEWIS BASIC REACTIVE COMPOUNDS FOR STORAGE AND DELIVERY OF LEWIS ACIDIC GASES

Patent #:	7344988	Issue Dt:	03/18/2008	Application #:	10972616	Filing Dt:	10/26/2004
Publication #:	US20050194358	Pub Dt:	09/08/2005
Title:	ALUMINA ABRASIVE FOR CHEMICAL MECHANICAL POLISHING

Patent #:	7179878	Issue Dt:	02/20/2007	Application #:	10978542	Filing Dt:	11/01/2004
Publication #:	US20050240002	Pub Dt:	10/27/2005
Title:	POLY(ARYLENE ETHER) POLYMER WITH LOW TEMPERATURE OR UV CROSSLINKING GRAFTS AND DIELECTRIC COMPRISING THE SAME

Patent #:	NONE	Issue Dt:		Application #:	10984107	Filing Dt:	11/09/2004
Publication #:	US20050101160	Pub Dt:	05/12/2005
Title:	SILICON THIN FILM TRANSISTORS AND SOLAR CELLS ON PLASTIC SUBSTRATES

Patent #:	7727401	Issue Dt:	06/01/2010	Application #:	10984108	Filing Dt:	11/09/2004
Publication #:	US20060100470	Pub Dt:	05/11/2006
Title:	SELECTIVE PURIFICATION OF MONO-TERPENES FOR REMOVAL OF OXYGEN CONTAINING SPECIES

Patent #:	NONE	Issue Dt:		Application #:	10984251	Filing Dt:	11/09/2004
Publication #:	US20050124751	Pub Dt:	06/09/2005
Title:	Electro-optic assemblies and materials for use therein

Patent #:	7419911	Issue Dt:	09/02/2008	Application #:	10984820	Filing Dt:	11/10/2004
Publication #:	US20050178742	Pub Dt:	08/18/2005
Title:	COMPOSITIONS AND METHODS FOR RAPIDLY REMOVING OVERFILLED SUBSTRATES

Patent #:	7115430	Issue Dt:	10/03/2006	Application #:	10987723	Filing Dt:	11/12/2004
Publication #:	US20050070037	Pub Dt:	03/31/2005
Title:	NOVEL LIGHT EMITTING LAYERS FOR LED DEVICES BASED ON HIGH TG POLYMER MATRIX COMPOSITIONS

Patent #:	7285154	Issue Dt:	10/23/2007	Application #:	10996743	Filing Dt:	11/24/2004
Publication #:	US20060107831	Pub Dt:	05/25/2006
Title:	XENON RECOVERY SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	11000147	Filing Dt:	11/30/2004
Publication #:	US20060116313	Pub Dt:	06/01/2006
Title:	Compositions comprising tannic acid as corrosion inhibitor

Patent #:	7272453	Issue Dt:	09/18/2007	Application #:	11000148	Filing Dt:	11/30/2004
Publication #:	US20060116777	Pub Dt:	06/01/2006
Title:	METHOD AND APPARATUS FOR UTILIZING A SEQUENCE INTERPRETER APPROACH TO CONTROL LOGIC OF A PROGRAMMABLE LOGIC CONTROLLER

Patent #:	7064227	Issue Dt:	06/20/2006	Application #:	11008069	Filing Dt:	12/09/2004
Publication #:	US20060127578	Pub Dt:	06/15/2006
Title:	PRECURSORS FOR SILICA OR METAL SILICATE FILMS

Patent #:	6979252	Issue Dt:	12/27/2005	Application #:	11030503	Filing Dt:	01/06/2005
Title:	LOW DEFECTIVITY PRODUCT SLURRY FOR CMP AND ASSOCIATED PRODUCTION METHOD

Patent #:	NONE	Issue Dt:		Application #:	11032593	Filing Dt:	01/10/2005
Publication #:	US20050194563	Pub Dt:	09/08/2005
Title:	Bicine/tricine containing composition and method for chemical-mechanical planarization

Patent #:	7682458	Issue Dt:	03/23/2010	Application #:	11050562	Filing Dt:	02/03/2005
Publication #:	US20060172905	Pub Dt:	08/03/2006
Title:	AQUEOUS BASED RESIDUE REMOVERS COMPRISING FLUORIDE

Patent #:	7064224	Issue Dt:	06/20/2006	Application #:	11051140	Filing Dt:	02/04/2005
Title:	ORGANOMETALLIC COMPLEXES AND THEIR USE AS PRECURSORS TO DEPOSIT METAL FILMS

Patent #:	NONE	Issue Dt:		Application #:	11057446	Filing Dt:	02/14/2005
Publication #:	US20060182885	Pub Dt:	08/17/2006
Title:	Preparation of metal silicon nitride films via cyclic deposition

Patent #:	NONE	Issue Dt:		Application #:	11060371	Filing Dt:	02/18/2005
Publication #:	US20050196974	Pub Dt:	09/08/2005
Title:	COMPOSITIONS FOR PREPARING LOW DIELECTRIC MATERIALS CONTAINING SOLVENTS

Patent #:	NONE	Issue Dt:		Application #:	11065080	Filing Dt:	02/25/2005
Publication #:	US20050205835	Pub Dt:	09/22/2005
Title:	Alkaline post-chemical mechanical planarization cleaning compositions

Patent #:	NONE	Issue Dt:		Application #:	11070994	Filing Dt:	03/03/2005
Publication #:	US20060196525	Pub Dt:	09/07/2006
Title:	Method for removing a residue from a chamber

Patent #:	7446055	Issue Dt:	11/04/2008	Application #:	11082991	Filing Dt:	03/17/2005
Publication #:	US20060211271	Pub Dt:	09/21/2006
Title:	AEROSOL MISTED DEPOSITION OF LOW DIELECTRIC ORGANOSILICATE FILMS

Patent #:	NONE	Issue Dt:		Application #:	11095580	Filing Dt:	04/01/2005
Publication #:	US20050241671	Pub Dt:	11/03/2005
Title:	Method for removing a substance from a substrate using electron attachment

Patent #:	NONE	Issue Dt:		Application #:	11101815	Filing Dt:	04/08/2005
Publication #:	US20050215183	Pub Dt:	09/29/2005
Title:	Chemical-mechanical planarization composition having PVNO and associated method for use

Patent #:	7334595	Issue Dt:	02/26/2008	Application #:	11104012	Filing Dt:	04/12/2005
Publication #:	US20050229970	Pub Dt:	10/20/2005
Title:	CABINET FOR CHEMICAL DELIVERY WITH SOLVENT PURGING AND REMOVAL

Patent #:	7205422	Issue Dt:	04/17/2007	Application #:	11111452	Filing Dt:	04/21/2005
Publication #:	US20060145142	Pub Dt:	07/06/2006
Title:	VOLATILE METAL BETA-KETOIMINATE AND METAL BETA-DIIMINATE COMPLEXES

Patent #:	7034169	Issue Dt:	04/25/2006	Application #:	11111455	Filing Dt:	04/21/2005
Title:	VOLATILE METAL BETA-KETOIMINATE COMPLEXES

Patent #:	7264013	Issue Dt:	09/04/2007	Application #:	11128515	Filing Dt:	05/13/2005
Publication #:	US20060254645	Pub Dt:	11/16/2006
Title:	ENHANCED PURGE EFFECT IN GAS CONDUIT

Patent #:	7875556	Issue Dt:	01/25/2011	Application #:	11129862	Filing Dt:	05/16/2005
Publication #:	US20060258173	Pub Dt:	11/16/2006
Title:	PRECURSORS FOR CVD SILICON CARBO-NITRIDE AND SILICON NITRIDE FILMS

Patent #:	7316976	Issue Dt:	01/08/2008	Application #:	11132315	Filing Dt:	05/19/2005
Publication #:	US20050258139	Pub Dt:	11/24/2005
Title:	POLISHING METHOD TO REDUCE DISHING OF TUNGSTEN ON A DIELECTRIC

Patent #:	8231733	Issue Dt:	07/31/2012	Application #:	11139950	Filing Dt:	05/27/2005
Publication #:	US20050217697	Pub Dt:	10/06/2005
Title:	AQUEOUS STRIPPING AND CLEANING COMPOSITION

Patent #:	NONE	Issue Dt:		Application #:	11140463	Filing Dt:	05/27/2005
Publication #:	US20050279382	Pub Dt:	12/22/2005
Title:	Method for cleaning a process chamber

Patent #:	8030263	Issue Dt:	10/04/2011	Application #:	11155654	Filing Dt:	06/20/2005
Publication #:	US20060014656	Pub Dt:	01/19/2006
Title:	COMPOSITION FOR STRIPPING AND CLEANING AND USE THEREOF

100

Patent #:	7314823	Issue Dt:	01/01/2008	Application #:	11194467	Filing Dt:	08/02/2005
Publication #:	US20050266689	Pub Dt:	12/01/2005
Title:	CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS

Assignor

AIR PRODUCTS AND CHEMICALS, INC.

Exec Dt:

02/14/2017

Assignee

VERSUM MATERIALS US, LLC

8555 S. RIVER PARKWAY

TEMPE, ARIZONA 85284

Correspondence name and address
	LISA HOFFMANN
	7201 HAMILTON BLVD.
	ALLENTOWN, PA 18195

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