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Reel/Frame:	041772/0733			Pages:	35
		Recorded:	02/20/2017
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 764
Page 8 of 8
Pages: 1 2 3 4 5 6 7 8

Patent #:	9302214	Issue Dt:	04/05/2016	Application #:	14466194	Filing Dt:	08/22/2014
Publication #:	US20160051923	Pub Dt:	02/25/2016
Title:	Purification of Nitrogen Trifluoride By Pressure Swing Adsorption

Patent #:	9062230	Issue Dt:	06/23/2015	Application #:	14482590	Filing Dt:	09/10/2014
Publication #:	US20140374378	Pub Dt:	12/25/2014
Title:	Chemical Mechanical Polishing (CMP) Composition for Shallow Trench Isolation (STI) Applications and Methods of Making Thereof

Patent #:	10453675	Issue Dt:	10/22/2019	Application #:	14483751	Filing Dt:	09/11/2014
Publication #:	US20150087139	Pub Dt:	03/26/2015
Title:	ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPRISING SAME

Patent #:	9905415	Issue Dt:	02/27/2018	Application #:	14498044	Filing Dt:	09/26/2014
Publication #:	US20150099375	Pub Dt:	04/09/2015
Title:	Methods for Depositing Silicon Nitride Films

Patent #:	10892132	Issue Dt:	01/12/2021	Application #:	14498354	Filing Dt:	09/26/2014
Publication #:	US20150099416	Pub Dt:	04/09/2015
Title:	System and Method for Xenon Recovery

Patent #:	9574110	Issue Dt:	02/21/2017	Application #:	14502186	Filing Dt:	09/30/2014
Publication #:	US20150104941	Pub Dt:	04/16/2015
Title:	BARRIER CHEMICAL MECHANICAL PLANARIZATION COMPOSITION AND METHOD THEREOF

Patent #:	9627193	Issue Dt:	04/18/2017	Application #:	14511719	Filing Dt:	10/10/2014
Publication #:	US20150024608	Pub Dt:	01/22/2015
Title:	Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same

Patent #:	9224614	Issue Dt:	12/29/2015	Application #:	14530965	Filing Dt:	11/03/2014
Publication #:	US20150050809	Pub Dt:	02/19/2015
Title:	CMP Slurry/Method for Polishing Ruthenium and Other Films

Patent #:	9472420	Issue Dt:	10/18/2016	Application #:	14547864	Filing Dt:	11/19/2014
Publication #:	US20150175943	Pub Dt:	06/25/2015
Title:	Composition for Titanium Nitride Hard Mask and Etch Residue Removal

Patent #:	9528191	Issue Dt:	12/27/2016	Application #:	14560023	Filing Dt:	12/04/2014
Publication #:	US20150240367	Pub Dt:	08/27/2015
Title:	Electrolytic Apparatus, System and Method for the Efficient Production of Nitrogen Trifluoride

Patent #:	9649590	Issue Dt:	05/16/2017	Application #:	14567353	Filing Dt:	12/11/2014
Publication #:	US20150196870	Pub Dt:	07/16/2015
Title:	SYSTEM AND METHOD FOR GAS RECOVERY AND REUSE

Patent #:	9640386	Issue Dt:	05/02/2017	Application #:	14571943	Filing Dt:	12/16/2014
Publication #:	US20150147893	Pub Dt:	05/28/2015
Title:	Precursors for CVD Silicon Carbo-Nitride Films

Patent #:	9305806	Issue Dt:	04/05/2016	Application #:	14598472	Filing Dt:	01/16/2015
Publication #:	US20150132956	Pub Dt:	05/14/2015
Title:	Chemical Mechanical Polishing Slurry Compositions and Method Using the Same for Copper and Through-Silicon Via Applications

Patent #:	NONE	Issue Dt:		Application #:	14603878	Filing Dt:	01/23/2015
Publication #:	US20150140790	Pub Dt:	05/21/2015
Title:	Precursors For GST Films In ALD/CVD Processes

Patent #:	9233990	Issue Dt:	01/12/2016	Application #:	14625158	Filing Dt:	02/18/2015
Publication #:	US20150246937	Pub Dt:	09/03/2015
Title:	ORGANOAMINOSILANES AND METHODS FOR MAKING SAME

Patent #:	9222018	Issue Dt:	12/29/2015	Application #:	14642831	Filing Dt:	03/10/2015
Title:	Titanium Nitride Hard Mask and Etch Residue Removal

Patent #:	NONE	Issue Dt:		Application #:	14661652	Filing Dt:	03/18/2015
Publication #:	US20150275355	Pub Dt:	10/01/2015
Title:	COMPOSITIONS AND METHODS FOR THE DEPOSITION OF SILICON OXIDE FILMS

Patent #:	9305476	Issue Dt:	04/05/2016	Application #:	14709609	Filing Dt:	05/12/2015
Publication #:	US20150247063	Pub Dt:	09/03/2015
Title:	CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION FOR SHALLOW TRENCH ISOLATION (STI) APPLICATIONS AND METHODS OF MAKING THEREOF

Patent #:	9922818	Issue Dt:	03/20/2018	Application #:	14732250	Filing Dt:	06/05/2015
Publication #:	US20150364321	Pub Dt:	12/17/2015
Title:	ALKYL-ALKOXYSILACYCLIC COMPOUNDS

Patent #:	9580293	Issue Dt:	02/28/2017	Application #:	14744133	Filing Dt:	06/19/2015
Publication #:	US20150368087	Pub Dt:	12/24/2015
Title:	DIPTUBE DESIGN FOR A HOST AMPOULE

Patent #:	9957469	Issue Dt:	05/01/2018	Application #:	14790966	Filing Dt:	07/02/2015
Publication #:	US20160010035	Pub Dt:	01/14/2016
Title:	COPPER CORROSION INHIBITION SYSTEM

Patent #:	10217645	Issue Dt:	02/26/2019	Application #:	14800323	Filing Dt:	07/15/2015
Publication #:	US20160027657	Pub Dt:	01/28/2016
Title:	Chemical Mechanical Polishing (CMP) of Colbalt-Containing Substrate

Patent #:	NONE	Issue Dt:		Application #:	14820982	Filing Dt:	08/07/2015
Publication #:	US20160049293	Pub Dt:	02/18/2016
Title:	METHOD AND COMPOSITION FOR PROVIDING PORE SEALING LAYER ON POROUS LOW DIELECTRIC CONSTANT FILMS

Patent #:	9738982	Issue Dt:	08/22/2017	Application #:	14822299	Filing Dt:	08/10/2015
Publication #:	US20150345037	Pub Dt:	12/03/2015
Title:	Divided Electrochemical Cell and Low Cost High Purity Hydride Gas Production Process

Patent #:	10151618	Issue Dt:	12/11/2018	Application #:	14823027	Filing Dt:	08/11/2015
Publication #:	US20160061645	Pub Dt:	03/03/2016
Title:	ULTRASONIC LIQUID LEVEL SENSING SYSTEMS

Patent #:	10354860	Issue Dt:	07/16/2019	Application #:	14871233	Filing Dt:	09/30/2015
Publication #:	US20160225616	Pub Dt:	08/04/2016
Title:	METHOD AND PRECURSORS FOR MANUFACTURING 3D DEVICES

Patent #:	NONE	Issue Dt:		Application #:	14884104	Filing Dt:	10/15/2015
Publication #:	US20160122590	Pub Dt:	05/05/2016
Title:	Chemical Mechanical Polishing Slurry for Reducing Corrosion and Method of Use Therefor

Patent #:	9879340	Issue Dt:	01/30/2018	Application #:	14924098	Filing Dt:	10/27/2015
Publication #:	US20160122869	Pub Dt:	05/05/2016
Title:	SILICON-BASED FILMS AND METHODS OF FORMING THE SAME

Patent #:	9677178	Issue Dt:	06/13/2017	Application #:	14940249	Filing Dt:	11/13/2015
Publication #:	US20160083847	Pub Dt:	03/24/2016
Title:	ALKOXYAMINOSILANE COMPOUNDS AND APPLICATIONS THEREOF

Patent #:	9543517	Issue Dt:	01/10/2017	Application #:	14940340	Filing Dt:	11/13/2015
Publication #:	US20160087207	Pub Dt:	03/24/2016
Title:	METHOD OF MAKING A MULTICOMPONENT FILM

Patent #:	10317136	Issue Dt:	06/11/2019	Application #:	14940612	Filing Dt:	11/13/2015
Publication #:	US20160069612	Pub Dt:	03/10/2016
Title:	Onsite Ultra High Purity Chemicals or Gas Purification

Patent #:	10373842	Issue Dt:	08/06/2019	Application #:	14947711	Filing Dt:	11/20/2015
Publication #:	US20170372918	Pub Dt:	12/28/2017
Title:	Composition and Method Used for Chemical Mechanical Planarization of Metals

Patent #:	9758534	Issue Dt:	09/12/2017	Application #:	14956748	Filing Dt:	12/02/2015
Publication #:	US20160168169	Pub Dt:	06/16/2016
Title:	ORGANOAMINOSILANES AND METHODS FOR MAKING SAME

Patent #:	10222000	Issue Dt:	03/05/2019	Application #:	14961207	Filing Dt:	12/07/2015
Publication #:	US20160084444	Pub Dt:	03/24/2016
Title:	Vessels with Personnel Access Provisions

Patent #:	10073351	Issue Dt:	09/11/2018	Application #:	14964033	Filing Dt:	12/09/2015
Publication #:	US20160179011	Pub Dt:	06/23/2016
Title:	SEMI-AQUEOUS PHOTORESIST OR SEMICONDUCTOR MANUFACTURING RESIDUE STRIPPING AND CLEANING COMPOSITION WITH IMPROVED SILICON PASSIVATION

Patent #:	10301580	Issue Dt:	05/28/2019	Application #:	14976737	Filing Dt:	12/21/2015
Publication #:	US20160186105	Pub Dt:	06/30/2016
Title:	Stripping Compositions Having High WN/W Etching Selectivity

Patent #:	9873833	Issue Dt:	01/23/2018	Application #:	14978383	Filing Dt:	12/22/2015
Publication #:	US20160186058	Pub Dt:	06/30/2016
Title:	Etchant Solutions and Method of Use Thereof

Patent #:	10109493	Issue Dt:	10/23/2018	Application #:	14993128	Filing Dt:	01/12/2016
Publication #:	US20160200944	Pub Dt:	07/14/2016
Title:	Composite Abrasive Particles For Chemical Mechanical Planarization Composition and Method of Use Thereof

Patent #:	9978609	Issue Dt:	05/22/2018	Application #:	15001846	Filing Dt:	01/20/2016
Publication #:	US20160314989	Pub Dt:	10/27/2016
Title:	LOW DISHING COPPER CHEMICAL MECHANICAL PLANARIZATION

Patent #:	9463978	Issue Dt:	10/11/2016	Application #:	15013224	Filing Dt:	02/02/2016
Publication #:	US20160145102	Pub Dt:	05/26/2016
Title:	PROCESS FOR MAKING TRISILYLAMINE

Patent #:	10570313	Issue Dt:	02/25/2020	Application #:	15014210	Filing Dt:	02/03/2016
Publication #:	US20160237315	Pub Dt:	08/18/2016
Title:	DISHING REDUCING IN TUNGSTEN CHEMICAL MECHANICAL POLISHING

Patent #:	10421766	Issue Dt:	09/24/2019	Application #:	15017913	Filing Dt:	02/08/2016
Publication #:	US20160237100	Pub Dt:	08/18/2016
Title:	BISAMINOALKOXYSILANE COMPOUNDS AND METHODS FOR USING SAME TO DEPOSIT SILICON-CONTAINING FILMS

Patent #:	NONE	Issue Dt:		Application #:	15018564	Filing Dt:	02/08/2016
Publication #:	US20160152930	Pub Dt:	06/02/2016
Title:	Stripping and Cleaning Compositions for Removal of Thick Film Resist

Patent #:	10011741	Issue Dt:	07/03/2018	Application #:	15058268	Filing Dt:	03/02/2016
Publication #:	US20160177134	Pub Dt:	06/23/2016
Title:	CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION FOR SHALLOW TRENCH ISOLATION (STI) APPLICATIONS AND METHODS OF MAKING THEREOF

Patent #:	10160884	Issue Dt:	12/25/2018	Application #:	15070590	Filing Dt:	03/15/2016
Publication #:	US20160280962	Pub Dt:	09/29/2016
Title:	Metal Compound Chemically Anchored Colloidal Particles and Methods of Production and Use Thereof

Patent #:	9613799	Issue Dt:	04/04/2017	Application #:	15073899	Filing Dt:	03/18/2016
Publication #:	US20160203975	Pub Dt:	07/14/2016
Title:	METHODS FOR DEPOSITING FILMS WITH ORGANOAMINODISILANE PRECURSORS

Patent #:	10332784	Issue Dt:	06/25/2019	Application #:	15077374	Filing Dt:	03/22/2016
Publication #:	US20160293479	Pub Dt:	10/06/2016
Title:	Selectively Removing Titanium Nitride Hard Mask and Etch Residue Removal

Patent #:	10763103	Issue Dt:	09/01/2020	Application #:	15079585	Filing Dt:	03/24/2016
Publication #:	US20160293410	Pub Dt:	10/06/2016
Title:	BORON-CONTAINING COMPOUNDS, COMPOSITIONS, AND METHODS FOR THE DEPOSITION OF A BORON CONTAINING FILMS

Patent #:	9550260	Issue Dt:	01/24/2017	Application #:	15079708	Filing Dt:	03/24/2016
Publication #:	US20160207153	Pub Dt:	07/21/2016
Title:	ULTRASONIC LIQUID LEVEL SENSING SYSTEMS

Patent #:	9976037	Issue Dt:	05/22/2018	Application #:	15084169	Filing Dt:	03/29/2016
Publication #:	US20160289455	Pub Dt:	10/06/2016
Title:	COMPOSITION FOR TREATING SURFACE OF SUBSTRATE, METHOD AND DEVICE

Patent #:	10443128	Issue Dt:	10/15/2019	Application #:	15094551	Filing Dt:	04/08/2016
Publication #:	US20160305019	Pub Dt:	10/20/2016
Title:	VESSEL AND METHOD FOR DELIVERY OF PRECURSOR MATERIALS

Patent #:	10100406	Issue Dt:	10/16/2018	Application #:	15096872	Filing Dt:	04/12/2016
Publication #:	US20160305020	Pub Dt:	10/20/2016
Title:	HIGH PURITY TUNGSTEN HEXACHLORIDE AND METHOD FOR MAKING SAME

Patent #:	9976111	Issue Dt:	05/22/2018	Application #:	15138835	Filing Dt:	04/26/2016
Publication #:	US20170107460	Pub Dt:	04/20/2017
Title:	TIN HARD MASK AND ETCH RESIDUAL REMOVAL

Patent #:	10563305	Issue Dt:	02/18/2020	Application #:	15142847	Filing Dt:	04/29/2016
Publication #:	US20160333477	Pub Dt:	11/17/2016
Title:	CONTAINER FOR CHEMICAL PRECURSORS IN A DEPOSITION PROCESS

Patent #:	10032644	Issue Dt:	07/24/2018	Application #:	15166605	Filing Dt:	05/27/2016
Publication #:	US20160358790	Pub Dt:	12/08/2016
Title:	Barrier Chemical Mechanical Planarization Slurries Using Ceria-Coated Silica Abrasives

Patent #:	10418247	Issue Dt:	09/17/2019	Application #:	15208334	Filing Dt:	07/12/2016
Publication #:	US20170133236	Pub Dt:	05/11/2017
Title:	COMPOSITE ABRASIVE PARTICLES FOR CHEMICAL MECHANICAL PLANARIZATION COMPOSITION AND METHOD OF USE THEREOF

Patent #:	10745808	Issue Dt:	08/18/2020	Application #:	15210172	Filing Dt:	07/14/2016
Publication #:	US20170022612	Pub Dt:	01/26/2017
Title:	Methods For Depositing Group 13 Metal or Metalloid Nitride Films

Patent #:	10072237	Issue Dt:	09/11/2018	Application #:	15227450	Filing Dt:	08/03/2016
Publication #:	US20170037344	Pub Dt:	02/09/2017
Title:	Photoresist Cleaning Composition Used in Photolithography and a Method for Treating Substrate Therewith

Patent #:	10319584	Issue Dt:	06/11/2019	Application #:	15233018	Filing Dt:	08/10/2016
Publication #:	US20160351389	Pub Dt:	12/01/2016
Title:	Compositions and Processes for Depositing Carbon-Doped Silicon-Containing Films

Patent #:	10242864	Issue Dt:	03/26/2019	Application #:	15248214	Filing Dt:	08/26/2016
Publication #:	US20170256399	Pub Dt:	09/07/2017
Title:	High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films

Patent #:	10233413	Issue Dt:	03/19/2019	Application #:	15264078	Filing Dt:	09/13/2016
Publication #:	US20170081622	Pub Dt:	03/23/2017
Title:	Cleaning Formulations

Patent #:	10144850	Issue Dt:	12/04/2018	Application #:	15268956	Filing Dt:	09/19/2016
Publication #:	US20170088748	Pub Dt:	03/30/2017
Title:	STOP-ON SILICON CONTAINING LAYER ADDITIVE

Patent #:	10400167	Issue Dt:	09/03/2019	Application #:	15357527	Filing Dt:	11/21/2016
Publication #:	US20170145311	Pub Dt:	05/25/2017
Title:	Etching Compositions and Methods for Using Same

Patent #:	NONE	Issue Dt:		Application #:	15419395	Filing Dt:	01/30/2017
Publication #:	US20170137936	Pub Dt:	05/18/2017
Title:	Vessel With Filter

Assignor

AIR PRODUCTS AND CHEMICALS, INC.

Exec Dt:

02/14/2017

Assignee

VERSUM MATERIALS US, LLC

8555 S. RIVER PARKWAY

TEMPE, ARIZONA 85284

Correspondence name and address
	LISA HOFFMANN
	7201 HAMILTON BLVD.
	ALLENTOWN, PA 18195

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