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Reel/Frame:013506/0749   Pages: 12
Recorded: 11/26/2002
Conveyance: SECURITY AGREEMENT
Total properties: 50
1
Patent #:
4464223
Issue Dt:
08/07/1984
Application #:
06538593
Filing Dt:
10/03/1983
Title:
PLASMA REACTOR APPARATUS AND METHOD
2
Patent #:
4632624
Issue Dt:
12/30/1986
Application #:
06588027
Filing Dt:
03/09/1984
Title:
VACUUM LOAD LOCK APPARATUS
3
Patent #:
4611919
Issue Dt:
09/16/1986
Application #:
06588028
Filing Dt:
03/09/1984
Title:
PROCESS MONITOR AND METHOD THEREOF
4
Patent #:
4801241
Issue Dt:
01/31/1989
Application #:
06588029
Filing Dt:
03/09/1984
Title:
MODULAR ARTICLE PROCESSING MACHINE AND METHOD OF ARTICLE HANDLING THEREIN
5
Patent #:
4619573
Issue Dt:
10/28/1986
Application #:
06588030
Filing Dt:
03/09/1984
Title:
ARTICLE TRANSPORT APPARATUS
6
Patent #:
4585920
Issue Dt:
04/29/1986
Application #:
06658468
Filing Dt:
10/09/1984
Title:
PLASMA REACTOR REMOVABLE INSERT
7
Patent #:
4579618
Issue Dt:
04/01/1986
Application #:
06665098
Filing Dt:
10/29/1984
Title:
PLASMA REACTOR APPARATUS
8
Patent #:
4585516
Issue Dt:
04/29/1986
Application #:
06707639
Filing Dt:
03/04/1985
Title:
VARIABLE DUTY CYCLE, MULTIPLE FREQUENCY, PLASMA REACTOR
9
Patent #:
4624728
Issue Dt:
11/25/1986
Application #:
06743341
Filing Dt:
06/11/1985
Title:
PIN LIFT PLASMA PROCESSING
10
Patent #:
4687543
Issue Dt:
08/18/1987
Application #:
06832047
Filing Dt:
02/21/1986
Title:
SELECTIVE PLASMA ETCHING DURING FORMATION OF INTEGRATED CIRCUITRY
11
Patent #:
4697089
Issue Dt:
09/29/1987
Application #:
06875820
Filing Dt:
06/18/1986
Title:
DUAL WAVELENGTH SENSOR WHICH EMPLOYS OBJECT AS PART OF A CORNER REFLECTOR
12
Patent #:
4720628
Issue Dt:
01/19/1988
Application #:
06923367
Filing Dt:
10/27/1986
Title:
OPTICAL PROCESS FOR DETERMINING THE END POINT OF A PROCESS VIA ANALOG MULTIPLICATION OF PHOTOCELL SIGNALS
13
Patent #:
4724510
Issue Dt:
02/09/1988
Application #:
06941234
Filing Dt:
12/12/1986
Title:
ELECTROSTATIC WAFER CLAMP
14
Patent #:
4727993
Issue Dt:
03/01/1988
Application #:
07018770
Filing Dt:
03/02/1987
Title:
WAFER CASSETTS HAVING MULTI-DIRECTIONAL ACCDSS
15
Patent #:
4790258
Issue Dt:
12/13/1988
Application #:
07034121
Filing Dt:
04/03/1987
Title:
MAGNETICALLY COUPLED WAFER LIFT PINS
16
Patent #:
4793975
Issue Dt:
12/27/1988
Application #:
07045260
Filing Dt:
04/24/1987
Title:
PLASMA REACTOR WITH REMOVABLE INSERT
17
Patent #:
4780169
Issue Dt:
10/25/1988
Application #:
07048344
Filing Dt:
05/11/1987
Title:
NON-UNIFORM GAS INLET FOR DRY ETCHING APPARATUS
18
Patent #:
4786359
Issue Dt:
11/22/1988
Application #:
07065746
Filing Dt:
06/24/1987
Title:
XENON ENHANCED PLASMA ETCH
19
Patent #:
4867631
Issue Dt:
09/19/1989
Application #:
07185730
Filing Dt:
04/25/1988
Title:
SPATULA FOR WAFER TRANSPORT
20
Patent #:
4888088
Issue Dt:
12/19/1989
Application #:
07319020
Filing Dt:
03/06/1989
Title:
IGNITOR FOR A MICROWAVE SUSTAINED PLASMA
21
Patent #:
4889588
Issue Dt:
12/26/1989
Application #:
07345795
Filing Dt:
05/01/1989
Title:
PLASMA ETCH ISOTROPY CONTROL
22
Patent #:
4984954
Issue Dt:
01/15/1991
Application #:
07563742
Filing Dt:
08/03/1990
Title:
SPATULA FOR WAFER TRANSPORT
23
Patent #:
5672239
Issue Dt:
09/30/1997
Application #:
08438261
Filing Dt:
05/10/1995
Title:
INTEGRATED SEMICONDUCTOR WAFER PROCESSING SYSTEM
24
Patent #:
5985089
Issue Dt:
11/16/1999
Application #:
08450369
Filing Dt:
05/25/1995
Title:
PLASMA ETCH SYSTEM
25
Patent #:
6048435
Issue Dt:
04/11/2000
Application #:
08675093
Filing Dt:
07/03/1996
Title:
PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
26
Patent #:
6500314
Issue Dt:
12/31/2002
Application #:
08675559
Filing Dt:
07/03/1996
Title:
PLASMA ETCH REACTOR AND METHOD
27
Patent #:
6127277
Issue Dt:
10/03/2000
Application #:
08742861
Filing Dt:
11/01/1996
Title:
METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR WAFER WITH FEATURES HAVING VERTICAL SIDEWALLS
28
Patent #:
5958139
Issue Dt:
09/28/1999
Application #:
08850224
Filing Dt:
05/02/1997
Title:
PLASMA ETCH SYSTEM
29
Patent #:
6046116
Issue Dt:
04/04/2000
Application #:
08974089
Filing Dt:
11/19/1997
Title:
A METHOD FOR MINIMIZING THE CRITICAL DIMENSION GROWTH OF A FEATURE ON A SEMICONDUCTOR WAFER
30
Patent #:
6287975
Issue Dt:
09/11/2001
Application #:
09009369
Filing Dt:
01/20/1998
Title:
METHOD FOR USING A HARD MASK FOR CRITICAL DIMENSION GROWTH CONTAINMENT
31
Patent #:
NONE
Issue Dt:
Application #:
09086105
Filing Dt:
05/28/1998
Publication #:
US20010001413
Pub Dt:
05/24/2001
Title:
METHOD AND APPARATUS FOR INCREASING WAFER THROUGHPUT BETWEEN CLEANINGS IN SEMICONDUCTOR PROCESSING REACTORS
32
Patent #:
6346428
Issue Dt:
02/12/2002
Application #:
09135210
Filing Dt:
08/17/1998
Title:
METHOD AND APPARATUS FOR MINIMIZING SEMICONDUCTOR WAFER ARCING DURING SEMICONDUCTOR WAFER PROCESSING
33
Patent #:
6354240
Issue Dt:
03/12/2002
Application #:
09152238
Filing Dt:
09/11/1998
Title:
PLASMA ETCH REACTOR HAVING A PLURALITY OF MAGNETS (AS AMENDED)
34
Patent #:
6006694
Issue Dt:
12/28/1999
Application #:
09204020
Filing Dt:
12/01/1998
Title:
PLASMA REACTOR WITH A DEPOSITION SHIELD
35
Patent #:
6360686
Issue Dt:
03/26/2002
Application #:
09382050
Filing Dt:
08/24/1999
Title:
PLASMA REACTOR WITH A DEPOSITION SHIELD
36
Patent #:
6190496
Issue Dt:
02/20/2001
Application #:
09384614
Filing Dt:
08/27/1999
Title:
PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
37
Patent #:
6410448
Issue Dt:
06/25/2002
Application #:
09384858
Filing Dt:
08/27/1999
Title:
PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
38
Patent #:
6120610
Issue Dt:
09/19/2000
Application #:
09412873
Filing Dt:
10/05/1999
Title:
PLASMA ETCH SYSTEM
39
Patent #:
6173674
Issue Dt:
01/16/2001
Application #:
09434092
Filing Dt:
11/05/1999
Title:
PLASMA REACTOR WITH A DEPOSITION SHIELD
40
Patent #:
6170431
Issue Dt:
01/09/2001
Application #:
09434990
Filing Dt:
11/05/1999
Title:
PLASMA REACTOR WITH A DEPOSITION SHIELD
41
Patent #:
6486069
Issue Dt:
11/26/2002
Application #:
09454814
Filing Dt:
12/03/1999
Title:
COBALT SILICIDE ETCH PROCESS AND APPARATUS
42
Patent #:
6620335
Issue Dt:
09/16/2003
Application #:
09455641
Filing Dt:
12/07/1999
Title:
PLASMA ETCH REACTOR AND METHOD
43
Patent #:
6492280
Issue Dt:
12/10/2002
Application #:
09517387
Filing Dt:
03/02/2000
Title:
METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR WAFER WITH FEATURES HAVING VERTICAL SIDEWALLS
44
Patent #:
6958295
Issue Dt:
10/25/2005
Application #:
09692007
Filing Dt:
10/19/2000
Title:
METHOD FOR USING A HARD MASK FOR CRITICAL DIMENSION GROWTH CONTAINMENT
45
Patent #:
6406925
Issue Dt:
06/18/2002
Application #:
09712707
Filing Dt:
11/14/2000
Title:
METHOD AND APPARATUS FOR MINIMIZING SEMICONDUCTOR WAFER ARCING DURING SEMICONDUCTOR WAFER PROCESSING
46
Patent #:
6391148
Issue Dt:
05/21/2002
Application #:
09760402
Filing Dt:
01/12/2001
Publication #:
US20010003676
Pub Dt:
06/14/2001
Title:
COBALT SILICIDE ETCH PROCESS AND APPARATUS
47
Patent #:
6774046
Issue Dt:
08/10/2004
Application #:
09880584
Filing Dt:
06/13/2001
Publication #:
US20010031561
Pub Dt:
10/18/2001
Title:
METHOD FOR MINIMIZING THE CRITICAL DIMENSION GROWTH OF A FEATURE ON A SEMICONDUCTOR WAFER
48
Patent #:
6521081
Issue Dt:
02/18/2003
Application #:
09881425
Filing Dt:
06/14/2001
Publication #:
US20010029894
Pub Dt:
10/18/2001
Title:
DEPOSITION SHIELD FOR A PLASMA REACTOR
49
Patent #:
7439188
Issue Dt:
10/21/2008
Application #:
09888365
Filing Dt:
06/22/2001
Publication #:
US20020036064
Pub Dt:
03/28/2002
Title:
REACTOR WITH HEATED AND TEXTURED ELECTRODES AND SURFACES
50
Patent #:
6951820
Issue Dt:
10/04/2005
Application #:
10045318
Filing Dt:
11/09/2001
Publication #:
US20020132485
Pub Dt:
09/19/2002
Title:
METHOD FOR USING A HARD MASK FOR CRITICAL DIMENSION GROWTH CONTAINMENT
Assignor
1
TEGAL CORPORATION
Exec Dt:
06/26/2002
Assignee
1
SILICON VALLEY BANK
3003 TASMAN DRIVE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
LEVY, SMALL & LALLAS
ATTN: ROBIN C. DUNN
815 MORAGA DRIVE
LOS ANGELES, CALIFORNIA 90049

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