Total properties:
30
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Patent #:
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Issue Dt:
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Application #:
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06040604
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Filing Dt:
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Title:
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Patent #:
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Issue Dt:
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03/23/1982
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Application #:
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06134015
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Filing Dt:
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03/25/1980
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Title:
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PACKAGE AND STERILIZING PROCESS FOR SAME
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Patent #:
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Issue Dt:
|
11/02/1982
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Application #:
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06205402
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Filing Dt:
|
11/10/1980
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Title:
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APPARATUS FOR CONTROLLING A PLASMA REACTION
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Patent #:
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Issue Dt:
|
08/07/1984
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Application #:
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06538593
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Filing Dt:
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10/03/1983
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Title:
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PLASMA REACTOR APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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12/30/1986
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Application #:
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06588027
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Filing Dt:
|
03/09/1984
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Title:
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VACUUM LOAD LOCK APPARATUS
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Patent #:
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Issue Dt:
|
09/16/1986
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Application #:
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06588028
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Filing Dt:
|
03/09/1984
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Title:
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PROCESS MONITOR AND METHOD THEREOF
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Patent #:
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Issue Dt:
|
01/31/1989
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Application #:
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06588029
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Filing Dt:
|
03/09/1984
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Title:
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MODULAR ARTICLE PROCESSING MACHINE AND METHOD OF ARTICLE HANDLING THEREIN
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Patent #:
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Issue Dt:
|
10/28/1986
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Application #:
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06588030
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Filing Dt:
|
03/09/1984
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Title:
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ARTICLE TRANSPORT APPARATUS
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Patent #:
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|
Issue Dt:
|
04/29/1986
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Application #:
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06658468
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Filing Dt:
|
10/09/1984
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Title:
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PLASMA REACTOR REMOVABLE INSERT
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|
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Patent #:
|
|
Issue Dt:
|
04/01/1986
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Application #:
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06665098
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Filing Dt:
|
10/29/1984
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Title:
|
PLASMA REACTOR APPARATUS
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Patent #:
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|
Issue Dt:
|
04/29/1986
|
Application #:
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06707639
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Filing Dt:
|
03/04/1985
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Title:
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VARIABLE DUTY CYCLE, MULTIPLE FREQUENCY, PLASMA REACTOR
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Patent #:
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|
Issue Dt:
|
11/25/1986
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Application #:
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06743341
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Filing Dt:
|
06/11/1985
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Title:
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PIN LIFT PLASMA PROCESSING
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Patent #:
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|
Issue Dt:
|
08/18/1987
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Application #:
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06832047
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Filing Dt:
|
02/21/1986
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Title:
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SELECTIVE PLASMA ETCHING DURING FORMATION OF INTEGRATED CIRCUITRY
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|
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Patent #:
|
|
Issue Dt:
|
09/29/1987
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Application #:
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06875820
|
Filing Dt:
|
06/18/1986
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Title:
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DUAL WAVELENGTH SENSOR WHICH EMPLOYS OBJECT AS PART OF A CORNER REFLECTOR
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Patent #:
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|
Issue Dt:
|
01/19/1988
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Application #:
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06923367
|
Filing Dt:
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10/27/1986
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Title:
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OPTICAL PROCESS FOR DETERMINING THE END POINT OF A PROCESS VIA ANALOG MULTIPLICATION OF PHOTOCELL SIGNALS
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|
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Patent #:
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|
Issue Dt:
|
02/09/1988
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Application #:
|
06941234
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Filing Dt:
|
12/12/1986
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Title:
|
ELECTROSTATIC WAFER CLAMP
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|
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Patent #:
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|
Issue Dt:
|
03/01/1988
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Application #:
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07018770
|
Filing Dt:
|
03/02/1987
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Title:
|
WAFER CASSETTS HAVING MULTI-DIRECTIONAL ACCDSS
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|
|
Patent #:
|
|
Issue Dt:
|
12/13/1988
|
Application #:
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07034121
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Filing Dt:
|
04/03/1987
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Title:
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MAGNETICALLY COUPLED WAFER LIFT PINS
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|
|
Patent #:
|
|
Issue Dt:
|
12/27/1988
|
Application #:
|
07045260
|
Filing Dt:
|
04/24/1987
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Title:
|
PLASMA REACTOR WITH REMOVABLE INSERT
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|
|
Patent #:
|
|
Issue Dt:
|
10/25/1988
|
Application #:
|
07048344
|
Filing Dt:
|
05/11/1987
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Title:
|
NON-UNIFORM GAS INLET FOR DRY ETCHING APPARATUS
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|
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Patent #:
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|
Issue Dt:
|
11/22/1988
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Application #:
|
07065746
|
Filing Dt:
|
06/24/1987
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Title:
|
XENON ENHANCED PLASMA ETCH
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|
|
Patent #:
|
|
Issue Dt:
|
09/19/1989
|
Application #:
|
07185730
|
Filing Dt:
|
04/25/1988
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Title:
|
SPATULA FOR WAFER TRANSPORT
|
|
|
Patent #:
|
|
Issue Dt:
|
12/19/1989
|
Application #:
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07319020
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Filing Dt:
|
03/06/1989
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Title:
|
IGNITOR FOR A MICROWAVE SUSTAINED PLASMA
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|
|
Patent #:
|
|
Issue Dt:
|
12/26/1989
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Application #:
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07345795
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Filing Dt:
|
05/01/1989
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Title:
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PLASMA ETCH ISOTROPY CONTROL
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|
|
Patent #:
|
|
Issue Dt:
|
01/15/1991
|
Application #:
|
07563742
|
Filing Dt:
|
08/03/1990
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Title:
|
SPATULA FOR WAFER TRANSPORT
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/1997
|
Application #:
|
08438261
|
Filing Dt:
|
05/10/1995
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Title:
|
INTEGRATED SEMICONDUCTOR WAFER PROCESSING SYSTEM
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|
|
Patent #:
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|
Issue Dt:
|
11/16/1999
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Application #:
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08450369
|
Filing Dt:
|
05/25/1995
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Title:
|
PLASMA ETCH SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/1999
|
Application #:
|
08850224
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Filing Dt:
|
05/02/1997
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Title:
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PLASMA ETCH SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/28/1999
|
Application #:
|
09204020
|
Filing Dt:
|
12/01/1998
|
Title:
|
PLASMA REACTOR WITH A DEPOSITION SHIELD
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|
|
Patent #:
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Issue Dt:
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|
Application #:
|
UNAVAILABLE
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Filing Dt:
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Title:
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