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Patent Assignment Details
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Reel/Frame:014242/0813   Pages: 17
Recorded: 07/21/2003
Conveyance: SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 43
1
Patent #:
4209357
Issue Dt:
Application #:
06040604
Filing Dt:
Title:
2
Patent #:
4263088
Issue Dt:
04/21/1981
Application #:
06051661
Filing Dt:
06/25/1979
Title:
METHOD FOR PROCESS CONTROL OF A PLASMA REACTION
3
Patent #:
4464223
Issue Dt:
08/07/1984
Application #:
06538593
Filing Dt:
10/03/1983
Title:
PLASMA REACTOR APPARATUS AND METHOD
4
Patent #:
4632624
Issue Dt:
12/30/1986
Application #:
06588027
Filing Dt:
03/09/1984
Title:
VACUUM LOAD LOCK APPARATUS
5
Patent #:
4611919
Issue Dt:
09/16/1986
Application #:
06588028
Filing Dt:
03/09/1984
Title:
PROCESS MONITOR AND METHOD THEREOF
6
Patent #:
4801241
Issue Dt:
01/31/1989
Application #:
06588029
Filing Dt:
03/09/1984
Title:
MODULAR ARTICLE PROCESSING MACHINE AND METHOD OF ARTICLE HANDLING THEREIN
7
Patent #:
4619573
Issue Dt:
10/28/1986
Application #:
06588030
Filing Dt:
03/09/1984
Title:
ARTICLE TRANSPORT APPARATUS
8
Patent #:
4585920
Issue Dt:
04/29/1986
Application #:
06658468
Filing Dt:
10/09/1984
Title:
PLASMA REACTOR REMOVABLE INSERT
9
Patent #:
4579618
Issue Dt:
04/01/1986
Application #:
06665098
Filing Dt:
10/29/1984
Title:
PLASMA REACTOR APPARATUS
10
Patent #:
4585516
Issue Dt:
04/29/1986
Application #:
06707639
Filing Dt:
03/04/1985
Title:
VARIABLE DUTY CYCLE, MULTIPLE FREQUENCY, PLASMA REACTOR
11
Patent #:
4624728
Issue Dt:
11/25/1986
Application #:
06743341
Filing Dt:
06/11/1985
Title:
PIN LIFT PLASMA PROCESSING
12
Patent #:
4687543
Issue Dt:
08/18/1987
Application #:
06832047
Filing Dt:
02/21/1986
Title:
SELECTIVE PLASMA ETCHING DURING FORMATION OF INTEGRATED CIRCUITRY
13
Patent #:
4697089
Issue Dt:
09/29/1987
Application #:
06875820
Filing Dt:
06/18/1986
Title:
DUAL WAVELENGTH SENSOR WHICH EMPLOYS OBJECT AS PART OF A CORNER REFLECTOR
14
Patent #:
4720628
Issue Dt:
01/19/1988
Application #:
06923367
Filing Dt:
10/27/1986
Title:
OPTICAL PROCESS FOR DETERMINING THE END POINT OF A PROCESS VIA ANALOG MULTIPLICATION OF PHOTOCELL SIGNALS
15
Patent #:
4724510
Issue Dt:
02/09/1988
Application #:
06941234
Filing Dt:
12/12/1986
Title:
ELECTROSTATIC WAFER CLAMP
16
Patent #:
4727993
Issue Dt:
03/01/1988
Application #:
07018770
Filing Dt:
03/02/1987
Title:
WAFER CASSETTS HAVING MULTI-DIRECTIONAL ACCDSS
17
Patent #:
4790258
Issue Dt:
12/13/1988
Application #:
07034121
Filing Dt:
04/03/1987
Title:
MAGNETICALLY COUPLED WAFER LIFT PINS
18
Patent #:
4793975
Issue Dt:
12/27/1988
Application #:
07045260
Filing Dt:
04/24/1987
Title:
PLASMA REACTOR WITH REMOVABLE INSERT
19
Patent #:
4780169
Issue Dt:
10/25/1988
Application #:
07048344
Filing Dt:
05/11/1987
Title:
NON-UNIFORM GAS INLET FOR DRY ETCHING APPARATUS
20
Patent #:
4786359
Issue Dt:
11/22/1988
Application #:
07065746
Filing Dt:
06/24/1987
Title:
XENON ENHANCED PLASMA ETCH
21
Patent #:
4867631
Issue Dt:
09/19/1989
Application #:
07185730
Filing Dt:
04/25/1988
Title:
SPATULA FOR WAFER TRANSPORT
22
Patent #:
4888088
Issue Dt:
12/19/1989
Application #:
07319020
Filing Dt:
03/06/1989
Title:
IGNITOR FOR A MICROWAVE SUSTAINED PLASMA
23
Patent #:
4889588
Issue Dt:
12/26/1989
Application #:
07345795
Filing Dt:
05/01/1989
Title:
PLASMA ETCH ISOTROPY CONTROL
24
Patent #:
4984954
Issue Dt:
01/15/1991
Application #:
07563742
Filing Dt:
08/03/1990
Title:
SPATULA FOR WAFER TRANSPORT
25
Patent #:
5672239
Issue Dt:
09/30/1997
Application #:
08438261
Filing Dt:
05/10/1995
Title:
INTEGRATED SEMICONDUCTOR WAFER PROCESSING SYSTEM
26
Patent #:
5985089
Issue Dt:
11/16/1999
Application #:
08450369
Filing Dt:
05/25/1995
Title:
PLASMA ETCH SYSTEM
27
Patent #:
6048435
Issue Dt:
04/11/2000
Application #:
08675093
Filing Dt:
07/03/1996
Title:
PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
28
Patent #:
6500314
Issue Dt:
12/31/2002
Application #:
08675559
Filing Dt:
07/03/1996
Title:
PLASMA ETCH REACTOR AND METHOD
29
Patent #:
6127277
Issue Dt:
10/03/2000
Application #:
08742861
Filing Dt:
11/01/1996
Title:
METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR WAFER WITH FEATURES HAVING VERTICAL SIDEWALLS
30
Patent #:
5958139
Issue Dt:
09/28/1999
Application #:
08850224
Filing Dt:
05/02/1997
Title:
PLASMA ETCH SYSTEM
31
Patent #:
6046116
Issue Dt:
04/04/2000
Application #:
08974089
Filing Dt:
11/19/1997
Title:
A METHOD FOR MINIMIZING THE CRITICAL DIMENSION GROWTH OF A FEATURE ON A SEMICONDUCTOR WAFER
32
Patent #:
6354240
Issue Dt:
03/12/2002
Application #:
09152238
Filing Dt:
09/11/1998
Title:
PLASMA ETCH REACTOR HAVING A PLURALITY OF MAGNETS (AS AMENDED)
33
Patent #:
6006694
Issue Dt:
12/28/1999
Application #:
09204020
Filing Dt:
12/01/1998
Title:
PLASMA REACTOR WITH A DEPOSITION SHIELD
34
Patent #:
6360686
Issue Dt:
03/26/2002
Application #:
09382050
Filing Dt:
08/24/1999
Title:
PLASMA REACTOR WITH A DEPOSITION SHIELD
35
Patent #:
6190496
Issue Dt:
02/20/2001
Application #:
09384614
Filing Dt:
08/27/1999
Title:
PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
36
Patent #:
6410448
Issue Dt:
06/25/2002
Application #:
09384858
Filing Dt:
08/27/1999
Title:
PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
37
Patent #:
6120610
Issue Dt:
09/19/2000
Application #:
09412873
Filing Dt:
10/05/1999
Title:
PLASMA ETCH SYSTEM
38
Patent #:
6173674
Issue Dt:
01/16/2001
Application #:
09434092
Filing Dt:
11/05/1999
Title:
PLASMA REACTOR WITH A DEPOSITION SHIELD
39
Patent #:
6170431
Issue Dt:
01/09/2001
Application #:
09434990
Filing Dt:
11/05/1999
Title:
PLASMA REACTOR WITH A DEPOSITION SHIELD
40
Patent #:
6620335
Issue Dt:
09/16/2003
Application #:
09455641
Filing Dt:
12/07/1999
Title:
PLASMA ETCH REACTOR AND METHOD
41
Patent #:
6492280
Issue Dt:
12/10/2002
Application #:
09517387
Filing Dt:
03/02/2000
Title:
METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR WAFER WITH FEATURES HAVING VERTICAL SIDEWALLS
42
Patent #:
6774046
Issue Dt:
08/10/2004
Application #:
09880584
Filing Dt:
06/13/2001
Publication #:
US20010031561
Pub Dt:
10/18/2001
Title:
METHOD FOR MINIMIZING THE CRITICAL DIMENSION GROWTH OF A FEATURE ON A SEMICONDUCTOR WAFER
43
Patent #:
6905969
Issue Dt:
06/14/2005
Application #:
10156478
Filing Dt:
05/28/2002
Publication #:
US20020139665
Pub Dt:
10/03/2002
Title:
PLASMA ETCH REACTOR AND METHOD
Assignor
1
TEGAL CORPORATION
Exec Dt:
06/30/2003
Assignee
1
HIRSCHMAN, ORIN
1231 EAST 10TH STREET
BROOKLYN, NEW YORK 11230
Correspondence name and address
FEDERAL RESEARCH COMPANY, LLC
PENELOPE J.A. AGODOA
1030 15TH STREET, NW, SUITE 920
WASHINGTON, DC 20005

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