Total properties:
12
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11882253
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Filing Dt:
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07/31/2007
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Publication #:
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Pub Dt:
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02/14/2008
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Title:
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Extreme ultra violet light source device
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Patent #:
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Issue Dt:
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07/02/2013
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Application #:
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11979513
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Filing Dt:
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11/05/2007
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Publication #:
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Pub Dt:
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05/08/2008
| | | | |
Title:
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COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12352694
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Filing Dt:
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01/13/2009
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Publication #:
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Pub Dt:
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07/15/2010
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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Patent #:
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Issue Dt:
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10/29/2013
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Application #:
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12372958
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Filing Dt:
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02/18/2009
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Publication #:
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Pub Dt:
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09/03/2009
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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|
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Patent #:
|
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Issue Dt:
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07/03/2012
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Application #:
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12382108
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Filing Dt:
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03/09/2009
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Publication #:
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Pub Dt:
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09/10/2009
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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12482796
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Filing Dt:
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06/11/2009
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Publication #:
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Pub Dt:
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12/24/2009
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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Patent #:
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Issue Dt:
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12/04/2012
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Application #:
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12943090
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Filing Dt:
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11/10/2010
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Publication #:
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Pub Dt:
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03/10/2011
| | | | |
Title:
|
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13049374
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Filing Dt:
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03/16/2011
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Publication #:
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Pub Dt:
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09/01/2011
| | | | |
Title:
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DRIVER LASER FOR EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE
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|
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Patent #:
|
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Issue Dt:
|
10/23/2012
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Application #:
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13081899
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Filing Dt:
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04/07/2011
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Publication #:
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Pub Dt:
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07/28/2011
| | | | |
Title:
|
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
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|
|
Patent #:
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NONE
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Issue Dt:
|
|
Application #:
|
13176483
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Filing Dt:
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07/05/2011
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Publication #:
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Pub Dt:
|
10/27/2011
| | | | |
Title:
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LASER SYSTEM
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|
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Patent #:
|
|
Issue Dt:
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11/19/2013
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Application #:
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13370074
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Filing Dt:
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02/09/2012
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Publication #:
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Pub Dt:
|
10/18/2012
| | | | |
Title:
|
EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE
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|
|
Patent #:
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NONE
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Issue Dt:
|
|
Application #:
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13477940
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Filing Dt:
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05/22/2012
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Publication #:
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Pub Dt:
|
09/13/2012
| | | | |
Title:
|
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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|