Patent Assignment Details
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| Reel/Frame: | 013161/0899 | |
| Pages: | 5 |
| | Recorded: | 07/29/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10206268
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Filing Dt:
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07/26/2002
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Title:
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CRITICAL DIMENSION STATISTICAL PROCESS CONTROL IN SEMICONDUCTOR FABRICATION
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Assignee
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| NO. 16, LI-HSIN ROAD |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C. |
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Correspondence name and address
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BEYER WEAVER & THOMAS, LLP
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MICHAEL LEE
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P.O. BOX 778
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BERKELEY, C.A. 94704-0778
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