Total properties:
54
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Patent #:
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Issue Dt:
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04/19/1983
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Application #:
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06063036
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Filing Dt:
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08/02/1979
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Title:
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LAP SHAPING MACHINE WITH OSCILLATABLE POINT CUTTER AND SELECTIVELY ROTATABLE OR OSCILLATABLE LAP
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Patent #:
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Issue Dt:
|
06/13/1995
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Application #:
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08178530
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Filing Dt:
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01/05/1994
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Title:
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WAFER-HANDLING APPARATUS HAVING A RESILLENT MEMBRANE WHICH HOLDS WATER WHEN A VACUM IS APPLIED
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Patent #:
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Issue Dt:
|
09/12/1995
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Application #:
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08178531
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Filing Dt:
|
01/05/1994
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Title:
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WAFER CARRIER FOR FILM PLANARIZATION
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Patent #:
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Issue Dt:
|
04/04/2000
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Application #:
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08892795
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Filing Dt:
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07/15/1997
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Title:
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CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
|
10/12/1999
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Application #:
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08971642
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Filing Dt:
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11/17/1997
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Title:
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GRINDING PROCESS AND APPARATUS FOR PLANARIZING SAWED WAFERS
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Patent #:
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Issue Dt:
|
03/12/2002
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Application #:
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09038875
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Filing Dt:
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03/11/1998
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Title:
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PARALLEL ALIGNMENT METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
|
10/05/1999
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Application #:
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09124160
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Filing Dt:
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07/27/1998
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Title:
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APPARATUS FOR SENSING THE PRESENCE OF A WAFER
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Patent #:
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Issue Dt:
|
07/03/2001
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Application #:
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09228113
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Filing Dt:
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01/11/1999
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Title:
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APPARATUS AND METHOD FOR RELIABLY RELEASING WET, THIN WAFERS
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Patent #:
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Issue Dt:
|
10/17/2000
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Application #:
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09247106
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Filing Dt:
|
02/09/1999
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Title:
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ACCURATE POSITIONING OF A WAFER
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Patent #:
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Issue Dt:
|
09/04/2001
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Application #:
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09247107
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Filing Dt:
|
02/09/1999
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Title:
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NON-CONTACTING SUPPORT FOR A WAFER
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|
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Patent #:
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Issue Dt:
|
07/31/2001
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Application #:
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09247108
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Filing Dt:
|
02/09/1999
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Title:
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SENSING THE PRESENCE OF A WAFER
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Patent #:
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|
Issue Dt:
|
08/15/2000
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Application #:
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09247109
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Filing Dt:
|
02/09/1999
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Title:
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LIFTING AND RINSING A WAFER
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|
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Patent #:
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Issue Dt:
|
02/06/2001
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Application #:
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09248167
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Filing Dt:
|
02/09/1999
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Title:
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SLURRY PUMP CONTROL SYSTEM
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Patent #:
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Issue Dt:
|
11/14/2000
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Application #:
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09330472
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Filing Dt:
|
06/11/1999
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Title:
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OPTICAL VIEW PORT FOR CHEMICAL MECHANICAL PLANARIZATION ENDPOINT DETECTION
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|
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Patent #:
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Issue Dt:
|
12/17/2002
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Application #:
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09407472
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Filing Dt:
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09/28/1999
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Publication #:
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Pub Dt:
|
06/06/2002
| | | | |
Title:
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METHOD FOR CHEMICAL MECHANICAL POLISHING
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|
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Patent #:
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|
Issue Dt:
|
03/26/2002
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Application #:
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09432144
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Filing Dt:
|
11/02/1999
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Title:
|
METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
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|
|
Patent #:
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|
Issue Dt:
|
05/08/2001
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Application #:
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09432882
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Filing Dt:
|
11/02/1999
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Title:
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PAD QUICK RELEASE DEVICE FOR CHEMICAL MECHANICAL POLISHING
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|
|
Patent #:
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|
Issue Dt:
|
11/26/2002
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Application #:
|
09590470
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Filing Dt:
|
06/09/2000
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Title:
|
Polishing pad with built-in optical sensor
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|
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Patent #:
|
|
Issue Dt:
|
01/14/2003
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Application #:
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09608618
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Filing Dt:
|
06/30/2000
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Title:
|
LIFTING AND RINSING A WAFER
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|
|
Patent #:
|
|
Issue Dt:
|
06/18/2002
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Application #:
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09630507
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Filing Dt:
|
08/02/2000
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Title:
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ACCURATE POSITIONING OF A WAFER
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|
|
Patent #:
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|
Issue Dt:
|
10/15/2002
|
Application #:
|
09693040
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Filing Dt:
|
10/20/2000
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Title:
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PAD QUICK RELEASE DEVICE FOR CHEMICAL MECHANICAL PLANARIZATION
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|
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Patent #:
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|
Issue Dt:
|
02/12/2002
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Application #:
|
09693064
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Filing Dt:
|
10/20/2000
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Title:
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Multi-pad apparatus for chemical mechanical planarization
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|
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Patent #:
|
|
Issue Dt:
|
08/05/2003
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Application #:
|
09693148
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Filing Dt:
|
10/20/2000
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Title:
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PAD SUPPORT APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION
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|
|
Patent #:
|
|
Issue Dt:
|
03/04/2003
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Application #:
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09693152
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Filing Dt:
|
10/20/2000
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Title:
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PAD RETRIEVAL APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION
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|
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Patent #:
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|
Issue Dt:
|
09/17/2002
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Application #:
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09693153
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Filing Dt:
|
10/20/2000
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Title:
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PAD TRANSFER APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION
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|
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Patent #:
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|
Issue Dt:
|
02/04/2003
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Application #:
|
09699202
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Filing Dt:
|
10/26/2000
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Title:
|
POLISHING CHEMICAL DELIVERY FOR SMALL HEAD CHEMICAL MECHANICAL PLANARIZATION
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|
|
Patent #:
|
|
Issue Dt:
|
02/11/2003
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Application #:
|
09699280
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Filing Dt:
|
10/26/2000
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Title:
|
SHAPING POLISHING PAD FOR SMALL HEAD CHEMICAL MECHANICAL PLANARIZATION
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|
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Patent #:
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|
Issue Dt:
|
02/18/2003
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Application #:
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09699283
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Filing Dt:
|
10/26/2000
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Title:
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HIGH PLANARITY CHEMICAL MECHANICAL PLANARIZATION
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|
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Patent #:
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|
Issue Dt:
|
02/04/2003
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Application #:
|
09699285
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Filing Dt:
|
10/26/2000
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Title:
|
MULTI-ACTION CHEMICAL MECHANICAL PLANARIZATION DEVICE AND METHOD
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|
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Patent #:
|
|
Issue Dt:
|
01/28/2003
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Application #:
|
09699287
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Filing Dt:
|
10/26/2000
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Title:
|
SPHERICAL DRIVE ASSEMBLY FOR CHEMICAL MECHANICAL PLANARIZATION
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|
|
Patent #:
|
|
Issue Dt:
|
04/30/2002
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Application #:
|
09699289
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Filing Dt:
|
10/26/2000
|
Title:
|
WAFER SUPPORT FOR CHEMICAL MECHANICAL PLANARIZATION
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|
|
Patent #:
|
|
Issue Dt:
|
10/07/2003
|
Application #:
|
09699290
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Filing Dt:
|
10/26/2000
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Title:
|
IN SITU FEATURE HEIGHT MEASUREMENT DURING CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
04/22/2003
|
Application #:
|
09706336
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Filing Dt:
|
11/03/2000
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Title:
|
HARD POLISHING PAD FOR CHEMICAL MECHANICAL PLANARIZATION
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|
|
Patent #:
|
|
Issue Dt:
|
02/17/2004
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Application #:
|
09706349
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Filing Dt:
|
11/03/2000
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Title:
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COMBINED CHEMICAL MECHANICAL PLANARIZATION AND CLEANING
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|
|
Patent #:
|
|
Issue Dt:
|
04/15/2003
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Application #:
|
09709972
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Filing Dt:
|
11/10/2000
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Title:
|
SUBAPERATURE CHEMICAL MECHANICAL PLANARIZATION WITH POLISHING PAD CONDITIONING
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|
|
Patent #:
|
|
Issue Dt:
|
12/03/2002
|
Application #:
|
09712825
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Filing Dt:
|
11/14/2000
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Title:
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OPTICAL VIEW PORT FOR CHEMICAL MECHANICAL PLANARIZATION ENDPOINT DETECTION
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|
|
Patent #:
|
|
Issue Dt:
|
05/25/2004
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Application #:
|
09970252
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Filing Dt:
|
09/29/2001
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Publication #:
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|
Pub Dt:
|
07/11/2002
| | | | |
Title:
|
POLISHING PAD WITH BUILT-IN OPTICAL SENSOR
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|
|
Patent #:
|
|
Issue Dt:
|
06/01/2004
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Application #:
|
10059701
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Filing Dt:
|
01/29/2002
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Publication #:
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|
Pub Dt:
|
07/31/2003
| | | | |
Title:
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METHOD OF SPIN ETCHING WAFERS WITH AN ALKALI SOLUTION
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|
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Patent #:
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|
Issue Dt:
|
07/26/2005
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Application #:
|
10065589
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Filing Dt:
|
10/31/2002
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Publication #:
|
|
Pub Dt:
|
05/06/2004
| | | | |
Title:
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METHOD OF PREPARING WHOLE SEMICONDUCTOR WAFER FOR ANALYSIS
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|
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Patent #:
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|
Issue Dt:
|
02/24/2004
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Application #:
|
10145332
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Filing Dt:
|
05/13/2002
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Publication #:
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|
Pub Dt:
|
11/13/2003
| | | | |
Title:
|
METHOD FOR MAKING A POLISHING PAD WITH BUILT-IN OPTICAL SENSOR
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|
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Patent #:
|
|
Issue Dt:
|
04/27/2004
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Application #:
|
10146494
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Filing Dt:
|
05/14/2002
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Publication #:
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|
Pub Dt:
|
11/20/2003
| | | | |
Title:
|
POLISHING PAD WITH OPTICAL SENSOR
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|
|
Patent #:
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|
Issue Dt:
|
04/26/2005
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Application #:
|
10216107
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Filing Dt:
|
08/08/2002
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Publication #:
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|
Pub Dt:
|
11/20/2003
| | | | |
Title:
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POLISHING PAD SENSOR ASSEMBLY WITH A DAMPING PAD
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Patent #:
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|
Issue Dt:
|
03/28/2006
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Application #:
|
10249433
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Filing Dt:
|
04/08/2003
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Publication #:
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Pub Dt:
|
11/13/2003
| | | | |
Title:
|
PROTECTION OF WORK PIECE DURING SURFACE PROCESSING
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Patent #:
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Issue Dt:
|
10/28/2003
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Application #:
|
10259536
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Filing Dt:
|
09/26/2002
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Publication #:
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Pub Dt:
|
05/01/2003
| | | | |
Title:
|
METHOD FOR APPLYING AN INSERT OR TAPE TO CHUCKS OR WAFER CARRIERS USED FOR GRINDING, POLISHING, OR PLANARIZING WAFERS
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Patent #:
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|
Issue Dt:
|
02/24/2004
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Application #:
|
10303621
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Filing Dt:
|
11/25/2002
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Publication #:
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|
Pub Dt:
|
06/12/2003
| | | | |
Title:
|
ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING
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Patent #:
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Issue Dt:
|
11/15/2005
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Application #:
|
10313576
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Filing Dt:
|
12/09/2002
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Publication #:
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Pub Dt:
|
11/06/2003
| | | | |
Title:
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COUPLER FOR COUPLING AN ACCESSORY TO A DIPPER ARM AND A CONTROL SYSTEM FOR SUCH A COUPLER
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Patent #:
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|
Issue Dt:
|
02/15/2005
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Application #:
|
10327712
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Filing Dt:
|
12/19/2002
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Publication #:
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Pub Dt:
|
03/11/2004
| | | | |
Title:
|
MODULAR METHOD FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
|
04/26/2005
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Application #:
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10365081
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Filing Dt:
|
02/11/2003
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Publication #:
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Pub Dt:
|
08/12/2004
| | | | |
Title:
|
DEVICE FOR SUPPORTING THIN SEMICONDUCTOR WAFERS
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Patent #:
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|
Issue Dt:
|
09/20/2005
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Application #:
|
10374494
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Filing Dt:
|
02/25/2003
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Publication #:
|
|
Pub Dt:
|
08/14/2003
| | | | |
Title:
|
SUBAPERTURE CHEMICAL MECHANICAL PLANARIZATION WITH POLISHING PAD CONDITIONING
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Patent #:
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|
Issue Dt:
|
01/02/2007
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Application #:
|
10425896
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Filing Dt:
|
04/28/2003
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Publication #:
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Pub Dt:
|
11/18/2004
| | | | |
Title:
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WAFER CARRIER PIVOT MECHANISM
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|
|
Patent #:
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|
Issue Dt:
|
04/12/2005
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Application #:
|
10626490
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Filing Dt:
|
07/22/2003
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Publication #:
|
|
Pub Dt:
|
07/22/2004
| | | | |
Title:
|
SLURRY PUMP CONTROL SYSTEM
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|
|
Patent #:
|
|
Issue Dt:
|
03/22/2005
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Application #:
|
10680995
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Filing Dt:
|
10/07/2003
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Publication #:
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Pub Dt:
|
04/07/2005
| | | | |
Title:
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RETAINING RING FOR WAFER CARRIERS
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|
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Patent #:
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|
Issue Dt:
|
06/13/2006
|
Application #:
|
10717032
|
Filing Dt:
|
11/18/2003
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Publication #:
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|
Pub Dt:
|
08/12/2004
| | | | |
Title:
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METHOD OF BACKGRINDING WAFERS WHILE LEAVING BACKGRINDING TAPE ON A CHUCK
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|
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Patent #:
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|
Issue Dt:
|
06/26/2007
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Application #:
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10754360
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Filing Dt:
|
01/08/2004
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Publication #:
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|
Pub Dt:
|
07/14/2005
| | | | |
Title:
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DEVICES AND METHODS FOR OPTICAL ENDPOINT DETECTION DURING SEMICONDUCTOR WAFER POLISHING
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|