Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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04/20/2021
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Application #:
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16447622
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Filing Dt:
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06/20/2019
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Publication #:
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Pub Dt:
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10/03/2019
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Inventors:
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Stefan Krone, Lars Berger, Ralf Kiesel, Paul Wijlaars
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Title:
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CONTROL DEVICE FOR ACTUATING AN ACTUATOR UNIT OF A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM HAVING A CONTROL DEVICE, AND METHOD FOR OPERATING THE CONTROL DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS 5504-DR |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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