Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/15/1984
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Application #:
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06434074
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Filing Dt:
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10/12/1982
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Inventors:
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HARALD BOHLEN, JOHANN GRESCHNER, PETER NEHMIZ
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Title:
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SHADOW PROJECTION MASK FOR ION IMPLANTATION AND ION BEAM LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| SUGHRUE, MION, ZINN, MACPEAK & SEAS |
| 1776 K ST., N. W. |
| WASHINGTON, DC 20006 |
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