Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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06/23/1987
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Application #:
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06750081
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Filing Dt:
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06/28/1985
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Inventors:
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GUENTHER O. LANGNER, KENNETH J. HARTE, MICHAEL J. DALTERIO, MARVIN FISHBEIN
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Title:
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METHOD FOR MEASUREMENT OF SPOTSIZE AND EDGEWIDTH IN ELECTRON BEAM LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 8100-34TH AVENUE SOUTH |
| MINNEAPOLIS, MINNESOTA 55440 |
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| CHARLES W. HELZER |
| P.O. BOX 309 |
| 694 WHITE SWAN DRIVE |
| ARNOLD, MD 21012 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 8100-34TH AVENUE SOUTH |
| MINNEAPOLIS, MINNESOTA 55440 |
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| EPSTEIN & EDELL |
| SUITE 200 CRYSTAL PLAZA ONE |
| 2001 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VIRGINIA, 22202 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| STE. NO. TWO, 16845 KERCHEVAL AVENUE |
| GROSSE POINT, MICHIGAN 48230 |
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| THOMAS W. BAUMGARTEN, JR. |
| CONSULTANTS, INC. |
| ST. CLAIR INTELLECTUAL PROP., STE. #2 |
| GROSS POINTE, MI 48230 |
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Assignment:
4
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1 HYANGJEONG-DONG, HEUNGDUK-KU, CHEONGJU-SI |
| CHUNGCHEONGBUK-DO, KOREA, REPUBLIC OF |
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| ALAN R. LOUDERMILK |
| 10950 NORTH BLANEY |
| SUITE B |
| CUPERTINO, CALIFORNIA 95014 |
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