Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/22/1988
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Application #:
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07026510
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Filing Dt:
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03/17/1987
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Inventors:
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GERHARD ELSNER, JOHANN GRESCHNER, HOLGER HINKEL
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Title:
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METHOD OF FORMING IDENTICALLY POSITIONED ALIGNMENT MARKS ON OPPOSITE SIDES OF A SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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A CORP. OF NEW YORK |
ARMONK, NEW YORK 10504 |
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STEPHEN J. LIMANEK |
IBM CORP., 915/972-2, |
ESSEX JUNCTION, VT 05452 |
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