Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/1989
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Application #:
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07049254
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Filing Dt:
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05/13/1987
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Inventors:
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VU Q. BUI, KEVIN K. CHAN, JOSEPH G. HOFFARTH, VICKI J. MALUEG
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Title:
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PLASMA ETCH ENHANCEMENT WITH LARGE MASS INERT GAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| ELMER W. GALBI |
| IBM INTELLECTUAL PROPERTY LAW N50/251-2 |
| 1701 NORTH ST. |
| ENDICOTT, NY 13760 |
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