Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/03/1989
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Application #:
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07196397
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Filing Dt:
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05/20/1988
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Inventors:
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THOMAS P. DONOHUE, FRITZ J. HOHN, GEORGE A. SAI-HALASZ
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Title:
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ELECTRON BEAM LITHOGRAPHY ALIGNMENT SYSTEM USING ELECTRIC FIELD CHANGES TO ACHIEVE REGISTRATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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IBM CORPORATION |
INTELLECUTAL PROPERTY LAW DEPT. |
P.O. BOX 218 |
YORKTOWN HEIGHTS, N.Y. 10598 |
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