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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/08/1991
Application #:
07324210
Filing Dt:
03/15/1989
Inventor:
URS WEGMANN
Title:
METHOD FOR EROSION DETECTION OF A SPUTTERING TARGET AND TARGET ARRANGEMENT
Assignment: 1
Reel/Frame:
005072/0598Recorded: 05/01/1989Pages: 1
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignor:
Exec Dt:
04/11/1989
Assignee:
DBA FL-9496 BALZERS
FUERSTENTUM, LIECHTENSTEIN
Correspondent:
MC GLEW & TUTTLE, P.C.
SCARBOROUGH STATION
SCARBOROUGH, N.Y. 10510-0827

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