Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/08/1991
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Application #:
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07420870
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Filing Dt:
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10/12/1989
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Inventors:
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OTTO KOBLINGER, KLAUS MEISSNER, REINHOLD MUHL, HANS-JOACHIM TRUMPP, WERNER ZAPKA
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Title:
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PROCESS FOR MAKING MASKS WITH STRUCTURES IN THE SUBMICRON RANGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| A CORP. OF NY |
| ARMONK, NEW YORK 10504 |
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| JEFFREY L. BRANDT |
| IBM CORP., DEPT. 901/BLDG. 300-482 |
| ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-9988 |
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