Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/17/1994
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Application #:
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07874812
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Filing Dt:
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04/28/1992
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Inventors:
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HISHAM Z. MASSOUD, RONALD K. SAMPSON
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Title:
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METHOD AND APPARATUS FOR REAL-TIME WAFER TEMPERATURE AND THIN FILM GROWTH MEASUREMENT AND CONTROL IN A LAMP-HEATED RAPID THERMAL PROCESSOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| RICHARD E. JENKINS |
| 200 SOUTH SQUARE CORPORATE CENTRE II |
| 3708 MAYFAIR ST. |
| DURHAM, NC 27707 |
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