Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/16/1994
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Application #:
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07943086
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Filing Dt:
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09/10/1992
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Inventors:
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WILLIAM R. BRUNSVOLD, PREMLATHA JAGANNATHAN, STEVE S. MIURA, MELVIN W. MONTGOMERY et al
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Title:
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NEW SILICON CONTAINING POSITIVE RESIST FOR DUV LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| DALE M. CROCKATT |
| WHITHAM & MARHOEFER |
| 11800 SUNRISE VALLEY DRIVE |
| SUITE 220 |
| RESTON, VA 22091 |
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