Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/08/1994
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Application #:
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08098914
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Filing Dt:
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07/29/1993
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Inventor:
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CHRIS A. MACK
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Title:
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PHOTOLITHOGRAPHY EXPOSURE TOOL AND METHOD FOR IN SITU PHOTORESIST MEASUREMENTS AND EXPOSURE CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DIRNSA, ATTN: TOM MASER, AGC(T) R/E |
| FT. MEADE, MARYLAND 20755-6000 |
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| DIRECTOR |
| DIRNSA SECURITY AGENCY |
| ATTN: MR. THOMAS O. MASER |
| FT. MEADE, MD 20755-6000 |
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