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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
5367139
Issue Dt:
11/22/1994
Application #:
07425659
Filing Dt:
10/23/1989
Inventors:
REID STUART BENNETT, ALBERT R. ELLINGBOE, GEORGE GORDON GIFFORD, KURT L. HALLER et al
Title:
METHODS AND APPARATUS FOR CONTAMINATION CONTROL IN PLASMA PROCESSING
Assignment: 1
Reel/Frame:
005163/0674Recorded: 10/23/1989Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
BENNETT, REID STUART
Exec Dt:
10/16/1989
ELLINGBOE, ALBERT R.
Exec Dt:
10/12/1989
GIFFORD, GEORGE GORDON
Exec Dt:
10/16/1989
HALLER, KURT L.
Exec Dt:
10/17/1989
MC KILLOP, JOHN SLATON
Exec Dt:
10/18/1989
SELWYN, GARY S.
Exec Dt:
10/16/1989
SINGH, JYOTHI
Exec Dt:
10/23/1989
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, A CORP. OF NY
ARMONK,, NEW YORK 10504
Correspondent:
GRAHAM S. JONES, II
INTELLECTUAL PROPERTY LAW, BLDG. 300 482
IBM CORPORATION, ROUTE 52
HOPEWELL JUNCTION, NY 12533-9988

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