Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/18/1995
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Application #:
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08173294
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Filing Dt:
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12/22/1993
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Inventors:
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NAFTALI E. LUSTIG, KATHERINE L. SAENGER, HO-MING TONG
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Title:
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IN-SITU ENDPOINT DETECTION AND PROCESS MONITORING METHOD AND APPARATUS FOR CHEMICAL-MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORPORATION |
| MICHAEL J. BALCONI-LAMICA |
| INTELLECTUAL PROPERTY LAW DEPT. |
| DEPT. 34H/BLDG. 300-482, 1580 RT. 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1 ASAHI-CHO, HANEDA, OHTA-KU |
| TOKYO 144-8510, JAPAN |
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| WENDEROTH, LIND & PONACK, L.L.P. |
| ATTN: NILS E. PEDERSEN, ESQ. |
| 2033 K STREET, N.W., SUITE 800 |
| WASHINGTON, DC 20006-1021 |
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