Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/1996
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Application #:
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08395269
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Filing Dt:
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02/28/1995
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Inventor:
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GURTEJ S. SANDHU
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Title:
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METHOD OF CLEANING HIGH DENSITY INDUCTIVELY COUPLED PLASMA CHAMBER USING CAPACITIVE COUPLING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT DEPARTMENT, MS525 2805 EAST COLUMBIA ROAD |
| P.O. BOX 6 |
| BOISE, IDAHO 83707-0006 |
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| MICRON TECHNOLOGY, INC. |
| SUSAN B. COLLIER, PATENT AGENT |
| PATENT DEPARTMENT, MS525 |
| 2805 EAST COLUMBIA ROAD - P.O. BOX 6 |
| BOISE, IDAHO 83707-0006 |
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